Silicon Carbidechinhu chakaoma chine silicon nekabhoni, uye chinowanikwa muchisikigo sechicherwa chisingawanzoonekwi che moissanite. Zvidimbu zvesilicon carbide zvinogona kubatanidzwa pamwe chete nekusinta kuti zvigadzire zviumbwa zveceramics zvakaoma kwazvo, izvo zvinoshandiswa zvakanyanya mukushandiswa kunoda kugara kwenguva refu, kunyanya mukufamba kwema semiconductor.
Maumbirwo eSiC mumuviri
Chii chinonzi SiC Coating?
SiC coating ipurasitiki yakakora, isingapfeki yesilicon carbide ine ngura yakawanda uye inodzivirira kupisa uye inofambisa kupisa zvakanaka. Iyi purasitiki yeSiC yakachena kwazvo inonyanya kushandiswa mumaindasitiri e semiconductor uye emagetsi kudzivirira ma wafer carriers, mabhesi nezvinhu zvinodziya kubva kunzvimbo dzinopisa uye dzinoita reactive. SiC coating yakakodzerawo ma vacuum heaters uye sample heating munzvimbo dzine vacuum yakawanda, reactive uye oxygen.
Kuchena kwakanyanya kweSiC pamusoro pekuputira
Chii chinonzi maitiro ekuputira SiC?
Rutivi rutete rwesilicon carbide runoiswa pamusoro pe substrate uchishandisaCVD (Kubviswa kweUtsi hweMakemikari)Kuisa mvura muchinhu ichi kunowanzoitwa patembiricha ye1200-1300°C uye maitiro ekuwedzera kwekupisa kwechinhu ichi anofanira kuenderana neSiC coating kuderedza kushushikana kwekupisa.
CVD SIC Coating FILM CRISTAL STRUCTURE
Hunhu hweSiC coating hunonyanya kuratidzwa mukudzivirira kwayo kupisa kwakanyanya, kuomarara, kuramba ngura uye kupisa kwakasimba.
Zviyero zvemuviri zvinowanzoita seizvi:
Kuoma: SiC coating inowanzova neVickers Hardness iri pakati pe2000-2500 HV, izvo zvinoita kuti dzisanyanya kupfekwa uye dzisakuvadzwe zvakanyanya mumaindasitiri.
Kuwanda kwevanhu: Mapendi eSiC anowanzova nehuremu hwe3.1-3.2 g/cm³. Huremu hwacho hwakawanda hunobatsira kuti pendi yacho irambe yakasimba uye yakasimba.
Kufambisa kwekupisa: Mapendi eSiC ane simba rekupisa rakawanda, rinowanzova pakati pe120-200 W/mK (pa20°C). Izvi zvinoita kuti iite zvakanaka mukupisa kwakakwirira uye zvinoita kuti ive yakakodzera michina yekurapa kupisa muindasitiri yesemiconductor.
Nzvimbo yekunyunguduka: silicon carbide ine poindi yekunyunguduka inosvika 2730°C uye ine kugadzikana kwakanaka kwekupisa pakupisa kwakanyanya.
Kuwanda kweThermal Coefficient: Mapendi eSiC ane low linear coefficient of thermal expansion (CTE), kazhinji ari pakati pe4.0-4.5 µm/mK (mu 25-1000℃). Izvi zvinoreva kuti kugadzikana kwayo kwakanyatsonaka pane kusiyana kukuru kwekupisa.
Kuramba ngura: Mapendi eSiC anodzivirira zvikuru ngura munzvimbo dzine acid yakasimba, alkali uye oxidizing, kunyanya kana uchishandisa acid yakasimba (yakadai seHF kana HCl), kudzivirira ngura kwavo kunopfuura zvakanyanya kwezvinhu zvesimbi zvemazuva ano.
SiC coating application substrate
SiC coating inowanzo shandiswa kuvandudza ngura, kupisa kwakanyanya, uye plasma efrost ye substrate. Zvinhu zvinoshandiswa zvinosanganisira zvinotevera:
| Rudzi rwe substrate | Chikonzero chekunyorera | Kushandiswa kwakajairika |
| Grafiti | - Chimiro chakareruka, kufambisa zvakanaka kwekupisa - Asi inongoora nyore nyore neplasma, inoda dziviriro yeSiC coating | Zvikamu zvemukamuri re vacuum, mabhoti egrafiti, matireyi eplasma etching, nezvimwewo. |
| Quartz (Quartz/SiO₂) | - Kuchena kwakanyanya asi kunoora nyore nyore - Kuputira kunowedzera kuramba kukanganiswa nekuputika kweropa | Zvikamu zvekamuri reCVD/PECVD |
| Zviumbwa zvesimbi (zvakaita sealumina Al₂O₃) | - Simba guru uye chimiro chakasimba - Kuputira kunovandudza kuramba kwengura pamusoro | Magadzirirwo emukamuri, zvigadziko, nezvimwewo. |
| Simbi (dzakadai semolybdenum, titanium, nezvimwewo) | - Kufambisa zvakanaka kwekupisa asi kuramba ngura kwakaderera - Kuputira kunovandudza kugadzikana kwenzvimbo | Zvikamu zvakakosha zvemaitiro ekuita |
| Muviri wesilicon carbide wakanyungudutswa (SiC bulk) | - Kune nharaunda dzine zvinodiwa zvakanyanya zvemamiriro ekushanda akaomarara - Kuputira kunowedzera kuchena uye kuramba ngura | Zvikamu zvekamuri reCVD/ALD repamusoro-soro |
Zvigadzirwa zveSiC zvakaputirwa zvinowanzo shandiswa munzvimbo dzinotevera dze semiconductor
Zvigadzirwa zvekuputira zveSiC zvinoshandiswa zvakanyanya mukugadzirisa ma semiconductor, kunyanya munzvimbo dzinopisa zvakanyanya, ngura yakawanda uye nzvimbo dzakasimba dzeplasma. Zvinotevera ndizvo zvimwe zvezvishandiso zvikuru kana minda uye tsananguro pfupi:
| Maitiro/munda wekunyorera | Tsananguro pfupi | Silicon Carbide unhani basa |
| Kucheka kwePlasma (Kucheka) | Shandisa magasi ane fluorine kana chlorine pakufambisa mapatani | Dzivisa kukanganiswa kweplasma uye dzivirira kusvibiswa kwezvidimbu nesimbi |
| Kuiswa kwemhepo yemakemikari (CVD/PECVD) | Kubviswa kwe oxide, nitride nemamwe mafirimu matete | Dzivisa magasi anoparadza anotangira zvinhu uye wedzera hupenyu hwechikamu chacho |
| Kamuri rekuisa mhute mumuviri (PVD) | Kuputika kwezvimedu zvine simba guru panguva yekuputira | Kuvandudza kuramba kwekukukurwa kwevhu uye kuramba kupisa kwekamuri remhinduro |
| Maitiro eMOCVD (akadai sekukura kweSiC epitaxial) | Kuita kwenguva refu pasi pekupisa kwakanyanya uye mhepo ine hydrogen yakawanda inoparadza | Chengetedza kugadzikana kwemidziyo uye kudzivirira kusvibiswa kwemakristaro ari kukura |
| Maitiro ekurapa kupisa (LPCVD, kupararira, kunyungudutsa, nezvimwewo) | Kazhinji zvinoitwa pakupisa kwakanyanya uye panopisa mhepo ine vacuum/mhepo | Dzivirira zvikepe zvegrafiti nematireyi kubva mukuora kana kuoxidation |
| Chinotakura mawafer/chuck (Kubata mawafer) | Girafu yegirafu yekufambisa kana kutsigira wafer | Deredza kubuda kwezvimedu uye dzivisa kusvibiswa kwezvimedu |
| Zvikamu zvekamuri reALD | Kudzora kakawanda uye nemazvo kuiswa kweatomu layer | Kupfeka uku kunochengetedza kamuri rakachena uye kunodzivirira ngura zvakanyanya kune zvinotangira zvinhu |
Sei uchifanira kusarudza VET Energy?
VET Energy ikambani inotungamira mukugadzira, kugadzira zvinhu zvitsva uye kutungamira zvigadzirwa zvekuputira zveSiC muChina, zvigadzirwa zvikuru zvekuputira zveSiC zvinosanganisirachinotakura wafer chine SiC coating, SiC yakafukidzwamusundi we epitaxial, SiC yakafukidzwa nemhete yegraphite, Zvikamu zvehafu yemwedzi zvine SiC coating, SiC yakafukidzwa nekabhoni-kabhoni composite, Chikepe chewafer chakafukidzwa neSiC, SiC yakafukidzwa nehita, nezvimwewo. VET Energy yakazvipira kupa indasitiri ye semiconductor mhinduro dzepamusoro dzetekinoroji uye zvigadzirwa, uye inotsigira masevhisi ekugadzirisa. Tinotarisira nemoyo wese kuva mubatsiri wako wenguva refu muChina.
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Nguva yekutumira: Gumiguru-18-2024