4 Iniha GaN ma SiC Wafer

ʻO ka wehewehe pōkole:

ʻO VET Energy's 4-inch GaN ma ka SiC wafer he huahana hoʻololi i ke kahua o ka uila uila. Hoʻohui kēia wafer i ka conductivity thermal maikaʻi loa o ka silicon carbide (SiC) me ka mana kiʻekiʻe a me ka haʻahaʻa haʻahaʻa o ka gallium nitride (GaN), e lilo ia i koho kūpono no ka hana ʻana i nā mea mana kiʻekiʻe. Mālama ʻo VET Energy i ka hana maikaʻi loa a me ke kūlike o ka wafer ma o ka ʻenehana epitaxial MOCVD kiʻekiʻe.

E hoʻouna i ka leka uila iā mākou Hoʻoiho ma ke ʻano he PDF

Huahana Huahana

ʻAʻole i kaupalena ʻia ka laina huahana o VET Energy iā GaN ma nā wafers SiC. Hāʻawi pū mākou i kahi ākea o nā mea semiconductor substrate, me Si Wafer, SiC Substrate, SOI Wafer, SiN Substrate, Epi Wafer, etc. Eia kekahi, ke hoʻomohala nei mākou i nā mea semiconductor broadgap hou, e like me Gallium Oxide Ga2O3 a me AlN ʻO Wafer, e hoʻokō i nā koi o ka ʻoihana uila e hiki mai ana no nā mea hana kiʻekiʻe.

Hāʻawi ʻo VET Energy i nā lawelawe hana maʻalahi, a hiki ke hana i nā papa epitaxial GaN o nā mānoanoa like ʻole, nā ʻano doping like ʻole, a me nā nui wafer like ʻole e like me nā pono kikoʻī o nā mea kūʻai. Eia kekahi, hāʻawi pū mākou i ke kākoʻo ʻenehana loea a me ka lawelawe ma hope o ke kūʻai aku e kōkua i nā mea kūʻai aku e hoʻomohala wikiwiki i nā mea uila mana kiʻekiʻe.

OLELO HOOLAHA WAFERING

*n-Pm=n-type Pm-Grade,n-Ps=n-type Ps-Grade,Sl=Semi-lnsulating

'ikamu	8-Inika	6-Iniha			4-Iniha
'ikamu	nP	n-Pm	n-Ps	SI	SI
TTV(GBIR)	≤6um	≤6um
Kakaka (GF3YFCD)-Waiwai Loa	≤15μm	≤15μm	≤25μm		≤15μm
Warp(GF3YFER)	≤25μm	≤25μm	≤40μm		≤25μm
LTV(SBIR)-10mmx10mm	<2μm
Wafer Edge	ʻO ka beveling

ILI HOPE

*n-Pm=n-type Pm-Grade,n-Ps=n-type Ps-Grade,Sl=Semi-lnsulating

'ikamu	8-Inika	6-Iniha			4-Iniha
	nP	n-Pm	n-Ps	SI	SI
Hoʻopau ʻili	ʻaoʻao ʻelua Optical Polish, Si- Face CMP
ʻAhaʻulaʻula	(10um x 10um) Si-FaceRa≤0.2nm C-Face Ra≤ 0.5nm			(5umx5um) Si-Face Ra≤0.2nm C-Face Ra≤0.5nm
ʻOpeʻa Kiki	ʻAʻohe ʻae ʻia (lōʻihi a laula≥0.5mm)
Indents	ʻAʻole ʻae ʻia
Nā ʻōpala (Si-Face)	Ka nui.≤5, Huihui Length≤0.5×wafer anawaena	Ka nui.≤5, Huihui Length≤0.5×wafer anawaena			Ka nui.≤5, Huihui Length≤0.5×wafer anawaena
māwae	ʻAʻole ʻae ʻia
Hoʻokuʻu Edge	3mm