Taking polyacrylonitrile based carbon felt as an example, the area weight is 500g/m2 and 1000g/m2, the longitudinal and transverse strength (N/mm2) are 0.12, 0.16, 0.10, 0.12, the breaking elongati...
In modern semiconductor manufacturing, thermal management is one of the most influential factors affecting crystal quality, epitaxial uniformity, and overall process stability. Whether producing mo...
Seals play a key role in the industrial field, and graphite bearings, as an important seal, are gradually showing broad application prospects. Especially in fields such as semiconductor manufacturi...
Sintered silicon carbide is an important ceramic material, which is widely used in high temperature, high pressure and high strength fields. Reaction sintering of sic is a key step in preparing sin...
Graphite ring is a kind of multifunctional material which is widely used in various fields. It is made of graphite and has unique properties and characteristics. In science, industry and other fiel...
1. What is a PECVD boat?
1.1 Definition and core functions
PECVD boat (Plasma Enhanced Chemical Vapor Deposition) is a core tool used to carry wafers or substrates in the PECVD process. It...