1. Main processes of plasma enhanced chemical vapor deposition
Plasma enhanced chemical vapor deposition (PECVD) is a new technology for the growth of thin films by chemical reaction of gase...
A bipolar plate, an important component of the fuel cell
Bipolar plates
Bipolar plates are made of graphite or metal; they evenly distribute the fuel and the oxidant to the cells of the fuel cell....
As the basis of modern electronic devices, semiconductor material are undergo unprecedented change. today, diamond is gradually screening its great potential as a fourth-coevals semiconductor mater...
2 Experimental results and discussion
2.1 Epitaxial layer thickness and uniformity
Epitaxial layer thickness, doping concentration and uniformity are one of the core indicators for judging the...
Wide bandgap (WBG) semiconductors represented by silicon carbide (SiC) and gallium nitride (GaN) have received widespread attention. People have high expectations for the application prospects of s...
Fuel cells have become a viable eco-friendly power source, and advancements in the technology continue to be made. As fuel cell technology improves, the importance of using high-purity fuel cell gr...