SiC Yakafukidzwa

VET ENERGY, Mugadziri anotungamira weCVD SIC coating muChina

Zvinhu Zvinochinja Remangwana

Silicon carbide (SiC) chinhu chitsva che semiconductor chakagadzirwa ne compound. Silicon carbide ine band gap yakakura (inenge silicon katatu), high critical field strength (inenge silicon kagumi), high thermal conductivity (inenge silicon katatu). Ichinhu chakakosha che semiconductor chechizvarwa chinotevera. SiC coatings inoshandiswa zvakanyanya muindasitiri ye semiconductor uye solar photovoltaics. Kunyanya, susceptors dzinoshandiswa mukukura kwe epitaxial kwema LED ne Si single crystal epitaxy dzinoda kushandiswa kweSiC coating. Nekuda kwekuwedzera kwakasimba kwema LED muindasitiri yemwenje ne display, uye kukura kwakasimba kweindasitiri ye semiconductor,Chigadzirwa chekuputira cheSiCtarisiro dzakanaka kwazvo.

MUNDA WEKUSHANDISA

Kushandiswa kwechigadzirwa uye mashandiro azvo Mashandisirwo ezvigadzirwa uye mashandisirwo azvo

Si single crystal industry, GaN, AlN, safira nedzimwe MOCVD pedestals. -Graphite base coating yekukura kwe single crystal silicon epitaxial

Mashandiro makuru: kuchena kwakanyanya, kuramba kukurwa kwevhu, kupisa kwakanyanya, - MOCVD maitiro, graphite base coating yekukura kweGaN epitaxial

kuramba kupisa kwakanyanya, kuwedzera kwekushisa kwakaderera.

Zvishandiso zveMOCVD

Monocrystalline silicon epitaxial susceptors

Dhisiki rePlasma rinocheka

Zvigadzirwa zvezuva zvinoshandisa simba rezuva (solar photovoltaic products)

Indasitiri yeSemiconductor

Simba rezuva rezuva rinopisa chiedza chezuva

Kufambisa kwekupisa	250 W/m °K	Nzira ye laser flash, RT
Kuwedzera kweThermal (CTE)	4.5 x 10^-6°K	Tembiricha yemukamuri kusvika 950 °C, silica dilatometer
Pfuma	Kukosha	Maitiro
Kuwanda kwevanhu	3.21 g/cc	Sink-float uye saizi
Kupisa kwakananga	0.66 J/g °K	Flash yelaser inoputika
Simba rekuchinjika	450 MPa560 MPa	Kukombama kwemapoinzi mana, kukombama kwemapoinzi mana kweRT4, 1300°
Kusimba kwekutyoka	2.94 MPa m1/2	Kudzika kweganda kudiki
Kuoma	2800	Vicker's, mutoro we500g
Modulus yeElastic yeYoung	450 GPa430 GPa	Kukombama kwema pt 4, kukombama kwema pt 4 kweRT4, 1300 °C
Saizi yezviyo	2 - 10 µm	SEM

Kuchena, Maumbirwo eSEM, kuongororwa kwekukora kweSiC coating

Kuchena kweSiC coatings pagraphite uchishandisa CVD kwakakwira kusvika 99.9995%. Maumbirwo ayo ifcc. Mafirimu eSiC akaputirwa pagraphite akatarisana (111) sezvakaratidzwa muXRD data (Mufananidzo 1) zvichiratidza kuti ine crystalline yakakwira. Ukobvu hwefirimu reSiC hwakafanana zvakanyanya sezvakaratidzwa muMufananidzo 2.

Data reSEM reCVD SiC thin film, saizi yekristaro ndeye 2~1 Opm

Mufananidzo 2: yunifomu yeSiC films yakakora

Maumbirwo ekristaro efirimu reCVD SiC akaumbwa necubic ine chitarisiko chakatarisana, uye kukura kwefirimu kwakanangana ne100%.

SEM uye XRD yefirimu re beta-SiC pagraphite

Hwaro hweSilikoni imwe chete yeCrystal Silicon EPITAXIAL

Kushanda kwechigadzirwa uye tarisiro yekushandisa.

Silicon carbide (SiC) yakafukidzwaHwaro ndiyo hwaro hwakanakisisa hwe single crystal silicon neGaN epitaxy, inova ndiyo chikamu chikuru che epitaxy furnace. Hwaro ichinhu chakakosha pakugadzirwa kwe monocrystalline silicon yemaseketi makuru akabatanidzwa. Ine kuchena kwakanyanya, inodzivirira kupisa kwakanyanya, inodzivirira ngura, inosimbisa mhepo zvakanaka uye zvimwe zvinhu zvakanaka.

Kushandiswa uye kushandiswa kwechigadzirwa

Kuvhara pasi pegirafiti yekukura kwegirazi rimwe chete resilicon epitaxial. Yakakodzera michina yeAixtron, nezvimwewo. Ukobvu hwekufukidza: 90~150um. Dhayamita yewafer crater i55mm.

Mufananidzo wezuva

GAupidpelitcubaetiaonnd

graphite inopfuta nekuputiraye silicon yekristaro imwe chete nenzira yekudhonza yakatwasuka

kugadzirwa kwemaindasitiri kwesilicon imwe chete yekristaro nenzira yekudhonza yakatwasuka,chipfuro chine mapeta matatusechikamu chekupisa kwakanyanya uye zvikamu zvakafanana zvekupisa, chubhu yekuyerera senzira yekutenderera kwegasi rekubuda, zvikamu zvekupisa, chubhu yekuyerera senzira yekutenderera kwegasi rekubuda

HITA, GRAPHITE PLAT, Sirinda yeGraphite, pepa regrafiti uyeZVIMWE ZVIKAMU ZVAKAUMBIKA

Zvimiro zvechigadzirwa

Kudzivirira kupisa kwakanyanya, kuramba ngura, kugara kwenguva refu, zvinogona kuvandudza kunaka uye kubuda kwewafer. Nekuwedzera kwekushisa kwakaderera, kuramba kupisa kwakanyanya, kuramba kupfeka kwakanyanya, kudzivirira kupisa kwakanaka, kugadzikana kwakanaka kwemakemikari, pedyo nepepuru (tsvuku) kunze kwechiedza chinoonekwa.

Sei uchifanira kusarudza isu?

Midziyo yehunyanzvi nechikwata

Chikoro chekudzidzisa chisina guruva chekirasi 1000

*nzvimbo inopfuura 3000 square metres ye 1000 class-free workshop

*Chikwata cheR & D cheMubatanidzwa weChinese Academy of Sciences

*Midziyo yekugadzira uye yekuyedza nemazvo

*Kukwanisa kugadzira kwakakwana uye kwemhando yepamusoro

Basa Rinokurumidza

Kuti muwane mutengo usati watenga, timu yedu yekutengesa inogona kupindura mubvunzo wenyu mukati memaminitsi makumi mashanu kusvika zana panguva yebasa uye mukati memaawa gumi nemaviri panguva yekushanda. Mhinduro nekukurumidza uye yehunyanzvi ichakubatsirai kuwana mutengi wenyu nesarudzo yakakwana uye inoshanda zvakanyanya.

Padanho reodha, timu yedu yehunyanzvi ichatora mifananidzo mazuva ese matatu kusvika mashanu kuti uwane ruzivo rwekutanga nezvekugadzirwa uye ichakupa magwaro mukati memaawa makumi matatu nematanhatu ekuvandudza kufambira mberi kwekutumira. Tinonyanya kutarisisa sevhisi mushure mekutengesa.

Padanho rekutengesa mushure mekutengesa, timu yedu yebasa inogara ichikubatai padyo uye inogara ichimirira pabasa renyu. Basa redu rehunyanzvi mushure mekutengesa rinosanganisirawo kutumira mainjiniya edu kuti vakubatsirei kugadzirisa matambudziko panzvimbo yacho. Waranti yedu ndeyemwedzi gumi nemiviri mushure mekutumira.

Ruzivo rwekurongedza

Ningbo VET Energy Technology Co., Ltd inyanzvi yekugadzira zvikamu zvegrafiti, kunyanya mukugadzira zvinhu zvitsva zve semiconductor uye inotarisa pakutsvaga nekugadzira SiC coating. Zvigadzirwa zvikuru zvekambani iyi iSiC-coated susceptors ye LED industry uye monocrystalline silicon industry. Firimu reSiC rinoshandiswa ku LED industry uye monocrystalline silicon industry icubic phase, ine lattice structure yakafanana nedhaimani, uye kuoma kwayo kwakanaka sedhaimani. Silicon carbide ndiyo yakanyanya kukura ine wide band gap semiconductor material, uye ine mikana yakawanda yekushandisa mu semiconductor industry. Pamusoro pezvo, silicon carbide ine high thermal conductivity, thermal expansion coefficient diki, high tembiricha resistance (inenge 2700 degrees Celsius), uye high corrosion resistance. Zvigadzirwa zve silicon carbide coating zvekambani iyi zvinoshandiswawo zvakanyanya mu aerospace, photovoltaic industry, nuclear energy, high-speed rail, automotive nedzimwe indasitiri.

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Ehe, tinogara tichishandisa kurongedza kwemhando yepamusoro kwekutengesera kunze kwenyika. Tinoshandisawo kurongedza zvinhu zvine njodzi zvakanangana nezvigadzirwa zvine njodzi uye kutakura zvinhu zvinotonhora zvakabvumidzwa nevatengi vezvinhu zvinodzivirira kupisa. Zvinodiwa zvepakeji zvine hunyanzvi uye zvekurongedza zvisiri zvemhando yepamusoro zvinogona kuwedzera muripo.

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