He kiʻekiʻe loa nā koi o nā mea graphite no ka ʻoihana semiconductor, a he kiʻekiʻe ka pololei o ka nui o nā ʻāpana liʻiliʻi o ka graphite, ke kūpaʻa wela kiʻekiʻe, ka ikaika kiʻekiʻe, ka liʻiliʻi o ka pohō a me nā pono ʻē aʻe, e like me: ka hoʻoheheʻe ʻana o nā huahana graphite sintered.No ka mea, pono nā lako graphite i hoʻohana ʻia i ka ʻoihana semiconductor (me nā mea hoʻomehana a me kā lākou make sintered) e kū i nā kaʻina hana hoʻomehana a me ke anuanu, i mea e hoʻolōʻihi ai i ke ola lawelawe o nā lako graphite, pono pinepine ʻia nā mea graphite i hoʻohana ʻia e loaʻa ka hana paʻa a me ka hana hopena wela.
01 Nā mea pono graphite no ka ulu ʻana o ke aniani semiconductor
ʻO nā kaʻina hana a pau i hoʻohana ʻia no ka ulu ʻana i nā kristal semiconductor e hana ana ma lalo o ke ana wela kiʻekiʻe a me ke kaiapuni ʻino. ʻO ka ʻāpana wela o ka umu ulu kristal i hoʻolako pinepine ʻia me nā ʻāpana graphite maʻemaʻe kiʻekiʻe e kū i ka wela a me ka corrosion, e like me ka mea hoʻomehana, ka ipu hoʻoheheʻe, ka cylinder insulation, ka cylinder alakaʻi, ka electrode, ka mea paʻa ipu hoʻoheheʻe, ka nati electrode, a pēlā aku.
Hiki iā mākou ke hana i nā ʻāpana graphite āpau o nā mea hana kristal, hiki ke hoʻolako ʻia ma ke ʻano pākahi a i ʻole ma nā set, a i ʻole nā ʻāpana graphite i hoʻopilikino ʻia o nā nui like ʻole e like me nā koi o ka mea kūʻai aku. Hiki ke ana ʻia ka nui o nā huahana ma ka pūnaewele, a hiki ke emi iho ka nui o ka lehu o nā huahana i hoʻopau ʻiama mua o 5ppm.
02 Nā mea pono graphite no ka epitaxy semiconductor
ʻO ke kaʻina hana epitaxial e pili ana i ka ulu ʻana o kahi papa o nā mea kristal hoʻokahi me ka hoʻonohonoho lattice like me ka substrate ma ka substrate kristal hoʻokahi. I ke kaʻina hana epitaxial, ua hoʻouka ʻia ka wafer ma ka disk graphite. He kuleana koʻikoʻi ka hana a me ke ʻano o ka disk graphite i ka maikaʻi o ka papa epitaxial o ka wafer. Ma ke kahua o ka hana epitaxial, pono ka nui o ka graphite maʻemaʻe ultra-kiʻekiʻe a me ke kumu graphite maʻemaʻe kiʻekiʻe me ka uhi SIC.
Loaʻa i ke kumu graphite o kā mākou hui no ka semiconductor epitaxy kahi ākea o nā noi, hiki ke hoʻokūkū i ka hapa nui o nā lako i hoʻohana pinepine ʻia i ka ʻoihana, a he maʻemaʻe kiʻekiʻe, uhi like, ola lawelawe maikaʻi loa, a me ke kūpaʻa kemika kiʻekiʻe a me ke kūpaʻa wela.
03 Nā mea pono graphite no ke kau ʻana o ka ion
ʻO ke kau ʻana o ka ion e pili ana i ke kaʻina hana o ka hoʻolalelale ʻana i ke kukuna plasma o ka boron, phosphorus a me ka arsenic i kahi ikehu, a laila e hoʻokomo iā ia i loko o ka papa o luna o ka mea wafer e hoʻololi i nā waiwai o ka papa o luna. Pono e hana ʻia nā ʻāpana o ka mea hoʻokomo ion me nā mea maʻemaʻe kiʻekiʻe me ke kūpaʻa wela maikaʻi loa, ka conductivity thermal, ka emi ʻana o ka pohō i hoʻokumu ʻia e ke kukuna ion a me ka haʻahaʻa o ka haumia. Hoʻokō ka graphite maʻemaʻe kiʻekiʻe i nā koi noi, a hiki ke hoʻohana ʻia no ka paipu lele, nā ʻoki like ʻole, nā electrodes, nā uhi electrode, nā conduits, nā terminators kukuna, a me nā mea ʻē aʻe o nā lako hoʻokomo ion.
ʻAʻole hiki iā mākou ke hāʻawi wale i ka uhi pale graphite no nā mīkini hoʻokomo ion like ʻole, akā hāʻawi pū kekahi i nā electrodes graphite maʻemaʻe kiʻekiʻe a me nā kumu ion me ke kūpaʻa kiʻekiʻe i ka palaho o nā kikoʻī like ʻole. Nā kumu hoʻohālike kūpono: Eaton, Azcelis, Quatum, Varian, Nissin, AMAT, LAM a me nā lako ʻē aʻe. Eia kekahi, hiki iā mākou ke hāʻawi i nā huahana keramika, tungsten, molybdenum, alumini a me nā ʻāpana i uhi ʻia.
04 Nā mea hoʻopaʻa graphite a me nā mea ʻē aʻe
ʻO nā mea hoʻomehana wela i hoʻohana ʻia i nā lako hana semiconductor e komo pū me ka graphite hard felt, soft felt, graphite foil, pepa graphite, a me ke kaula graphite.
ʻO kā mākou mea maka a pau he graphite i lawe ʻia mai, hiki ke ʻoki ʻia e like me ka nui kikoʻī o nā koi a ka mea kūʻai aku a kūʻai ʻia aku paha ma ke ʻano he holoʻokoʻa.
Hoʻohana ʻia ka pā kalapona-kalapona ma ke ʻano he mea lawe no ka uhi ʻiliʻili i ke kaʻina hana o ka silicon monocrystalline solar a me nā cell silicon polycrystalline. ʻO ke kumu hana: e hoʻokomo i ka chip silicon i loko o ka pā CFC a hoʻouna iā ia i loko o ka ʻōmole umu e hana i ka uhi ʻiliʻili.
