I. Process parameter exploration
1. TaCl5-C3H6-H2-Ar system
2. Deposition temperature:
According to the thermodynamic formula, it is calculated that when the temperature is greater than 1273K...
Why do graphite crucibles crack? How to solve it?
The following is a detailed analysis of the causes of cracks:
1. After the crucible is used for a long time, the crucible wall presents longitudin...
The semiconductor industry is an emerging science and technology industry, which has attracted great attention in recent years, more and more companies have begun to enter the semiconductor industr...
Since its discovery, silicon carbide has attracted widespread attention. Silicon carbide is composed of half Si atoms and half C atoms, which are connected by covalent bonds through electron pairs ...
Taking polyacrylonitrile based carbon felt as an example, the area weight is 500g/m2 and 1000g/m2, the longitudinal and transverse strength (N/mm2) are 0.12, 0.16, 0.10, 0.12, the breaking elongati...
Bipolar plate is the core component of the reactor, which has a great impact on the performance and cost of the reactor. At present, the bipolar plate is mainly divided into graphite plate, composi...