Hoʻohana nui ʻia ʻo MOCVD no ka ulu ʻana i nā kiʻiʻoniʻoni semiconductor lahilahi. He mea nui kēia mau kiʻiʻoniʻoni no nā mea uila a me nā optoelectronic holomua. Hōʻike ka mākeke no ka ʻenehana MOCVD i ka ulu ikaika. Kuhi ka poʻe loea i kona waiwai mākeke maUSD 1.1 biliona i ka makahiki 2023Ua wānana lākou e hiki aku ka loaʻa kālā i ka USD 2.8 biliona ma ka makahiki 2033, e hōʻike ana i ka nui o ka ulu makahiki hui (CAGR) o 9.7%. Ke hōʻike nei kēia hoʻonui koʻikoʻi i ke kuleana koʻikoʻi o MOCVD i ka holomua ʻenehana.
Nā Manaʻo Koʻikoʻi
- MOCVDulu nā ʻiliʻili semiconductor lahilahi. He mea nui kēia mau ʻiliʻili no nā mea uila he nui.
- Kōkua ʻo MOCVD i ka hana ʻana i nā hāmeʻa holomua. ʻO kēia mau mea nā LED, nā diode laser, a me nā mea uila mana.
- He maikaʻi ʻo MOCVD no ka ikehu hou. Kōkua ia i ka hana ʻana i nā cell solar a me nā mea ʻike kukui maikaʻi aʻe.
- Hāʻawi ʻo MOCVD i ka mana maikaʻi loa. Kūkulu ia i nā papa me ka pololei atomika no ka hana ʻoi aku ka maikaʻi o ka hāmeʻa.
- Hiki iā MOCVD ke hana i nā mea hana he nui i ka manawa hoʻokahi. He mea maikaʻi kēia no ka hana nui ʻana.
MOCVD no nā polokalamu Optoelectronic holomua
Hoʻokahe ʻana o ka mahu kemika metala-ʻOkanika (MOCVD)he kuleana koʻikoʻi ia i ka hana ʻana o nā mea optoelectronic holomua. Hiki i kēia ʻenehana ke hoʻonui pololei i nā kiʻiʻoniʻoni semiconductor lahilahi, he mea nui ia no ka hana ʻana o nā diode hoʻomālamalama hou, nā diode laser, a me nā mea hoʻoheheʻe infrared.
MOCVD ma ka hana ʻana o ka LED
He mea nui kēia ʻano hana hoʻokomo no ka hana ʻana i nā Light-Emitting Diodes (LEDs) hana kiʻekiʻe. Hoʻomaʻalahi ia i ka ulu ʻana o nā ʻōnaehana mea koʻikoʻi e like meʻO Gallium Nitride (GaN), Gallium Arsenide (GaAs), a me Indium Phosphide (InP), menā hui arsenide/phosphide (As/P). ʻO kēia mau mea ke kumu no ka hoʻokuʻu ʻana o ka mālamalama kūpono. Eia kekahi laʻana,nā LED InGaN multi-quantum-wells 407 nm violet hana kiʻekiʻehana ʻia me ka hoʻohana ʻana i kēia ʻano hana. Hoʻokomo pinepine kēia mau mea hana i kahi papa hoʻolaha au GaN i hoʻopaʻa ʻole ʻia a me nā pale AlGaN me ka nui o ka alumini. Hoʻomaikaʻi kēia hoʻolālā i ka pono o ka hoʻokuʻu ʻana o ka mālamalama ma ka hoʻēmi ʻana i ke kahe ʻana o ke au injection.Nā luawai multi-quantum InGaN/GaN (MQWs)hōʻike i kahi ʻano mea maʻamau no ka hana ʻana o ka LED ʻālohilohi kiʻekiʻe. Hoʻomaikaʻi nui ka ulu ʻana me ka hoʻohana ʻana i kēia ʻano hana i kake kūlike a me ka uhi ʻana o kēia mau kiʻiʻoniʻoni lahilahi atomika, ka mea e hoʻopilikia pololei ana i ka synthesis wafer-scale o nā mea 2D no nā polokalamu optoelectronic hana kiʻekiʻe.ʻulaʻula InGaN LED, e hoʻopuka ana ma 625 nm, ua hoʻokō i kahi moʻolelo pono quantum waho (EQE) o 10.5%ma o ke kaʻina hana epitaxial paʻakikī e pili ana i nā papa superlattice i hoʻopaʻa ʻia a me ka uku hoʻoponopono.
MOCVD no nā Diode Laser
ʻO nā diode laser, nā ʻāpana koʻikoʻi i ke kamaʻilio optical a me ka mālama ʻikepili, hilinaʻi nui lākou i kēia ʻenehana. Hiki i kēia ʻano hana ke ulu i nā kiʻiʻoniʻoni epitaxial kiʻekiʻe me ka hoʻohana ʻana i nā ʻōnaehana mea e like me Gallium Arsenide (GaAs), Gallium Nitride (GaN), a me Indium Phosphide (InP). Hoʻomaʻamaʻa nā ʻenehana ulu i ka hoʻomohala ʻana onā diode laser nalu ʻike ʻia mai nā hui III-V e like me InGaPAs a me InGaAlPEia kekahi,Hoʻopuka nā diode laser quantum dot InAs/GaAs i ulu ʻia e kēia ʻenehana i ke kukui O-band, ma 1.3 µm.ʻO ka pololei o ke kaʻina hana hoʻokaʻawale e hāʻawi nui i ka hilinaʻi a me ke ola o kēia mau mea hana. No ka laʻana, ua kōkua nui ia i ka hoʻoulu ʻana i nā kiʻiʻoniʻoni epitaxial kiʻekiʻe no nā diode laser ZnSe, e alakaʻi ana i kahi hoʻomaikaʻi koʻikoʻi i kā lākouke ola holoʻokoʻa, hiki i kahi o 500 mau hola ma 20°C ma lalo o ka hana nalu mauHoʻohana pū nā kānaka noiʻi i kēia ʻano hana e ulu ainā lasers lua quantum hoʻokahi InGaAs-AlGaAs i hoʻopaʻa ʻia ma kahi ākea e hana ana ma kahi o 975nm, kahi mea e kōkua ai i ka hoʻomaopopo ʻana i nā ʻano hana hōʻino.
MOCVD ma nā mea hoʻopuka infrared
He mea nui nō hoʻi kēia ʻano hoʻokaʻawale no ka hana ʻana i nā mea hoʻoheheʻe infrared holomua, kahi e loaʻa ai nā noi i ka ʻike ʻana, ke kiʻi ʻana, a me ke kamaʻilio ʻana. ʻAe ke ʻano hana i ka hoʻokaʻawale pololei ʻana o nā ʻano mea paʻakikī. ʻO nā lasers mid-infrared, no ka laʻana, ua ulu ʻia me ka hoʻohana ʻana i kēia kaʻina hana. Hoʻokomo kēia mau mea hana akamai i nā claddings AlAsSb, nā ʻāpana hana InAsSb i hoʻopaʻa ʻia, a me nā ʻāpana hana maikaʻi quantum multi-stage, type I InAsSb/InAsP. Loaʻa pū iā lākou nā papa semi-metal GaAsSb/InAs, e hana ana ma ke ʻano he kumu electron kūloko no nā lasers injection multi-stage, a lawelawe ʻo AlAsSb ma ke ʻano he papa hoʻopaʻa electron. Hōʻike kēia mau ʻano i kanā mea hana multi-stage mua i ulu ʻia e kēia ʻano hana, e hōʻike ana i ka hiki o ka ʻenehana ke hana i nā ʻāpana infrared kūikawā loa. ʻO ka hiki ke kāohi i ka like ʻana a me ka uhi ʻana o nā kiʻiʻoniʻoni i synthesized ʻia he mea koʻikoʻi ia no ka hana ʻana o kēia mau mea infrared holomua.
MOCVD ma nā ʻElekole Hana Kiʻekiʻe

Hoʻokahe ʻana o ka mahu kemika metala-ʻOkanika (MOCVD)he ʻenehana kihi no ka hoʻomohala ʻana i nā mea uila hana kiʻekiʻe. Hiki i kēia ʻenehana ke ulu pololei o nā papa semiconductor koʻikoʻi no nā mea uila mana, nā transistors alapine kiʻekiʻe, a me nā mea ʻike holomua.
MOCVD no nā ʻElela Mana
Pono nā mea uila mana i nā mea i hiki ke lawelawe i nā mānoanoa mana kiʻekiʻe a me nā mahana koʻikoʻi. He mea nui ka MOCVD no ka hana ʻana i nā mea e like me Gallium Nitride (GaN) a me Silicon Carbide (SiC), nona nā meaʻoi aku ka maikaʻi o ka conductivity thermal a me ke kiʻekiʻe o ka breakdown voltageHe mea nui kēia mau waiwai no nā ʻōnaehana mana hou.Nā semiconductors ākea-bandgap e like me SiC a me GaNkūpono loa no nā wahi mana koi. Hoʻopilikia ʻia nā mea hana i ke kiʻekiʻe o ke ana, ke au, a me ka mahana ma kēia mau hoʻonohonoho. ʻO nā diode GaN, no ka laʻana, i hana ʻia me nā ʻāpana drift i ulu ʻia e MOCVD, ua hōʻike i nā voltages breakdown e ʻoi aku ana1.3 kVUa hōʻike nā mea hana he ʻumikūmālua mai kahi wafer hoʻokahi i kēia hiki, e hōʻea ana ma kahi o 90 pakeneka o ka palena parallel-plane theoretical.
Hiki i ka MOCVD ke hoʻoulu i ka ulu ʻana onā papa epitaxial kristal hoʻokahi kiʻekiʻe ma nā substrates SiC me nā densities kīnā haʻahaʻa. He mea koʻikoʻi kēia no nā semiconductors mana. Hāʻawi ke kaʻina hana i ka mana pololei ma luna o ka mānoanoa, ka hoʻohuihui doping, a me ke ʻano like o ka papa o ka papa epitaxial. Hoʻonui kēia mau mea i nā waiwai uila e pono ai no nā mea uila paʻakikī. Eia kekahi, kūpono ʻo MOCVD no ka hana nui. ʻAe ia i ka ulu ʻana o nā papa epitaxial ma nā substrates liʻiliʻi a me nā substrates nui, e hana ana i nā mea hana SiC-based i mea kūpono no ka hoʻohana ākea ʻana. Nā mea semiconductor III-nitride, meGaN, AlGaN, InGaN, AlN, a me InAlN, ua ulu ʻia ma o kēia ʻano hana no nā noi hana kiʻekiʻe i nā mea uila mana, photonics, a me nā ʻenehana ikehu maʻemaʻe. He mea koʻikoʻi kēia mau mea no nā mea hana e like me nā transistors mana kiʻekiʻe (HEMT), nā LED ʻike ʻia e UV, a me nā diode laser.
MOCVD i nā Transistors Frequency Kiʻekiʻe
ʻO nā transistors alapine kiʻekiʻe, he mea koʻikoʻi no nā ʻōnaehana kamaʻilio holomua, e pōmaikaʻi nui hoʻi mai ka MOCVD. Hoʻomaʻamaʻa ke kaʻina hana i ka ulu ʻana o nā ʻōnaehana mea InP no nā mea hana e like me High Electron Mobility Transistors (Nā HEMT), Heterojunction Bipolar Transistors (HBT), PIN, Mixer, a me Multiplier diodes. No ka laʻana, hana nā kānaka noiʻi i nā AlGaN/GaN High-Electron-Mobility Transistors (HEMTs) ma 4-'īniha GaN ma nā substrates SiC. ʻO ka wafer epitaxial, i ulu ʻia e MOCVD, aia i loko o kahi papa buffer i-GaN, kahi papa kahawai GaN i hoʻohuihui ʻole ʻia he 0.9 μm, kahi papa pale 25 nm Al0.25Ga0.75N, a me kahi papa pāpale GaN 2 nm. Ua hōʻike nā ana ʻo Hall ma ka mahana o ka lumi i kahi neʻe ʻana o ka electron o1500 cm²/V·s, he kūpaʻa pepa o 280 Ω/sq, a me ka nui o ka mea lawe pepa o 1 × 10¹³/cm².
ʻO ka hoʻonui ʻana i nā ʻano hana ʻoki ohmic (OEPs) no nā noi Ka-band e hoʻonui hou aku i ka hana. Ua hōʻike kahi ʻano laina 1 μm OEP i nā hopena maikaʻi loa i hoʻohālikelike ʻia me nā ʻano ʻē aʻe.
| Ana Hana | 1 μm Laina OEP | ʻO nā OEP ʻē aʻe (e laʻa, nā lua 1 μm, nā lua 3 μm, nā laina 3 μm) |
|---|---|---|
| Ke kū'ē'ē pili | Haʻahaʻa loa | Kiʻekiʻe aʻe |
| Hana Hōʻailona Liʻiliʻi | Kiʻekiʻe loa | Haʻahaʻa |
| Hana Hōʻailona Nui | Kiʻekiʻe loa | Haʻahaʻa |
| Ka helu walaʻau haʻahaʻa loa (NFmin) | Liʻiliʻi loa | Nui aʻe |
| Ke kū'ē ʻana (Ron) | 1.61 Ω·mm | Kiʻekiʻe aʻe |
ʻO kēia ʻano OEP i hoʻomaikaʻi ʻia, i hui pū ʻia me nā papa epitaxial i ulu ʻia e MOCVD, e alakaʻi i ka hana alapine lekiō i hoʻomaikaʻi ʻia. Hoʻokō ia i kēia ma ka hōʻemi ʻana i ke kū'ē komo a me ka hoʻonui ʻana i ka wahi pili.
MOCVD no nā Sensors Holomua
Hilinaʻi nā mea ʻike holomua i nā papa semiconductor i hana pono ʻia no ka hoʻonui ʻana i ka ʻike a me ke koho ʻana. ʻO ka ulu ʻana o MOCVD oʻO nā dichalcogenides metala hoʻololi 2D (TMDs) e like me ka molybdenum disulfide (MoS2)he mea koʻikoʻi ia no nā mea hana nano-electronic o ka hanauna e hiki mai ana. Hoʻokomo pinepine kēia mau noi i nā ʻenehana ʻike holomua, e pōmaikaʻi ana mai ka ulu pololei ʻana o ka papa-ma-papa a me ka crystallinity kiʻekiʻe i hāʻawi ʻia e ke ʻano hana.
He mea maikaʻi loa nā papa ZnGa2O4 i ulu ʻia e MOCVD no nā mea ʻike kinoea NO. Ua hōʻike ʻia e ka noiʻi ʻana e hoʻonui nui ka mālama ʻana i ka ʻili plasma i kā lākou hana. Ke alakaʻi nei kēia i kahi hoʻomaikaʻi 8-fold i ka pane sensor no ka 5 ppm NO gas concentration, e hōʻea ana1276.1%. Ua hoʻokō pū kēia sensor i hoʻomaikaʻi ʻia i kahi palena haʻahaʻa o ka ʻike ʻana o 2.4 ppb, e hōʻike ana i ka pono o ke ʻano hana i ka hana ʻana i nā mea ʻike kinoea NO hana kiʻekiʻe.
Eia kekahi,nā nanowires indium oxide a me nā kiʻiʻoniʻoni lahilahi In2O3ʻO ka mea i ulu ʻia e kēia kaʻina hana e hōʻike i ka selectivity maikaʻi i ka NO2. Hōʻike kēia mau mea i ka liʻiliʻi o ka hoʻopilikia ʻana mai nā kinoea ʻē aʻe, e hōʻike ana i ka selectivity i hoʻomaikaʻi ʻia. ʻO kahi epilayer ZnGa2O4 (ZGO) i ulu ʻia e MOCVD i hōʻike i ka ʻike kiʻekiʻe, ka hoʻohuli ʻana, a me ke koho ʻana no ka ʻike ʻana i ka NO ma 300 °C. Ua hōʻike ka sensor ZGO i kahi ʻike o1.88i ka wā i hōʻike ʻia ai i ka 125 ppb NO. Ua hōʻike ia i ke kiʻekiʻe o ka ʻike i ka NO ʻoiai ʻaʻole i pane iki me CO2, CO, a me SO2, e hōʻike ana i ka hoʻonui ʻia o ke koho ʻana. Ua hōʻike pū ka sensor ZGO i kahi pane nui aʻe i ka NO i hoʻohālikelike ʻia me NO2. Ua hōʻoia nā simulations mua-kumumanaʻo ʻo ka pane ikaika o ka sensor kinoea ZGO i ka NO ma muli o kahi loli koʻikoʻi i ka hana hana ma luna o ka adsorption mole NO ma ka ʻili lahilahi.
MOCVD no ka Ikehu Hou a me ka ʻIke ʻana
Hoʻokahe ʻana o ka mahu kemika metala-olakino (MOCVD) hāʻawi nui i ka holomua i nā ʻenehana ikehu hou a me nā ʻōnaehana ʻike akamai. Hiki i kēia ʻenehana ke hana i nā mea hana kiʻekiʻe e pono ai no nā cell solar kūpono a me nā photodetectors koʻikoʻi.
MOCVD i loko o nā Pūnaewele Lā Multi-Junction
ʻO MOCVDhe mea nui no ka hana ʻana i nā panela solar kiʻekiʻe. Hiki iā ia ke hana i nā semiconductors hui me nā helu hoʻololi ikehu i hoʻomaikaʻi ʻia. He mea koʻikoʻi kēia ʻenehana no ka hoʻoulu ʻana i ka mana hou aʻe mai ka lā, e kūlike ana me ka manaʻo nui o ka honua i ka ikehu hou. Hana pinepine nā kānaka noiʻiNā polokalamu GaInP/GaInAs/Geme ka hoʻohana ʻana iā MOCVD no ka hana ʻana i nā cell solar multi-junction kiʻekiʻe-kūlana. Hoʻonui kēia mau ʻano paʻakikī i ka omo ʻana o ka lā ma nā ʻāpana like ʻole o ka spectrum solar.
No ka laʻana, ua loaʻa i kahi cell solar ʻelima-junction III-V, i hana ʻia me ka hoʻohana ʻana iā MOCVD, kahi pono hoʻololi mana o35.1%. Ua hōʻike kēia mea hana 12 cm² i kahi ʻano AlGaInP-AlGaAs-GaAs-InGaAs-InGaAs. Loaʻa i kēlā me kēia subcell nā ikehu bandgap kikoʻī, e ʻae ana i ka hopu ʻana i ka mālamalama kūpono. ʻO kēia hiki ke hoʻopaʻa pololei ʻana e lilo ai ʻo MOCVD i mea pono loa no ka hoʻokuke ʻana i nā palena o ka hoʻololi ʻana i ka ikehu lā.
MOCVD no nā Photodetectors Kūpono
He kuleana koʻikoʻi ko MOCVD i ka hana ʻana i nā mea ʻike kiʻi kūpono. Hoʻololi kēia mau mea i ka mālamalama i mau hōʻailona uila, e ʻimi ana i nā noi i ke kamaʻilio ʻana, ke kiʻi ʻana, a me ka ʻike ʻana. ʻAe ke ʻano hana i ka mana pololei ma luna o ka haku mele ʻana o nā mea a me ka mānoanoa o ka papa, kahi e hoʻopili pololei ai i ka hana a ka mea ʻike kiʻi.
Hoʻoikaika ʻo MOCVD i ka ulu ʻana o nā membrane photodetector PIN InGaAs ma nā substrates InP. Hiki i nā ʻenekinia ke hoʻomaikaʻi i ka ʻike spectral o ka photodetector InGaAs no nā wavelengths i loko o kahi ākea ākea (0.4 μm-3.6 μm). Hana ʻia kēia hoʻonui ʻana ma o ka hoʻomalu pono ʻana i ka haku mele ʻana o nā mea, e like me In0.53Ga0.47As, nona ka bandgap o 0.74 eV a uhi i nā nalu kamaʻilio koʻikoʻi. ʻAe ʻo MOCVD i ka waiho pololei ʻana o nā papa like ʻole, me ka p- a me ke ʻano n-InP, a me nā papa InGaAs he nui me nā mānoanoa kikoʻī (e laʻa, kahi papa absorption InGaAs 2.2 μm undoped). He mea koʻikoʻi kēia mau papa no ka wehewehe ʻana i ka pane spectral o ka photodetector.
Eia kekahi, hiki i ka MOCVD ke hoʻonui i ka ulu ʻana oNā kiʻiʻoniʻoni (In1-xAlx)2O3 me kahi bandgap hiki ke hoʻololi ʻiama nā substrates MgO. ʻO ka bandgap tunability, i hoʻopili ʻia e ka haku mele kemika a me ka mahana ulu, hiki ke hana pololei i ka hana ʻana o nā photodetectors i pili i nā pae spectral kikoʻī. Hoʻonui kēia pololei i ka wikiwiki pane. Ua hōʻike nā Photodetectors e hoʻohana ana i nā kiʻiʻoniʻoni Ga2O3 i ulu ʻia e MOCVD i ka wikiwiki paneʻoi aku ka maikaʻi ma mua o 0.1 kekonaʻO ke kikoʻī, ua hōʻike nā photodiodes pale Schottky i hoʻokumu ʻia ma Ga2O3 ma ka mica i kēia pane wikiwiki, e hōʻike ana i ka hiki o ka ʻenehana no ka ʻike wikiwiki.
ʻO ka pololei a me ka versatility o MOCVD

Hāʻawi ka Metal-Organic Chemical Vapour Deposition i nā pono kūikawā i ka hana semiconductor. ʻO kona pololei a me ka versatility e lilo ia i mea nui no ka hana ʻana i nā mea uila a me nā optoelectronic holomua. ʻAe kēia ʻenehana i kaka mana kūikawā ma luna o nā waiwai mea a me nā ʻano papa.
Ke kuleana o MOCVD i ka Versatility Material
Ke hōʻike nei kēia ʻano hana hoʻokomoka maʻalahi o nā mea kupaianahaHoʻokomo ia i nā ʻano mea like ʻole. ʻO kēia mau meaNā mea II-VI, nā mea III-V, a me nā kiʻiʻoniʻoni lahilahi semiconducting crystalline kiʻekiʻe-maʻemaʻe. Hoʻokumu pū ia i nā micro/nanostructures, 0D, 1D, a me 2D nanomaterials. ʻOi aku ka maikaʻi meNā semiconductors III-V, e pili ana i nā mea metala e like me gallium a me indium, a me nā mea hui V e like me arsenic a me phosphorus.Nā ʻano hana like ʻole o GaAsa meNā mea i hoʻokumu ʻia ma GaN no nā LED a me nā mea uilahe mau noi maʻamau.
He ʻano hana maʻalahi loa kēia. Hoʻokomo ia i nā semiconductors hui, nitrides, a me nā oxides ma o ka hoʻololi ʻana i ke kemika precursor. Makemake nui ʻia ia no nā mea phosphide (P). No nā mea i hoʻokumu ʻia i ka arsenide, loaʻa i kēia ʻano hana a me MBE nā hiki like. Eia nō naʻe,ʻO MBE ke ʻano makemake ʻia no ka ulu ʻana o ka mea antimonide (Sb)a no nā ʻano hana holomua e like me nā kiko quantum.
| ʻenehana | Ka maʻalahi o nā mea |
|---|---|
| MOCVD | Hoʻokumu i nā ʻano kristal paʻakikī a maʻemaʻe kiʻekiʻe me ka mana kūikawā. |
| CVD laulā | ʻOi aku ka hiki ke hoʻonui ʻia a me ke kumukūʻai kūpono no kahi ākea o nā mea maʻalahi. |
MOCVD no ka Mana Papa Kūpono
Hiki i ke ʻenehana ke hoʻoulu i ka ulu ʻana o nā heterostructures paʻakikī mepololei pae atomikaHoʻokumu nā ʻenekinia i nā hoʻololi ʻoi ʻana o ka ʻātoma ma waena o nā papa. Hana ʻia kēia ma ka hoʻololi wale ʻana i nā kinoea mua e kahe ana i loko o ka reactor. He mea koʻikoʻi kēia kaohi no ka hoʻopilikino ʻana i nā waiwai uila a me nā ʻano optical o nā mea semiconductor multi-layered. Ua manaʻo ʻia ke kaʻina hana he 'hale pae atomika'. Kūkulu ʻia nā papa crystalline ultra-thin, atom by atom. Hoʻomaʻamaʻa kēia ʻano hana i kāohi nui ʻia i ka ulu ʻana o ka epitaxial. Hoʻonohonoho nā ʻātoma iā lākou iho i kahi ʻano i hoʻonohonoho pono ʻia, e hoʻohālike ana i ke ʻano kristal ma lalo o ka wafer. Hōʻoia kēia i ka hoʻomau ʻana o ka papa-ma-papa o ke ʻano kristal.
Ka Hoʻonui ʻana o MOCVD no ka Hana ʻana
Hāʻawi pū kēia ʻōnaehana i ka scalability koʻikoʻi no ka hana nui. Hoʻokipa nā reactors ʻoihana i nā mea he nuinā wafersʻO nā Planetary Reactors, no ka laʻana, lawelawenā wafers a hiki i 200 mm (ma kahi o 8 ʻīniha). Kākoʻo kēia i ka hana ʻana me ke kumu kūʻai haʻahaʻa a me ka nui. Ua ulu kahi GaN Planetary Reactor hanauna ʻelima i ʻewalu mau epiwafers 6-'īniha i hoʻokahi holo.
- Nā wafers 4-'īnihahoʻohana nui ʻia no ke kaulike ʻana i ke kumukūʻai a me ka nui i ka hana nui ʻana.
- Ke loaʻa nei nā wafers 6-'īniha i ka makemake no ka hana ʻana i nā nui, ʻoiai nā pilikia loea.
He mea pono ʻole ʻo MOCVD no ka hana ʻana i nā ʻano mea uila a me nā optoelectronic hou. ʻO kona mau hiki kūikawā i ka pololei a me ka versatility mea e hoʻokele i ka hana hou ma nā ʻoihana ʻenehana kiʻekiʻe he nui. Hiki i kēia ʻenehana ke hana i nā ʻano semiconductor paʻakikī me ka mana kūikawā. Ke hoʻomau nei ʻo MOCVD ma ke ʻano he ʻenehana kihi, e hiki ai ke holomua i ka mālamalama, ke kamaʻilio ʻana, ka helu ʻana, a me ka ikehu hou. Hoʻokuke mau ia i nā palena o ka mea hiki ke hana ʻia i ka ʻepekema mea holomua.
Ka manawa hoʻouna: Nov-13-2025