Samar da wutar lantarki ta hasken rana ta zama sabuwar masana'antar makamashi mafi kyau a duniya. Idan aka kwatanta da ƙwayoyin hasken rana na polysilicon da amorphous silicon, monocrystalline silicon, a matsayin kayan samar da wutar lantarki ta photovoltaic, yana da ingantaccen canjin photoelectric da fa'idodi na kasuwanci masu ban mamaki, kuma ya zama babban abin da ake amfani da shi wajen samar da wutar lantarki ta hasken rana. Czochralski (CZ) yana ɗaya daga cikin manyan hanyoyin shirya silicon monocrystalline. Tsarin murhun Czochralski monocrystalline ya haɗa da tsarin murhun wuta, tsarin injinan iska, tsarin iskar gas, tsarin filin zafi da tsarin sarrafa wutar lantarki. Tsarin filin zafi yana ɗaya daga cikin mahimman yanayi don haɓaka silicon monocrystalline, kuma ingancin silicon monocrystalline yana shafar kai tsaye ta hanyar rarraba yanayin zafi na filin zafi.
Abubuwan da ke cikin filin zafi galibi sun ƙunshi kayan carbon (kayan graphite da kayan haɗin carbon/carbon), waɗanda aka raba su zuwa sassan tallafi, sassan aiki, abubuwan dumama, sassan kariya, kayan hana zafi, da sauransu, bisa ga ayyukansu, kamar yadda aka nuna a Hoto na 1. Yayin da girman silicon monocrystalline ke ci gaba da ƙaruwa, buƙatun girman abubuwan da ke cikin filin zafi suma suna ƙaruwa. Kayan haɗin carbon/carbon sun zama zaɓi na farko don kayan filin zafi don silicon monocrystalline saboda daidaiton girmansa da kyawawan halayen injiniya.
A cikin tsarin sinadarin silicon na czochralcian monocrystalline, narkewar kayan silicon zai haifar da tururin silicon da kuma narkewar silicon, wanda ke haifar da lalacewar kayan filin zafi na carbon/carbon, kuma halayen injina da tsawon rayuwar kayan filin zafi na carbon/carbon suna da matukar tasiri. Saboda haka, yadda za a rage lalacewar kayan filin zafi na carbon/carbon da inganta rayuwar hidimarsu ya zama ɗaya daga cikin abubuwan da suka fi damun masana'antun silicon na monocrystalline da masana'antun kayan filin zafi na carbon/carbon.Rufin silicon carbideya zama zaɓi na farko don kariyar murfin saman kayan filin zafi na carbon/carbon saboda kyakkyawan juriyarsa ga girgizar zafi da juriyar lalacewa.
A cikin wannan takarda, tun daga kayan filin zafi na carbon/carbon da ake amfani da su wajen samar da silicon monocrystalline, an gabatar da manyan hanyoyin shiri, fa'idodi da rashin amfanin murfin silicon carbide. A kan wannan, an sake duba aikace-aikacen da ci gaban bincike na murfin silicon carbide a cikin kayan filin zafi na carbon/carbon bisa ga halayen kayan filin zafi na carbon/carbon, kuma an gabatar da shawarwari da jagororin haɓakawa don kare murfin saman kayan filin zafi na carbon/carbon.
1 Fasahar shiri nashafi na silicon carbide
1.1 Hanyar sakawa
Sau da yawa ana amfani da hanyar haɗawa don shirya murfin ciki na silicon carbide a cikin tsarin kayan haɗin C/C-sic. Wannan hanyar da farko tana amfani da foda gauraye don naɗe kayan haɗin carbon/carbon, sannan a yi maganin zafi a wani zafin jiki. Jerin halayen sinadarai masu rikitarwa suna faruwa tsakanin foda gauraye da saman samfurin don samar da murfin. Amfaninsa shine cewa tsarin yana da sauƙi, tsari ɗaya ne kawai zai iya shirya kayan haɗin matrix masu yawa, marasa fashewa; Ƙaramin canji daga preform zuwa samfurin ƙarshe; Ya dace da kowane tsari mai ƙarfafa zare; Ana iya samar da wani ɗan ƙaramin tsari tsakanin murfin da substrate, wanda aka haɗa shi da substrate sosai. Duk da haka, akwai kuma rashin amfani, kamar amsawar sinadarai a babban zafin jiki, wanda zai iya lalata zare, da kuma kaddarorin injinan raguwar carbon/carbon matrix. Daidaiton murfin yana da wahalar sarrafawa, saboda dalilai kamar nauyi, wanda ke sa murfin bai daidaita ba.
1.2 Hanyar shafa slurry
Hanyar shafa slurry ita ce a haɗa kayan shafa da manne a cikin cakuda, a shafa a saman matrix ɗin daidai gwargwado, bayan an busar da shi a cikin yanayi mara motsi, samfurin da aka shafa zai yi laushi a zafin jiki mai yawa, kuma za a iya samun murfin da ake buƙata. Fa'idodin su ne cewa tsarin yana da sauƙi kuma mai sauƙin aiki, kuma kauri na shafa yana da sauƙin sarrafawa; Rashin kyawun shine cewa akwai ƙarancin ƙarfin haɗin gwiwa tsakanin shafa da substrate, kuma juriyar girgizar zafi na shafa ba ta da kyau, kuma daidaiton murfin yana da ƙasa.
1.3 Hanyar amsawar tururin sinadarai
Hanyar sinadaran tururin amsawa (CVR) hanya ce ta tsari wadda ke fitar da sinadarin silicon mai ƙarfi zuwa tururin silicon a wani zafin jiki, sannan tururin silicon ya bazu zuwa ciki da saman matrix, sannan ya yi aiki a wurin da carbon ke cikin matrix don samar da silicon carbide. Fa'idodinsa sun haɗa da yanayi iri ɗaya a cikin tanda, daidaitaccen saurin amsawa da kauri ajiyar kayan da aka shafa a ko'ina; Tsarin yana da sauƙi kuma mai sauƙin aiki, kuma ana iya sarrafa kauri mai rufi ta hanyar canza matsin lamba na tururin silicon, lokacin ajiya da sauran sigogi. Rashin kyawun shine cewa samfurin yana da tasiri sosai ta wurin matsayin da ke cikin tanda, kuma matsin lamba na tururin silicon a cikin tanda ba zai iya kaiwa ga daidaiton ka'ida ba, wanda ke haifar da kauri mai daidaito.
1.4 Hanyar adana tururin sinadarai
Tacewar tururin sinadarai (CVD) tsari ne da ake amfani da hydrocarbons a matsayin tushen iskar gas da kuma tsarkin N2/Ar mai yawa a matsayin iskar gas mai ɗaukar kaya don shigar da iskar gas mai gauraya a cikin na'urar samar da tururin sinadarai, kuma ana ruguza hydrocarbons, a haɗa su, a yaɗu, a sha su kuma a warware su a ƙarƙashin wani zafin jiki da matsin lamba don samar da fina-finai masu ƙarfi a saman kayan haɗin carbon/carbon. Amfaninsa shine cewa ana iya sarrafa yawan da tsarkin murfin; Hakanan ya dace da aikin da ke da siffa mai rikitarwa; Tsarin lu'ulu'u da yanayin saman samfurin za a iya sarrafa su ta hanyar daidaita sigogin ajiya. Rashin amfani shine cewa ƙimar ajiya ta yi ƙasa sosai, tsarin yana da rikitarwa, farashin samarwa yana da yawa, kuma akwai lahani na rufi, kamar fashe-fashe, lahani na raga da lahani na saman.
A taƙaice, hanyar sakawa ta takaita ga halayen fasaha, wanda ya dace da haɓakawa da samar da kayan dakin gwaje-gwaje da ƙananan girma; Hanyar shafawa ba ta dace da samar da yawa ba saboda rashin daidaitonta. Hanyar CVR na iya biyan yawan samar da kayayyaki masu girma, amma tana da buƙatu mafi girma ga kayan aiki da fasaha. Hanyar CVD hanya ce mai kyau don shiryawaShafi na SIC, amma farashinsa ya fi na CVR yawa saboda wahalar da yake sha wajen sarrafa tsari.
Lokacin Saƙo: Fabrairu-22-2024