Quartz wafer boat is a specialized tool used in the semiconductor manufacturing process, mainly for carrying and transporting silicon wafers in high-temperature environments. Due to its excellent h...
2 Experimental results and discussion
2.1 Epitaxial layer thickness and uniformity
Epitaxial layer thickness, doping concentration and uniformity are one of the core indicators for judging the...
Tantalum carbide hardness, high melting point, high temperature performance, mainly used as a hard alloy additive. The thermal hardness, thermal shock resistance and thermal oxidation resistance of...
Introduction of Silicon Carbide
Silicon carbide (SIC) has a density of 3.2g/cm3. Natural silicon carbide is very rare and is mainly synthesized by artificial method. According to the different clas...
1. Main processes of plasma enhanced chemical vapor deposition
Plasma enhanced chemical vapor deposition (PECVD) is a new technology for the growth of thin films by chemical reaction of gase...
With the continuous advancement of science and technology, the semiconductor industry has an increasing demand for high-performance, high-efficiency materials. In this field, silicon carbide crysta...