Thuto ea Nyeoe: Likarolo tsa Graphite tse Hloekileng Haholo bakeng sa Masimo a Thermal a Monocrystalline a 32-Inch ho Khōlo ea Silicon ea Mofuta oa N

Selelekela: Phephetso ea Tšimo ea Thermal ea lisenthimithara tse 32 Kholo ea Silicon ea Mofuta oa N e Botle bo Phahameng

Ha indasteri ea photovoltaics e fetoha ka potlako ho tloha ho P-type PERC ho ea ho N-type TOPCon le Heterojunction (HJT) solar cells, tlhoko ea li-wafer tsa silicon tse hloekileng haholo e eketsehile haholo. Li-substrate tsa silicon tsa mofuta oa N li hloka bophelo ba ho jara ba fokolang haholo (hangata >300 μs) le tšilafalo ea litšila tsa tšepe tse fetohang e haufi le zero.

Ho eketsa tlhahiso, bahlahisi ba silicon wafer ba ntse ba atolosa boholo ba crucible ho fihlela ho lisenthimithara tse 32 le ho feta. Leha ho le jwalo, ho sebetsa mochesong o fetang 1,450°C tšimong ea mocheso ea lisenthimithara tse 32 ho hlahisa liphephetso tse matla tsa boenjiniere:

1. Ho senyeha ha mocheso le ho se leka-lekane ha oona:Methapo e meholo ea mocheso e baka ho fetoha ha sebopeho le ho petsoha ha li-heater le li-pedestal tse tloaelehileng tsa graphite.
2. Tšilafalo ea Tšepe e Fetohang:Dikarolo tse sa hloekang (Fe, Ni, Cu, V) tse ka hara graphite e tloaelehileng di fetoha mouoane nakong ya ho hula kristale nako e telele, di fallela ka ho toba ka hara silicon e qhibilihisitsweng mme di baka tshenyeho e kgolo bophelong bohle ba mojari wa dikokwana-hloko.

Tharollo ea Boenjiniere: Graphite e Hloekisitsoeng ka ho Fetisisa le SiC e Sireletsang

Ho hlola mathata ana a tekheniki, VeTek Semiconductor e kentse ntlafatso e felletseng ya thepa ho pholletsa le kopano yohle ya tshimo ya mocheso ya di-inch tse 32, e nang le graphite e nang le density e phahameng e kentsweng tlhoekisong ya halogen ya mocheso o phahameng le dikoahelo tse sireletsang tsa CVD Silicon Carbide (SiC).

1. Ho Hloekisa Halogen e Tebileng (Dikahare tsa Molora ≤ 2-5 ppm)

Graphite e tloaelehileng ea indasteri e na le molora o mongata o pakeng tsa 50 ppm le 200 ppm. Ka mocheso oa 1,450°C tlas'a vacuum, likarolo tsena tse setseng lia fetoha. Mokhoa oa rona oa ho Hloekisa Khase ea Halogen o nang le Mocheso o Phahameng o fetola litšila tsa tšepe hore e be metsoako ea halogen e feto-fetohang (chloride/fluoride) mochesong o kaholimo ho 2,400°C.

• Teko ea Glow Discharge Mass Spectrometry (GDMS)e netefatsa hore litšila tsohle tsa tšepe (Fe, Cr, Ni, Cu, V) li fokotsehile ho ba ka tlase ho 0.5 ppm, e leng se etsang hore molora o be ka kakaretso oa ≤ 2 ppm.
• Sephetho:E felisa phetoho ea khase ea tšepe ea morao, e sireletsa letamo la silicon le qhibilihisitsoeng hore le se ke la silafatsoa nakong ea lihora tse fetang 120 tsa lipotoloho tse tsoelang pele tsa ho hula.

2. Sebopeho sa Graphite se Isostatic se nang le Boima bo Phahameng bakeng sa Botsitso ba Thermal

Dikarolo tse kenyeletsang hitara ya graphite, susceptor e ka tjhesetswang ka seboping, le moqomo wa ho kenya mocheso di etswa ka graphite e nang le boima bo hodimo (1.85 g/cm³), graphite e nang le dithollo tse ntle (boholo ba dithollo <10 μm). Ho tobetsa ka tsela e sa fetoheng ho netefatsa katoloso e tshwanang ya thermal thermal (CTE), ho thibela kgatello ya mocheso ya sebakeng seo, ho sotha, le ho petsoha ha mechine tlasa dipotoloho tse pheta-phetoang tsa thermal.

3. Sekoahelo sa CVD Silicon Carbide (SiC) se Sireletsang

Dikarolo tsa bohlokwa tse pepesetsweng mouwane wa silicon le dikgase tse senyang di kwahetswe ka lera le teteaneng la 50–80 μm la Chemical Vapor Deposition (CVD) Silicon Carbide (SiC).

• Thibelo ea ho Sila:E thibela karabelo e tobileng ea lik'hemik'hale pakeng tsa mouoane oa silicon o feto-fetohang (SiO2) le substrate ea graphite (SiO2 + 2C → SiC + CO2), e felisa khoholeho ea mobu le tlhahiso ea lerōle la carbon.
• Ho nepahala ha Jiometri:E boloka jiometri e nepahetseng ea tšimo ea mocheso ka nako e telele ho feta 30%.

Lintlha tsa Tshebetso tse Lekantsoeng le Netefatso ea Teko ea Tšimo

Teko ea tšimo ea likhoeli tse 6 e bapisitsoe e entsoe ho pholletsa le lifono tsa CZ tsa lisenthimithara tse 32 tsa tlhahiso ea 50 setsing sa tlhahiso ea li-wafer tsa silicon tsa TOPCon sa tier-1. Ka tlase ke tekanyo ea ts'ebetso e bapisang likarolo tse tloaelehileng tsa graphite khahlanong le tharollo ea tšimo ea mocheso e hloekisitsoeng ea VeTek Semiconductor:

Lipotso Tse Botsoang Khafetsa (Lipotso Tse Botsoang Khafetsa)

Qetello le Keletso ea Botekgeniki

Ho ntlafatsa ho ea ho likarolo tsa graphite tse hloekisitsoeng haholo tse nang le tšireletso ea CVD SiC ho fana ka tsela e tobileng le e ka lekanngoang ea ho rarolla mathata a chai le ho se hloeke khōlong ea silicon ea monocrystalline ea mofuta oa N ea lisenthimithara tse 32. Ka ntlafatso ea 18% ea chai e kholo le bophelo bo bolelele ba 30% ba tšimo ea mocheso, bahlahisi ba li-wafer tsa letsatsi ba ka fihlela ROI e kholo.