Mashandisirwo eTaC Coating muGaN/SiC Semiconductor Manufacturing

Kuputira TaC ipurasitiki yeceramic inoshanda zvakanyanya, yakakosha pakugadzirwa kwema semiconductor epamusoro. Yakakosha pakukura kweSiC single crystal uye maitiro ekukura kweGaN/SiC epitaxial. Musika weGaN/SiC semiconductor uri kukura nekukurumidza. Musika uyu wakasvika mabhiriyoni emadhora emadhora mazana manomwe nemakumi mashanu nemakumi maviri nematatu muna 2024. Nyanzvi dzinofungidzira kuti 16.56% CAGR kubva muna 2025-2035.

Zvinhu Zvinokosha Zvaunofanira Kuziva

• Kuputira TaCimhando yepamusoro. Inobatsira kugadzira machipisi emakombiyuta ari nani. Inoshanda zvakanaka munzvimbo dzinopisa zvikuru.
• Kuputira uku kunodzivisa zvinhu zvakaipa kuti zvisapinde mumachipisi. Kunoita kuti machipisi achene uye asimbise.
• Kuputira TaC kuri nani pane zvimwe zvinhu. Kunobatsira kugadzira machipisi akanaka. Izvi zvinoita kuti makomputa nemafoni zvishande zviri nani.

Kunzwisisa TaC Coating: Zvimiro uye Mashandiro

Kutsanangura TaC Coating uye Hunhu Hwayo Hukuru

Kuputira TaCivhu receramic rinoshanda zvakanyanya. Tantalum carbide (TaC) inoshanda sechikamu chayo chechikamu chikuru chemakemikariVaongorori vanoongororaSisitimu yeTa-CN, uko TaC1-xNx inomiririra kuumbwa kwemakemikari. Chimiro chepakutanga chekuyedza iFCC structured Ta-C. Zvimiro zvebinary zvakagadzikana zvinosanganisira fcc-TaC uye hex-TaN. Nzvimbo dzisina simbi dzakakosha kupfuura nzvimbo dzisina simbi dzekugadzirisa chimiro checubic muTa-C. Physical Vapor Deposition (PVD) inogona kudzikamisa FCC structured Ta-CN nekuda kwekinetics shoma uye kuiswa kwezvikanganiso zvechimiro. Kuchinja kwechikamu kubva pachikamu chimwe chete fcc-Ta1-y-zCyNz kuenda kuFcc pamwe nehex Ta1-y-zCyNz kunoitika panosvika x=0.68 muTaC1-xNx notation. Vagadziri vanogadzira TaC coatings nemhando ina dzemagadzirirwo ekristaropa carbon/carbon composites. Zvimiro izvi zvinosanganisira chimiro chekristaro cheacicular, chinoratidza kuramba kuri nani kwe ablation.

Chinhu ichi chinoratidzawo hunhu hunoshamisa hwemakanika. Semuenzaniso, chifukidziro chine jira rakawanda chine Ta(C,N) (305 nm modulation) chinoratidza kuomarara kwe24.5 ± 0.8 GPauye Young's Modulus ye263.2 ± 16.6 GPa. TaC0.71 inoratidza kuomarara kwe39.3 ± 1.0 GPa, nezvimwe zviyero zvinosvika 40 GPa. Kuyerera kwayo kwemukati i430 GPa, uye Young's Modulus yakaverengerwa yeTaC inenge 500 GPa.

Kugadzikana Kunoshamisa Kwekupisa Kwakakwira kweTaC Coating

Chinhu ichi chinokunda zvakanyanya munzvimbo dzine kupisa kwakanyanya. Chinoramba chakasimba pakupisa kuri pamusoro pe2000°C. Kunyunguduka kwacho kunosvika pakakwirira zvinoshamisa4273°C, zvichiita kuti ive imwe yemishonga inonyanya kudzivirira kupisa inozivikanwa. Chinhu ichi chine tembiricha yepamusoro yekushandakupisa kunopfuura 2200°C.

TaC inoratidza imwe yenzvimbo dzakanyanya kunyunguduka pakati pezvinhu zvinozivikanwa, zvichiyerwa padanho rinoshamisa4041 K. Nzvimbo iyi yekunyunguduka inodarika zvimwe zvinhu zvakawanda zvinoramba kushanda, kusanganisira tungsten. Kuongororwa kwemurabhoritari kunosimbisa kugona kweTaC kuchengetedza kusimba kwechimiro pakupisa kunodarika 3000°C. TaC inopfuura zvese ceramic nesimbi alloy coatings mukuchengetedza kusimba kwechimiro pakupisa uku kwakanyanya. Kunyange zvazvo tembiricha yayo yekunyunguduka (4041 K) yakaderera pane yeHfC, TaC inogara ichiratidza kusimba kwekupisa kwakanyanya uye kugadzikana kwemakemikari zvichienzaniswa ne ceramic nesimbi alloy coatings dzechinyakare.

Kuramba Makemikari uye Kuchena Kwakanyanya kweTaC Coating

Mapfekero eTaC anoratidzakugadzikana kwakanaka kwemakemikari. Zvinobudirira kudzivirira kusangana nezvinhu zvakasiyana-siyana zvinoparadza, kusanganisira maasidhi nemabhesi. Hunhu uhwu hunovaita sarudzo yakavimbika yekushandiswa zvakanyanya mumaindasitiri. Kupfeka kweTaC kunoratidzakugadzikana kwakanaka kwemakemikari, zvichiratidza kusabatwa nemaacid, alkalis, munyu, uye organic reagents. Uyezve, hazvikanganisike nesimbi dzakanyungudutswa, tsvina, nezvimwe zvinoparadza. Mapendi eTaC anekugadzikana kwakasimba kwemakemikari, zvichiita kuti zvikwanise kutsungirira maitiro akasiyana-siyana emakemikari, kunyanya ayo ane maasidhi nemabhesi.

Kuchena kwakanyanya chimwe chinhu chakakosha pane izvi. Vagadziri vanogadzira machira eTaC kutikuderedza tsvinazvakaita setitanium, boron, uye aluminium. Zvigadzirwa zvinoshandisa TaC coatings zvinoratidza kabhoni shoma, okisijeni, nitrogen, nezvimwe tsvina, zvichibatsira kukura kwekristaro yakachena. Kusachena muTaC coatings kunogona kuva kwakaderera kusvika <5 ppm, kwakaderera zvakanyanya pane SiC coatings kana bare graphite (inogona kuva ne260 ppm oxygen).

Kugara kwenguva refu kweTaC Coating pakupisa uye pakugadzira michina

Chinhu ichi chine simba guru rekupisa. Chinoyera anenge22 W·m⁻¹·K⁻¹MuW-TaC composites, kufambiswa kweTaC kwekupisa kunotangira pa15–35 W·m⁻¹·K⁻¹patembiricha ye750 °C, 850 °C, uye 950 °C. Kupisa kwakanyanya uku kunobatsira zvinobudirirakupisa kunopedzapanguva yekupisa kwakanyanya. Zvinodzivirirawo kupisa kwakanyanya munzvimbo iyoyo.

Kugara kwenguva refu kwechigadzirwa ichi kunoshamisawo. Kupfeka kweNiCrBSi + Ta kwakaratidzwakuomarara kwakanyanya kwekutyoka uye kuramba kupfeka zvakanaka kwehasha uye kunamazvichienzaniswa neNiCrBSi coating isina tantalum. Tantalum inowedzera kusakara kwe coating dzakavakirwa paNi nekugadzira zvidimbu zvidiki zveTaC. Kune WC–6Co cemented carbides, kuwedzera0.6 wt% TaCzvakakonzera kuramba kupfeka zvakanaka, zvichideredza kurasikirwa kwehukuru hwekupfeka kusvika pa 0.15 mg uye kuwana coefficient yakagadzikana yekukweshana kweinenge 0.3. A (Ta,Zr,Nb)C ceramic yakaratidza kusimba kwekutyoka kwe2.9 MPa m1/2patembiricha yemukamuri.

Kuputira TaC muMaitiro Epamusoro eGaN/SiC Semiconductor

Kuvandudza Kukura kweSiC Single Crystal neTaC Coating

Kuputira TaCinoita basa guru mukusimudzira kukura kweSiC single crystal. Inovandudza zvikuru kunaka kwekristaro uye inoderedza zvikanganiso. Semuenzaniso, inoderedza zvikanganiso zve micropipe kusvika ku99.7%. Inoderedzawo kupatsanurwa kwemucheto weshinda ne80.5%. Machira eTaC anodzivirira ngura yezvikamu zvegraphite mumhepo ine kupisa kwakanyanya uye inopisa yesilicon vapor. Graphite isina kuputirwa inoparadza, ichiburitsa zvidimbu zvecarbon. Izvi zvidimbu zvinotungamira ku carbon encapsulation uye zvinowedzera zvikanganiso mumakristaro eSiC ari kukura. Nekudzivirira graphite, machira eTaC anovimbisamakristaro akachena.

Kushandiswa kweTaC coatings kunoita kuti SiC ive nemakristaro madiki asina kusvibiswa necarbon, oxygen, uye nitrogen. Kunoderedza zvikanganiso zvemumucheto uye kunovandudza kufanana kwe resistivity. Uyezve, kunoderedza zvakanyanya density yema micropores nema etching pits.Zvidzidzo zveindasitirizvinoratidza kuti TaC coating inogadzirisa zvikanganiso zvemupendero wekristaro. Inoderedzawo mukana wekuumbwa kwepolycrystalline pamucheto wemakristaro eSiC. Tsvagiridzo kubva kuEastern European University muKorea inosimbisa kuti TaC-coated graphite crucibles inodzivirira kusanganiswa kwenitrogen zvinobudirira. Izvi zvinoderedza kugadzirwa kwema microtubules nezvimwe zvikanganiso. TaC-coated crucibles inochengetedza huremu husingachinji uye chitarisiko chayo chisina kuchinja mushure mekushandiswa kwenguva refu. Vagadziri vanogona kudzokorodza kakawanda. Vanopa hupenyu hwebasa hunosvika kuMaawa mazana maviri, kuvandudza kuchengetedzeka uye kushanda zvakanaka mukugadzirwa kwezvinhu.

Kugadzirisa Kukura kweGaN/SiC Epitaxial neTaC Coating

Kuputira TaC kwakakoshawo pakuvandudza kukura kweGaN/SiC epitaxial. Maitiro aya anoda nzvimbo yakagadzikana uye yakachena kuti uwane maGaN layers emhando yepamusoro paSiC substrates. Kugadzikana kwakanyanya kweTaC pakupisa kwakanyanya kunoita kuti zvikamu zveprocess zvirambe zvakanaka. Kugadzikana uku kunodzivirira kuora kwezvinhu kunyangwe pakupisa kwakakwirira kunodiwa kuti epitaxy ishande. Kufambisa kwayo kupisa kwakanyanya kunobatsira kuchengetedza kupararira kwakanyatsojeka uye kwakafanana kwekupisa mukati me substrate. Kufanana uku kwakakosha kuti firimu rive rakakora uye chimiro chekristaro chienderane.

Kusashanda kwemakemikari kweTaC coating kunodzivirira kusashanda zvakanaka pakati pemagasi eprocess nezvikamu zvereactor. Kusashanda kwakadaro kunogona kuunza tsvina muGaN layer iri kukura. Nekupa nzvimbo yakagadzikana uye isingashande zvakanaka, TaC inokurudzira kukura kwakachena. Nzvimbo iyi yakakosha pakuzadzisa hunhu hwemagetsi hunodiwa uye mashandiro emidziyo yeGaN. Kugara kwenguva refu kweTaC kunobatsirawo kuti zvikamu zvereactor zvigare kwenguva refu. Kugara kwenguva refu uku kunoderedza nguva yekushanda nekugadzirisa, zvichiwedzera kugadzirisa maitiro ekukura kwe epitaxial.

Kudzivirira Kusvibiswa uye Kuvandudza Goho neTaC Coating

Kudzivirira kusvibiswa kwakakosha mukugadzirwa kwema semiconductor, uye TaC coating inobudirira munzvimbo iyi.hunhu husina kusimba hwemakemikariKuputira kweTaC kunodzivirira kusawirirana kusingadiwe. Kupindirana uku kunogona kuunza zvinhu zvinosvibisa munzvimbo inokura. Kunoshanda sechidziviriro chakasimba kubva pakusviba kwekunze. Izvi zvinoita kuti pave nekuumbwa kwemakristaro akachena zvakanyanya. Kuputira kweTaC kunodzivirira kusvibiswa uye zvikanganiso zvemumucheto nekugadzira jira rinodzivirira. Dare iri rinodzivirira kuiswa kwezvinhu uye kunamatira kwezvikamu. Rinoderedza kusvibiswa uye rinoderedza mukana wekusawirirana kwemumucheto kunoitika panzvimbo dzisina kuputirwa.

Kuchena kwakanyanya kweTaC coatings, ine huwandu hwekusachena hwakaderera kusvika <5 ppm, zvinoreva zvakananga SiC neGaN zvinhu zvakachena. Kuchena uku kunoderedza kuwanda kwezvikanganiso zvakasiyana-siyana, kusanganisira micropores nema etch pits.Tsvagiridzo kubva kuYunivhesiti yeEastern Europe muKoreazvinoratidza kuti tantalum carbide (TaC) coated graphite crucibles inodzivirira nitrogen muSiC crystals. Muganho uyu unoderedza zvakananga zvikanganiso zvakaita sema micropipes, nokudaro zvichivandudza kunaka kwekristaro. Nekuderedza kusvibiswa uye zvikanganiso, TaC coating inowedzera zvakanyanya goho rema semiconductor wafers emhando yepamusoro. Kuvandudzwa uku kunotungamira pakugadzirwa kwemidziyo kwakavimbika uye kunoshanda.

Nei TaC Coating Ichishanda Zvakanaka Kupfuura Dzimwe Nzira

Kuenzanisa Kwekushanda: TaC Coating vs. SiC Coating uye Bare Graphite

Kuputira TaCinopa mabhenefiti makuru pane zvimwe zvinhu zvakaita seSiC coating uye bare graphite mukugadzira semiconductor. Hunhu hwayo hwepamusoro hunoita kuti ive sarudzo inosarudzwa pakushandisa kwakaoma. TaC coating inopa kushanda kwakawedzerwa munzvimbo dzakakosha. Nzvimbo idzi dzinosanganisira kugadzikana pakupisa kwakanyanya, kuramba makemikari, uye kuchena. Mabhenefiti aya anoshandura zvakananga kuvandudzwa kwekushanda zvakanaka kwemaitiro uye mhando yechigadzirwa.

Kuramba Kuchena Kwepamusoro uye Matanho Ekuchena kweTaC Coating

Kuputira TaC kunoratidza kuramba kwakanyanya kwe etch. Hunhu uhwu hwakakosha kune zvikamu zvinoshanda munzvimbo dzakaoma dzeplasma. Kuputira CVD TaC kunopa kuramba kwakanaka kwe chemical corrosion uye kupisa kwematurusi e etching. Kuramba uku kunovimbisa kusimba kwechimiro chezvishandiso munzvimbo dzeplasma, zvichibvumira kuputira kwakanyatsojeka. Hunhu hwe anti-adhesion ye coating iyi hunoderedzawo kusvibiswa kwezvikamu, zvichivandudza kuvimbika kwemaitiro. Kazhinji, ma coating eTaC anoderedza kupfeka kwematurusi uye anowedzera kushanda zvakanaka kwekugadzira, achiwedzera hupenyu hwezvikamu mukushandiswa kweplasma. Kuputira Tantalum carbide (TaC) kunowedzera hupenyu hwezvikamu munzvimbo dzeplasma. Anoshanda sechidziviriro. Anodzivirira zvikamu zve semiconductor senge ma electrodes, sensors, uye makamuri kubva mukuora. Kuora uku kunokonzerwa nemagasi anoparadza, tembiricha yakakwira, uye maitiro emakemikari. Makamuri e etching ane TaC anodzivirira nharaunda dzeplasma dzinoparadza panguva yekugadzira semiconductor. Kuramba uku kunovimbisa kugara kwenguva refu kwemidziyo uye kuvimbika kwemaitiro. Dziviriro iyi inoderedza nguva yekushanda, kugadzirisa, uye mari yekutsiva, zvichiwedzera kugadzirwa kwese. Uyezve, ma coating eTaC ane kuchena kwakanyanya, nemazinga ekusvibiswa kazhinji ari pasi pe5 ppm. Mwero uyu wakaderera zvakanyanya pane SiC coating kana bare graphite, iyo inogona kuva ne oxygen inosvika 260 ppm.

Kuramba Kupisa Kwekupisa uye Kugona Kupisa Kwakanyanya kweTaC Coating

Kuratidzwa kweTaC coatingkuramba kwakanaka kwazvo kurwiswa nekupisa. Hunhu uhwu hunobatsira zvikuru pazvinhu zvinoshanduka nekukurumidza uye zvakanyanya kupisa. Hunoita kuti zvive zvakavimbika uye zvinoshanda munzvimbo dzinoda kushanda kwakawanda. Zvinhu izvi zvinoramba zvakanaka kunyangwe kana paine kupisa kwakanyanya.Tembiricha yayo yepamusoro yekushanda inodarikawo dzimwe nzira.

Kuputira TaC kunoderedza kusvibiswa zvakanyanya uye kunovandudza manejimendi yekupisa mukugadzira semiconductor. Kunoita basa rakanaka zvichienzaniswa nezvinhu zvemazuva ano zvakaita seSiC coating uye bare graphite. Izvi zvinhu zvepamusoro zvakakosha pakuwedzera goho uye kuvimbika muGaN/SiC semiconductor processes, zvichitungamira kufambira mberi muindasitiri.

Mibvunzo Inowanzo bvunzwa

Ndeipi basa guru reTaC coating mukugadzira semiconductor?

Kuputira TaCinoshanda sechikamu checeramic chinoshanda zvakanyanya. Inodzivirira zvikamu, inoderedza kusvibiswa, uye inodzora kupisa zvinobudirira. Izvi zvinoita kuti pave nemamiriro ezvinhu akanaka ekukura kwemakristaro.

Kuputira TaC kunoenzaniswa sei nekuputira SiC uye graphite isina chinhu?

Kuputira kweTaC kunopa kugadzikana kwepamusoro-soro pakupisa, kuramba makemikari, uye kuchena kwakanyanya. Kunokunda kuputira kweSiC uye graphite isina chinhu mukushandiswa kwakakosha kwe semiconductor.

Ndezvipi zvakanakira chaizvo zvinounzwa neTaC coating kumaGaN/SiC processes?

Kuputira TaC kunowedzera kukura kweSiC single crystal uye kunovandudza kukura kweGaN/SiC epitaxial. Kunodzivirira kusvibiswa, kunovandudza kutarisirwa kwekupisa, uye kunowedzera goho rose uye kuvimbika.