Kupanga ma semiconductor kumagwira ntchito pamalo olumikizirana malo olondola kwambiri komanso malo ovuta kwambiri. Njira monga epitaxy, kukula kwa kristalo, ndi kutentha kwambiri nthawi zambiri zimapitirira 1000°C, komwe ngakhale kusinthasintha pang'ono kwa kutentha kumatha kumasulira kusiyanasiyana koyezeka mu makulidwe a filimu, kugawa kwa dopant, komanso magwiridwe antchito a chipangizocho. Pankhaniyi, zipangizo zomwe zimathandiza malo okhazikika komanso obwerezabwereza kutentha sizothandiza—ndizo maziko.
Pakati pa zinthu zimenezi,graphite feltyakhala ngati njira yofunika kwambiri yoyendetsera kutentha m'njira zapamwamba za semiconductor. Kawirikawiri imanyalanyazidwa poyerekeza ndi ma wafer kapena zida zosungiramo zinthu, makina oteteza graphite—makamaka graphite yoyera kwambiri yomwe imamverera kuti iteteze kutentha—imagwira ntchito yofunika kwambiri pakusunga kukhazikika kwa njira, kukonza zokolola, komanso kuthandizira kusintha kupita ku ma semiconductors okhala ndi bandgap yayikulu monga SiC ndi GaN.
Mtundu wa Graphite Felt
Graphite felt, nthawi zina imatchedwachofewa cha ulusi wa kaboni, ndi chinthu chopepuka komanso chofewa chopangidwa ndi ulusi wa kaboni wolumikizidwa womwe watenthedwa kuti ukhale woyera kwambiri komanso wokhazikika. Kutengera njira zochikonzera, chingaperekedwe ngati chofewa choteteza kutentha,graphite yolimba inamveka, kapena graphite hard felt, iliyonse yopangidwa kuti igwirizane ndi zofunikira zinazake za kutentha ndi makina.
Chomwe chimasiyanitsa graphite insulation felt ndi zinthu zodziwika bwino zotetezera kutentha ndi kuphatikiza kwake kwapadera kwa zinthu. Imakhala ndi kutentha kochepa kwambiri, zomwe zimathandiza kuti kutentha kusungike bwino ngakhale m'malo otentha kwambiri. Nthawi yomweyo, imasunga kapangidwe kake pa kutentha kopitilira 2000°C mumlengalenga wopanda mpweya kapena wocheperako. Kusalowa kwake ndi mankhwala komanso kuchuluka kwa zodetsa pang'ono—makamaka pazinthu za semiconductor-grade—zimatsimikizira kuti palibe chiopsezo choipitsidwa, chomwe ndi chofunikira kwambiri popanga zinthu za front-end.
Mu ntchito zapamwamba, graphite yoyera kwambiri yotetezera kutentha imakonzedwanso kuti ichepetse zinyalala zachitsulo kufika pa ppm kapena ngakhale sub-ppm. Mlingo uwu wa chiyero umagwirizana ndi zofunikira zolimba zowongolera kuipitsidwa kwa mafakitale amakono a semiconductor, makamaka munjira zokhudzana ndi ma semiconductor ophatikizika.
Kugwiritsa Ntchito mu Njira Zofunikira za Semiconductor
Kugwiritsa ntchito kwakukulu kwa graphite felt kuli mu kuthekera kwake kopanga ndikukhazikitsa minda ya kutentha m'njira zosiyanasiyana zotentha kwambiri. Pakukula kwa epitaxial, kaya ndi silicon, silicon carbide, kapena gallium nitride, kusunga kutentha kofanana pamwamba pa wafer ndikofunikira. Graphite felt nthawi zambiri imaphatikizidwa mu reactor ngati chotetezera kutentha, chozunguliridwa ndi zinthu zotenthetsera, kapena kuyikidwa kumbuyo kwa masensa. Mwa kuchepetsa kutentha kwa radial ndi axial, imalola kukula kofanana komanso zinthu zofanana, zomwe zimakhudza mwachindunji magwiridwe antchito a chipangizo ndi phindu lake.
Mu silicon carbide epitaxy, komwe kutentha kwa ndondomeko kumatha kufika 1600°C, graphite insulation felt imakhala yofunika kwambiri. Ntchito yake imapitirira kuposa insulation yosavuta; imapanga mawonekedwe a kutentha mkati mwa reactor, kuonetsetsa kuti nthunzi ikuyenda bwino komanso kuchepetsa kupsinjika kwa kutentha pa ma wafer. Popanda kuwongolera kotere, mavuto monga kusakhala kofanana kwa makulidwe, wafer warpage, ndi mapangidwe a zolakwika zimakhala zoonekera kwambiri.
Njira zokulira makristalo zimagogomezeranso kufunika kwa graphite felt. Mu njira monga physical nthunzi transport (PVT) ya SiC kapena Czochralski process ya silicon, kutentha kwa mkati mwa chipinda chokulirapo kumatsimikiza mtundu wa kristalo. Pano, graphite felt yolimba kapena graphite hard felt nthawi zambiri imagwiritsidwa ntchito popanga malo otetezedwa olamulidwa. Mwa kusintha kuchuluka kwa felt, makulidwe, ndi kasinthidwe, mainjiniya amatha kusintha kayendedwe ka kutentha, motero zimakhudza kuchuluka kwa kukula kwa kristalo, kuchuluka kwa zolakwika, ndi mtundu wonse wa boule. Mu kukula kwa kristalo ya SiC, kasamalidwe ka kutentha koteroko kamagwirizana mwachindunji ndi kuchepetsa ma micropipes ndi dislocations.
Graphite inamvekaImagwiranso ntchito yothandiza koma yofunika kwambiri mu machitidwe a chemical vapor deposition (CVD) ndi metal-organic chemical vapor deposition (MOCVD). Monga momwe graphite insulation imamvekera, imathandiza kusunga malo otentha okhazikika mkati mwa reactor, kuchepetsa kutaya kutentha ndikuchepetsa zotsatira za makoma ozizira. Izi zimathandiza kuti ma deposition akhale ofanana komanso kuti njira zibwererenso, makamaka m'malo opangira zinthu zambiri.
Mu njira zotenthetsera kutentha kwambiri, makamaka zomwe zimagwirizana ndi ma semiconductors a wide-bandgap, graphite felt imathandizira kugwiritsa ntchito mphamvu moyenera komanso kukhazikika kwa kutentha. Mwa kuchepetsa kutaya kwa kutentha, zimathandiza ng'anjo kusunga kutentha kofanana ndi mphamvu zochepa zomwe zimalowa, komanso kuchepetsa kupsinjika kwa kutentha pazigawo za ntchito.
Kupatula kupanga wafer, graphite felt imagwiritsidwa ntchito kwambiri pokonza zinthu zam'mwamba, kuphatikizapo kupukuta ufa, kupanga ceramic, ndi kuyeretsa zigawo za graphite. Njirazi, ngakhale sizimawonekera nthawi zonse mkati mwa nsalu ya semiconductor, ndizofunikira popanga zipangizo zapamwamba zomwe zimathandizira kupanga zipangizo zamakono.
Zochitika: Kupita ku Chiyero Chapamwamba ndi Kuphatikizana Kwantchito
Pamene makampani opanga ma semiconductor akusintha kupita ku ntchito zovuta kwambiri—makamaka magalimoto amagetsi, mphamvu zongowonjezwdwanso, ndi zamagetsi zamagetsi—zofunikira zomwe zimayikidwa pa zipangizo zoyendetsera kutentha zikukulirakulira. Izi zikuwonekera makamaka pakugwiritsira ntchito mwachangu ukadaulo wa SiC ndi GaN, komwe kutentha kwambiri kogwirira ntchito ndi mawindo olimba amafunikira magwiridwe antchito abwino kwambiri oteteza kutentha.
Chimodzi mwa zinthu zofunika kwambiri ndi kupita patsogolo kwa zipangizo zoyera kwambiri. Graphite yoyera kwambiri yotetezera kutentha ikupangidwa ndi milingo yotsika kwambiri yodetsa kuti ikwaniritse miyezo ya kuipitsidwa kwa zinthu za m'badwo wotsatira. Nthawi yomweyo, zatsopano monga graphite felt yolimba komanso graphite hard felt zikuthandiza kuwongolera bwino kutentha kwa nthaka komanso nthawi yayitali yogwirira ntchito.
Chinthu china chofunikira ndi kuphatikiza zophimba zoteteza, monga silicon carbide (SiC), pamalo opangidwa ndi graphite. Zophimba zimenezi zimawonjezera kukana kwa okosijeni, zimachepetsa kupanga tinthu tating'onoting'ono, komanso zimawonjezera kulimba kwa ntchito, zomwe zimathandiza kuthetsa zoletsa zina zachikhalidwe za zinthu zoteteza zomwe zimapangidwa ndi kaboni.
Kuyang'ana patsogolo,graphite feltikuyembekezeka kusintha kuchoka pa chinthu chosungira zinthu zotenthetsera kukhala chinthu chopangidwa mwaluso kwambiri pakupanga zida za semiconductor. Kudzera mu kukonza zinthu ndi kusintha kwapamwamba, ipitiliza kuthandizira kufunafuna kwa makampaniwa kuti azichita bwino kwambiri, kudalirika kwambiri, komanso kuwongolera njira molimbika.
Nthawi yotumizira: Epulo-17-2026