I. Process parameter exploration
1. TaCl5-C3H6-H2-Ar system
2. Deposition temperature:
According to the thermodynamic formula, it is calculated that when the temperature is greater than 1273K...
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SiC single crystal is a Group IV-IV compound semiconductor material composed of two elements, Si and C, in a stoichiometric ratio of 1:1. Its hardness is second only to diamond.
The carbon reducti...