What is a Quartz Boat?
A quartz boat is a precision carrier made of high-purity fused silica, typically featuring a multi-slot design. It is used to hold silicon wafers, semiconductor substr...
In the back-end process stage, the wafer (silicon wafer with circuits on the front) needs to be thinned on the back before subsequent dicing, welding and packaging to reduce the package mounting he...
SiC coated graphite bases are commonly used to support and heat single crystal substrates in metal-organic chemical vapor deposition (MOCVD) equipment. The thermal stability, thermal uniformity and...
1. What is a PECVD boat?
1.1 Definition and core functions
PECVD boat (Plasma Enhanced Chemical Vapor Deposition) is a core tool used to carry wafers or substrates in the PECVD process. It...
Wafer epitaxial growth is achieved through the metal organic chemical vapor deposition (MOCVD) technology, in which ultra-pure gases are injected into the reactor and finely metered, so that they c...
With the gradual mass production of conductive SiC substrates, higher requirements are put forward for the stability and repeatability of the process. In particular, the control of defects, the sma...