Cov Ntawv Thov Txheej TaC hauv GaN / SiC Semiconductor Manufacturing

Txheej TaC yog ib txheej ceramic ua haujlwm siab, tseem ceeb rau kev tsim khoom semiconductor siab heev. Nws yog qhov tseem ceeb rau kev loj hlob ntawm SiC ib leeg siv lead ua thiab cov txheej txheem loj hlob ntawm GaN/SiC epitaxial. Kev lag luam semiconductor GaN/SiC tab tom nthuav dav sai. Kev lag luam no tau txog USD 7.523 billion hauv xyoo 2024. Cov kws tshaj lij kwv yees tias yuav muaj CAGR 16.56% txij li xyoo 2025-2035.

Cov Ntsiab Lus Tseem Ceeb

• Kev txheej txheem TaCyog ib txheej tshwj xeeb. Nws pab ua kom cov chips hauv computer zoo dua. Nws ua haujlwm tau zoo hauv cov chaw kub heev.
• Cov txheej no tiv thaiv cov khoom phem kom tsis txhob nkag mus rau hauv cov chips. Nws ua rau cov chips huv dua thiab muaj zog dua.
• Txheej TaC zoo dua li lwm cov ntaub ntawv. Nws pab ua kom muaj ntau cov chips zoo. Qhov no ua rau cov khoos phis tawj thiab xov tooj ua haujlwm zoo dua.

Nkag Siab Txog TaC Txheej: Cov Khoom Thiab Kev Ua Tau Zoo

Txhais TaC Txheej thiab Nws Cov Yam Ntxwv Tseem Ceeb

Kev txheej txheem TaCyog ib txheej ceramic ua haujlwm siab. Tantalum carbide (TaC) ua haujlwm ua nwscov tshuaj lom neeg tseem ceebCov kws tshawb nrhiav tshawb nrhiav qhovTa-CN system, qhov twg TaC1-xNx sawv cev rau cov tshuaj lom neeg sib xyaw. Lub hauv paus qauv rau kev sim yog fcc qauv Ta-C. Cov qauv binary ruaj khov suav nrog fcc-TaC thiab hex-TaN. Cov chaw tsis yog hlau yog qhov tseem ceeb dua li cov chaw hlau rau kev ruaj khov lub qauv cubic hauv Ta-C. Lub cev Vapor Deposition (PVD) tuaj yeem ruaj khov fcc qauv Ta-CN vim muaj kinetics txwv heev thiab kev qhia txog cov qauv tsis zoo. Kev hloov pauv theem los ntawm ib-theem fcc-Ta1-y-zCyNz mus rau fcc ntxiv rau hex Ta1-y-zCyNz tshwm sim nyob ib puag ncig x = 0.68 hauv TaC1-xNx notation. Cov chaw tsim khoom npaj TaC coatings nrogplaub hom qauv siv lead uantawm cov pa roj carbon/carbon composites. Cov qauv no suav nrog cov qauv siv lead ua acicular, uas qhia tau tias muaj kev tiv thaiv ablation zoo dua.

Cov khoom siv no kuj tseem muaj cov khoom siv kho tshuab zoo heev. Piv txwv li, ib txheej txheej ntau txheej nrog Ta (C, N) (305 nm modulation) qhia txog qhov nyuaj ntawm24.5 ± 0.8 GPathiab Young's Modulus ntawm 263.2 ± 16.6 GPa. TaC0.71 qhia tau tias muaj qhov nyuaj ntawm39.3 ± 1.0 GPa, nrog rau qee qhov kev ntsuas ncav cuag 40 GPa. Nws cov modulus indentation yog 430 GPa, thiab Young's Modulus uas tau xam rau TaC yog kwv yees li 500 GPa.

Kev Ruaj Ntseg Kub Siab Tshaj Plaws ntawm TaC Txheej

Cov khoom no zoo heev nyob rau hauv qhov chaw kub heev. Nws tseem ruaj khov ntawm qhov kub siab tshaj 2000 ° C. Nws lub ntsiab lus yaj mus txog qhov zoo kawg nkaus4273°C, ua rau nws yog ib qho ntawm cov tshuaj tiv taus kub siab tshaj plaws uas paub. Cov khoom siv no muaj qhov kub ua haujlwm siab tshaj plawstshaj 2200 ° C.

TaC qhia txog ib qho ntawm cov ntsiab lus melting siab tshaj plaws ntawm cov ntaub ntawv paub, ntsuas ntawm qhov zoo kawg nkaus4041 K. Qhov melting point no dhau ntau lwm yam khoom siv refractory, suav nrog tungsten. Kev kuaj hauv chaw kuaj mob lees paub TaC lub peev xwm los tswj kev ruaj khov ntawm qhov kub tshaj 3000 ° C. TaC ua tau zoo dua ob qho tib si ceramic thiab hlau alloy coatings hauv kev tswj kev ruaj khov ntawm qhov kub siab heev no. Thaum nws qhov kub yaj (4041 K) qis dua li ntawm HfC, TaC ib txwm qhia tau tias muaj kev tiv thaiv thermal zoo dua thiab kev ruaj khov tshuaj piv rau cov tshuaj ceramic thiab hlau alloy coatings ib txwm muaj.

Kev Tiv Thaiv Tshuaj Lom Zem thiab Ultra-High Purity ntawm TaC Txheej

Cov txheej txheem TaC qhia tau tiaskev ruaj khov tshuaj zoo heevLawv tiv taus cov tshuaj tiv thaiv nrog ntau yam tshuaj corrosive, suav nrog cov kua qaub thiab cov hauv paus. Cov yam ntxwv no ua rau lawv yog qhov kev xaiv zoo rau cov ntawv thov kev lag luam uas xav tau. TaC coatings qhia txogkev ruaj khov tshuaj zoo, qhia txog kev tiv thaiv rau cov kua qaub, alkalis, ntsev, thiab cov organic reagents. Ntxiv mus, lawv tseem tsis cuam tshuam los ntawm cov hlau molten, slag, thiab lwm yam corrosive media. TaC coatings muajmuaj zog tshuaj lom neeg ruaj khov, ua rau lawv tiv taus ntau yam tshuaj lom neeg, tshwj xeeb tshaj yog cov uas muaj cov kua qaub thiab cov hauv paus.

Kev huv siab yog lwm yam tseem ceeb ntawm cov khoom siv no. Cov chaw tsim khoom tsim TaC coatings rautxo cov khoom tsis huvxws li titanium, boron, thiab txhuas. Cov khoom siv TaC coatings qhia txog cov pa roj carbon, oxygen, nitrogen, thiab lwm yam tsis huv uas tsawg heev, ua rau cov siv lead ua kom huv dua. Cov theem tsis huv hauv TaC coating tuaj yeem qis li <5 ppm, qis dua SiC coating lossis graphite liab qab (uas tuaj yeem muaj 260 ppm oxygen).

Kev Ua Haujlwm Thermal thiab Mechanical Durability ntawm TaC Txheej

Cov khoom siv no muaj cov thermal conductivity tseem ceeb. Nws ntsuas kwv yees li22 W·m⁻¹·K⁻¹Hauv W-TaC composites, qhov thermal conductivity ntawm TaC yog los ntawm15–35 W·m⁻¹·K⁻¹ntawm qhov kub ntawm 750 ° C, 850 ° C, thiab 950 ° C. Qhov kev ua kom sov siab no pab tau zootshem tawm cua sovthaum lub sijhawm ua haujlwm kub heev. Nws kuj tseem tiv thaiv kev kub dhau hauv zos.

Qhov ua tau ntev ntawm cov khoom siv no kuj tseem ceeb heev. Ib txheej NiCrBSi + Ta tau pom tias muaj zog heev.Kev tawg tawg zoo dua thiab kev txhim kho kev hnav tsis kam ntawm abrasive thiab nplaumpiv rau NiCrBSi txheej uas tsis muaj tantalum. Tantalum ua rau kom muaj kev tiv thaiv kev hnav ntawm Ni-raws li txheej los ntawm kev tsim cov khoom me me TaC. Rau WC-6Co cemented carbides, ntxiv0.6 wt% TaCua rau muaj kev tiv thaiv zoo tshaj plaws, txo qhov hnyav poob rau 0.15 mg thiab ua tiav qhov coefficient ntawm kev sib txhuam ruaj khov ntawm kwv yees li 0.3. A (Ta, Zr, Nb) C ib theem ceramic tau pom tias muaj qhov tawg ntawm2.9 MPa m1/2ntawm chav sov.

Kev Txheej Txheem TaC hauv Cov Txheej Txheem GaN / SiC Semiconductor Qib Siab

Txhim kho SiC Ib Leeg Crystal Loj Hlob nrog TaC Txheej

Kev txheej txheem TaCua lub luag haujlwm tseem ceeb hauv kev txhawb nqa SiC ib leeg siv lead ua kom loj hlob. Nws ua rau cov khoom siv lead ua zoo dua qub thiab txo cov qhov tsis zoo. Piv txwv li, nws txo cov qhov tsis zoo ntawm cov kav dej me me txog li99.7%. Nws kuj txo qhov kev sib txhuam ntawm ntug xov los ntawm 80.5%. TaC coatings tiv thaiv kev xeb ntawm cov khoom graphite hauv qhov chaw kub thiab kub siab silicon vapor. Uncoated graphite corrodes, tso cov pa roj carbon. Cov khoom no ua rau muaj carbon encapsulation thiab ua rau muaj qhov tsis zoo hauv cov khoom siv SiC loj hlob. Los ntawm kev tiv thaiv graphite, TaC coatings xyuas kom meejcov siv lead ua kom huv.

Kev siv cov txheej txheem TaC ua rau SiC ib leeg siv lead ua ke nrog cov pa roj carbon, oxygen, thiab nitrogen tsawg dua. Nws txo cov qhov tsis zoo ntawm ntug thiab txhim kho kev sib npaug ntawm kev tiv taus. Ntxiv mus, nws txo qhov ceev ntawm cov micropores thiab cov qhov etching.Kev tshawb fawb txog kev lag luamqhia tias TaC txheej daws cov teeb meem ntawm ntug siv lead ua. Nws kuj txo qhov tshwm sim ntawm polycrystalline tsim ntawm ntug ntawm SiC siv lead ua. Kev tshawb fawb los ntawm Eastern European University hauv Kauslim Teb lees paub tias TaC-coated graphite crucibles zoo txwv tsis pub nitrogen koom nrog. Qhov kev ua no txo ​​​​​​qhov tsim ntawm microtubules thiab lwm yam teeb meem. TaC-coated crucibles khaws cia yuav luag tsis hloov pauv qhov hnyav thiab zoo li qub tom qab siv ntev. Cov chaw tsim khoom tuaj yeem rov ua dua lawv ntau zaus. Lawv muab lub neej ua haujlwm txog li200 teev, txhim kho kev ruaj khov thiab kev ua haujlwm zoo hauv cov txheej txheem tsim khoom.

Kev Txhim Kho GaN / SiC Epitaxial Kev Loj Hlob nrog TaC Txheej

Txheej TaC kuj tseem ceeb heev rau kev ua kom zoo dua GaN/SiC epitaxial kev loj hlob. Cov txheej txheem no xav tau ib puag ncig ruaj khov thiab huv si kom ua tiav cov txheej GaN zoo ntawm SiC substrates. Qhov kev ruaj khov kub siab ntawm TaC ua kom ntseeg tau tias cov khoom siv txheej txheem tseem zoo. Qhov kev ruaj khov no tiv thaiv cov khoom siv puas tsuaj txawm tias nyob rau qhov kub siab uas tsim nyog rau epitaxy. Nws cov thermal conductivity zoo dua pab tswj kom muaj qhov kub thiab txias sib npaug thoob plaws hauv substrate. Qhov kev sib npaug no tseem ceeb rau cov zaj duab xis tuab thiab cov qauv siv lead ua ke.

Qhov tshuaj lom neeg tsis muaj zog ntawm TaC txheej tiv thaiv cov tshuaj tiv thaiv tsis xav tau ntawm cov pa roj thiab cov khoom siv reactor. Cov tshuaj tiv thaiv no tuaj yeem ua rau cov khoom tsis huv nkag mus rau hauv txheej GaN uas loj hlob. Los ntawm kev muab qhov chaw ruaj khov thiab tsis muaj zog, TaC txhawb nqa qhov chaw loj hlob huv dua. Qhov chaw no yog qhov tseem ceeb rau kev ua tiav cov khoom siv hluav taws xob thiab kev ua tau zoo ntawm GaN cov khoom siv. Lub zog kho tshuab ntawm TaC kuj tseem pab txhawb rau lub neej ntev ntawm cov khoom siv reactor. Qhov kev ruaj khov no txo ​​​​​​lub sijhawm tsis ua haujlwm thiab kev saib xyuas, ntxiv qhov zoo tshaj plaws rau tag nrho cov txheej txheem loj hlob epitaxial.

Tiv Thaiv Kev Ua Phem thiab Txhim Kho Cov Qoob Loo nrog TaC Txheej

Kev tiv thaiv kev ua qias tuaj yog qhov tseem ceeb hauv kev tsim khoom semiconductor, thiab TaC txheej ua tau zoo heev hauv thaj chaw no.yam tsis muaj zog ntawm cov tshuaj lom neegntawm TaC txheej tiv thaiv cov tshuaj tiv thaiv tsis xav tau. Cov tshuaj tiv thaiv no tuaj yeem ua rau muaj cov tshuaj lom rau hauv qhov chaw loj hlob. Nws ua haujlwm ua ib qho kev thaiv ruaj khov tiv thaiv cov khoom tsis huv sab nraud. Cov cuab yeej no ua kom ntseeg tau tias muaj cov khoom siv ntshiab siab. TaC txheej daws teeb meem kev ua qias tuaj thiab cov qhov tsis zoo ntawm ntug los ntawm kev tsim ib txheej tiv thaiv. Txheej no tiv thaiv cov khoom siv tso tawm thiab cov khoom me me. Nws txo qis kev nkag mus rau hauv cov khoom tsis huv thiab txo qhov muaj feem yuav muaj cov qhov tsis zoo ntawm ntug uas tshwm sim nrog cov nto tsis tau pleev xim.

Qhov kev ntshiab siab heev ntawm TaC coatings, nrog rau qib impurity qis li <5 ppm, txhais tau ncaj qha rau SiC thiab GaN cov ntaub ntawv huv dua. Qhov kev huv no txo ​​qhov tshwm sim ntawm ntau yam tsis zoo, suav nrog micropores thiab etch pits.Kev tshawb fawb los ntawm University of Eastern Europe hauv Kauslim Tebqhia tau hais tias tantalum carbide (TaC) coated graphite crucibles zoo txwv tsis pub nitrogen koom nrog hauv SiC crystals. Qhov kev txwv no ncaj qha txo cov qhov tsis zoo xws li micropipes, yog li txhim kho qhov zoo ntawm crystal. Los ntawm kev txo qis kev ua qias tuaj thiab qhov tsis zoo, TaC coating ua rau muaj txiaj ntsig zoo ntawm cov semiconductor wafers zoo. Qhov kev txhim kho no ua rau muaj kev tsim khoom siv txhim khu kev qha thiab ua haujlwm tau zoo dua.

Vim li cas TaC Txheej Ua Tau Zoo Dua Lwm Txoj Hauv Kev

Kev Sib Piv Kev Ua Tau Zoo: TaC Txheej vs. SiC Txheej thiab Bare Graphite

Kev txheej txheem TaCmuaj cov txiaj ntsig zoo dua li lwm cov ntaub ntawv xws li SiC txheej thiab graphite liab qab hauv kev tsim khoom semiconductor. Nws cov khoom zoo dua ua rau nws yog qhov kev xaiv zoo tshaj plaws rau cov ntawv thov uas xav tau ntau. TaC txheej muab kev ua tau zoo dua hauv cov chaw tseem ceeb. Cov chaw no suav nrog kev ruaj khov kub siab, kev tiv thaiv tshuaj lom neeg, thiab kev dawb huv. Cov txiaj ntsig no txhais tau ncaj qha rau kev txhim kho kev ua haujlwm zoo dua thiab cov khoom zoo.

Kev Tiv Thaiv Etch Zoo Tshaj Plaws thiab Qib Kev Tsis Zoo ntawm TaC Txheej

TaC txheej qhia tau tias nws tiv taus kev khawb zoo dua. Cov khoom no tseem ceeb heev rau cov khoom ua haujlwm hauv cov chaw ua haujlwm hnyav. CVD TaC txheej muab kev tiv thaiv zoo heev rau kev xeb tshuaj thiab kev puas tsuaj thermal rau cov cuab yeej khawb. Qhov kev tiv thaiv no ua kom ntseeg tau tias cov cuab yeej ua haujlwm zoo hauv cov chaw ua haujlwm plasma, ua rau muaj kev khawb zoo. Cov khoom tiv thaiv kev sib txuas ntawm cov khoom me me kuj txo cov khoom qias neeg, txhim kho kev ntseeg siab ntawm cov txheej txheem. Zuag qhia tag nrho, TaC txheej txo cov cuab yeej hnav thiab txhim kho kev ua haujlwm ntau lawm, txuas ntxiv lub neej ntawm cov khoom hauv cov ntawv thov plasma. Tantalum carbide (TaC) txheej ua rau lub neej ntawm cov khoom hauv cov chaw ua haujlwm plasma ntev dua. Lawv ua haujlwm ua ib qho kev tiv thaiv. Lawv tiv thaiv cov khoom semiconductor xws li electrodes, sensors, thiab chambers los ntawm kev puas tsuaj. Qhov kev puas tsuaj no yog tshwm sim los ntawm cov pa roj corrosive, kub siab, thiab cov txheej txheem tshuaj lom neeg. TaC-coated etching chambers tiv taus cov chaw ua haujlwm plasma corrosive thaum lub sijhawm semiconductor fabrication. Qhov kev tiv thaiv no ua kom ntseeg tau tias cov khoom siv ua haujlwm ntev thiab kev ua haujlwm zoo. Kev tiv thaiv no txo ​​​​​​lub sijhawm tsis ua haujlwm, kev saib xyuas, thiab cov nqi hloov pauv, txhim kho kev tsim khoom tag nrho. Ntxiv mus, TaC txheej khav txog kev huv siab heev, nrog rau cov qib impurity feem ntau qis dua 5 ppm. Qib no qis dua li SiC txheej lossis graphite liab qab, uas tuaj yeem muaj cov pa oxygen txog li 260 ppm.

Kev Tiv Thaiv Kev Kub Ntxhov thiab Kev Muaj Peev Xwm Kub Tshaj Plaws ntawm TaC Txheej

Cov khoom siv TaC txheej txheemzoo heev tsis kam rau thermal shockCov khoom no muaj txiaj ntsig zoo rau cov ntaub ntawv uas raug hloov pauv sai thiab tseem ceeb ntawm qhov kub thiab txias. Nws ua kom lawv muaj kev ntseeg siab thiab kev ua tau zoo hauv cov chaw nyuaj. Cov ntaub ntawv no tseem ua tau zoo txawm tias nyob hauv qhov kub thiab txias heev.Nws qhov kub siab tshaj plaws kuj tshaj qhov lwm txoj hauv kev.

Kev txheej TaC txo qhov ua qias tuaj thiab txhim kho kev tswj cua sov hauv kev tsim khoom semiconductor. Nws muaj kev ua tau zoo dua li cov ntaub ntawv ib txwm muaj xws li SiC txheej thiab graphite liab qab. Cov khoom siv siab heev no yog qhov tseem ceeb rau kev txhim kho cov txiaj ntsig thiab kev ntseeg siab hauv GaN / SiC semiconductor cov txheej txheem, tsav kev vam meej hauv kev lag luam.

Cov Lus Nug Feem Ntau

Lub luag haujlwm tseem ceeb ntawm TaC txheej hauv kev tsim khoom semiconductor yog dab tsi?

Kev txheej txheem TaCua haujlwm ua ib txheej ceramic ua haujlwm tau zoo. Nws tiv thaiv cov khoom, txo cov kuab paug, thiab tswj cov cua sov kom zoo. Qhov no ua kom muaj qhov xwm txheej zoo tshaj plaws rau kev loj hlob ntawm cov siv lead ua.

Cov txheej TaC piv rau cov txheej SiC thiab graphite liab qab li cas?

Txheej TaC muaj kev ruaj khov zoo heev thaum kub siab, tiv taus tshuaj lom neeg, thiab huv si heev. Nws ua tau zoo dua txheej SiC thiab graphite liab qab hauv cov ntawv thov semiconductor tseem ceeb.

Cov txiaj ntsig tshwj xeeb dab tsi uas TaC txheej coj los rau cov txheej txheem GaN / SiC?

Txheej txheej TaC ua rau SiC ib leeg siv lead ua loj hlob thiab ua kom GaN/SiC epitaxial loj hlob zoo dua. Nws tiv thaiv kev ua qias tuaj, txhim kho kev tswj cua sov, thiab ua rau tag nrho cov txiaj ntsig thiab kev ntseeg siab nce ntxiv.