Mapeti eCVD epamusoro eSiC Epitaxial Growth
Yakagadzirirwa michina yedu ye semiconductor ine simba guru inoshanda pasi pekumanikidzwa kwakanyanya kwekupisa (1500°C - 1700°C), maCVD SiC neTaC coated planetary susceptors edu, satellite disks, uye gas deflectors zvakagadzirwa kuti zvibudirire. Yakagadzirwa kudzivirira kugadzirwa kwezvikamu, kuora kwenzvimbo, uye reactive gas etching (H₂, SiH₄, C₃H∯), macoatings edu epamusoro anovimbisa kushanda kwenguva refu, kutonga kwepamusoro kwedopant, uye kufanana kwehupamhi hwefirimu mukati mese.Mawafer eSiC epitaxial ane 6-inch uye 8-inch.
Kugara zvakanaka pakupisa kusvika 1700°C munzvimbo dzakaoma dzekuderedza H₂/silane.
Inobvisa kucheka kweganda, kutsemuka kweganda, uye kupwanyika kweganda panguva yekupisa kunokurumidza.
Machining eCNC akagadzirwa zvakanaka kuti ashandiswe neSiC Epi reactors yepamusoro-soro (LPE, Aixtron, Nuflare).
| Chiratidzo cheUnyanzvi | Kukosha Kwekutsanangurwa | Nzira Yakajairwa / Yekuyedza |
|---|---|---|
| Sarudzo dzezvinhu zvekuputira | CVD SiC / Tantalum Carbide (TaC) | Rutivi rweHemetic Rwakachena Kwazvo |
| Chikamu chepasi | Graphite Yakacheneswa Isostatic | Kusachena Kwakawanda < 5 ppm |
| Kuramba Kupisa Kwekupisa | Delta T > 500°C Rate Rate | Hapana Kutsemuka/Kubvunda |
| Kuoma Kwepamusoro (Ra) | ≤ 0.4 μm (Girazi Rakakweshwa) | Inodzivirira Wafer Kunamira & Zvidimbu |
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SiC Coating Graphite MOCVD Wafer Carriers Susce ...
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SiC Coated Graphite Base Carriers
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Chikamu cheGraphite chekumusoro nechepasi cheSi ...
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SiC Coated Graphite Susceptor Uye Carrier YeW ...
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SiC Coated Graphite Halfmoon Chikamu CheSilicon C ...
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Chikamu cheSiC Coated Graphite Hafu yeMwedzi uye Kuungana ...