Zvinodiwa neindasitiri ye semiconductor zve graphite zvinhu zvakanyanya kukwira, saizi ye graphite ine magadzirirwo akakwirira, inodzivirira kupisa kwakanyanya, simba rakawanda, kurasikirwa kudiki nezvimwe zvakanakira, zvakaita se: zvigadzirwa zve graphite zvakapfava.Nekuti michina yegrafiti inoshandiswa muindasitiri yesemiconductor (kusanganisira maheater nema dies ayo akapiswa) inofanirwa kutsungirira maitiro ekudziyisa nekutonhodza anodzokororwa, kuitira kuti nguva yekushanda kwemidziyo yegrafiti iwedzere, zvinowanzo dikanwa kuti zvinhu zvegrafiti zvinoshandiswa zvive nekushanda kwakasimba uye basa rinodzivirira kupisa.
01 Zvishongedzo zveGraphite zvekukura kwekristaro yesemiconductor
Maitiro ese anoshandiswa pakukura makristaro e semiconductor anoshanda pasi pekupisa kwakanyanya uye ngura. Nzvimbo inopisa ye crystal growth furnace inowanzo kuve nezvikamu zve graphite zvinodzivirira kupisa uye ngura, zvakaita se heater, crucible, insulation cylinder, guide cylinder, electrode, crucible holder, electrode nut, nezvimwewo.
Tinogona kugadzira zvikamu zvese zvegrafiti zvemidziyo yekugadzira makristaro, zvinogona kupihwa chimwe nechimwe kana muzvikamu, kana zvikamu zvegrafiti zvakagadzirwa zvehukuru hwakasiyana zvichienderana nezvinodiwa nevatengi. Hukuru hwezvigadzirwa hunogona kuyerwa panzvimbo yacho, uye huwandu hwedota hwezvigadzirwa zvakapedzwa hunogona kuva hushoma.kupfuura 5ppm.
02 Zvishongedzo zveGraphite zve semiconductor epitaxy
Maitiro eEpitaxial anoreva kukura kwechikamu chekristaro chimwe chete chine lattice yakafanana ne substrate iri pachikamu chekristaro chimwe chete. Mukuita kweEpitaxial, wafer inoiswa pa graphite disk. Kushanda uye mhando ye graphite disk zvinoita basa rakakosha mumhando ye epitaxial layer yewafer. Mukugadzira epitaxial, graphite yakawanda ye ultra-high purity uye high purity graphite base ine SIC coating zvinodiwa.
Chikamu chegrafiti chekambani yedu che semiconductor epitaxy chine mashandisirwo akasiyana-siyana, chinogona kuenzana nemidziyo yakawanda inowanzoshandiswa muindasitiri, uye chine kuchena kwakanyanya, chinodzivirira zvakafanana, hupenyu hwebasa hwakanaka, uye kuramba makemikari zvakanyanya uye kugadzikana kwekupisa.
03 Zvishongedzo zveGraphite zvekuisa maion
Kuiswa kweIon zvinoreva maitiro ekukurumidzisa danda replasma reboron, phosphorus uye arsenic kune rimwe simba, wozoriisa pamusoro pechinhu chewafer kuti uchinje hunhu hwechinhu chiri pamusoro pechinhu. Zvikamu zvemudziyo wekuisa maion zvinofanira kugadzirwa nezvinhu zvakachena zvakanyanya zvine resistance yakanaka yekupisa, thermal conductivity, ngura shoma inokonzerwa nedanda reion uye low disadvantage content. Graphite yakachena zvakanyanya inosangana nezvinodiwa zvekushandiswa, uye inogona kushandiswa kune flight tube, slits dzakasiyana-siyana, electrodes, electrode covers, conduits, beam terminators, nezvimwewo zvemidziyo yekuisa maion.
Hatingogone chete kupa chifukidziro chekudzivirira graphite kumichina yakasiyana-siyana yekuisa maion, asiwo kupa maelectrode egraphite akachena zvakanyanya uye masosi eion ane resistance yakakura yekuora yemhando dzakasiyana-siyana. Mhando dzinoshanda: Eaton, Azcelis, Quatum, Varian, Nissin, AMAT, LAM nezvimwe zvishandiso. Pamusoro pezvo, tinogonawo kupa zvigadzirwa zveceramic, tungsten, molybdenum, aruminiyamu nezvimwe zvikamu zvakaputirwa.
04 Graphite insulation zvinhu nezvimwe
Zvinhu zvinoshandiswa mukugadzira michina ye semiconductor zvinosanganisira graphite hard felt, soft felt, graphite foil, graphite paper, uye graphite rope.
Zvinhu zvedu zvese zvakagadzirwa negrafiti zvinotengwa kunze kwenyika, izvo zvinogona kuchekwa zvichienderana nehukuru hwezvinodiwa nemutengi kana kutengeswa zvese.
Tireyi yekabhoni-kabhoni inoshandiswa senzira yekutakura firimu rinofukidza mukugadzirwa kwemasero ezuva e monocrystalline silicon ne polycrystalline silicon. Nheyo inoshanda ndeiyi: isa silicon chip muCFC tray woitumira muchubhu yefurnace kuti igadzire firimu rinofukidza.
