I ka ulu ʻana o ka hana semiconductor i nā geometries hāmeʻa liʻiliʻi, ka throughput wafer kiʻekiʻe, a me nā kūlana kaohi haumia e piʻi nui ana, ke kū nei nā lako hana thermal i nā pilikia ʻenekinia i manaʻo ʻole ʻia. ʻO nā kaʻina hana e like me LPCVD, thermal oxidation, dopant diffusion, a me ka annealing wela kiʻekiʻe i kēia manawa ke koi nei ʻaʻole wale i ka like ʻana o ka mahana paʻa, akā ʻo ka manawa hana lōʻihi hoʻi, ka hanauna ʻāpana haʻahaʻa, a me ka hana hou ʻana i ke kaʻina hana.
ʻOiai ua hoʻopoina pinepine ʻia i ka hoʻohālikelike ʻia me nā kinoea hana, nā ʻōmole umu, a i ʻole nā kemika hoʻokaʻawale, ʻo ka hoe cantilever ke kumu nui e hoʻoholo ai i ke ʻano o ka hana ʻana o nā wafers i loko o nā wahi wela kiʻekiʻe. I loko o nā fabs holomua he nui, ʻaʻole ia i manaʻo ʻia he ʻāpana maʻalahi e hoʻopau ʻia, akā he mea nui e hiki ai ke hana hou ʻia no ka semiconductor paʻa a hana hou ʻia.
He aha ka hoe SiC Cantilever?
ʻO ka SiC Cantilever Paddle kahi ʻāpana kūkulu silicon carbide maʻemaʻe kiʻekiʻe i hoʻohana nui ʻia i nā umu hoʻolaha semiconductor a me nā ʻōnaehana LPCVD. Hoʻolālā pinepine ʻia ia ma ke ʻano he ʻano kaola cantilever lōʻihi e hiki ke kākoʻo i nā waʻa wafer quartz a i ʻole SiC i ka wā o ka hana ʻana i ka mahana kiʻekiʻe.
Ma keʻano laulā, hanaʻia ka ʻāpana me ka hoʻohanaʻana i:
● ka silicon carbide i hoʻopili hou ʻia (RSiC)
● silicon carbide i waiho ʻia me ka mahu kemika (CVD SiC)
● nā mea SiC i hoʻopaʻa ʻia me ka hopena kiʻekiʻe
Wahi a ka ʻikepili mea i paʻi ʻia e CoorsTek lāua ʻo Saint-Gobain Performance Ceramics, hōʻike pinepine nā mea SiC maʻemaʻe kiʻekiʻe:
● Ka hoʻokele wela: ma kahi o 120–200 W/m·K ma ka mahana o ka lumi
● Ka mahana hana kiʻekiʻe loa ma ka lewa inert: ma luna o 1600°C.
● Ka helu hoʻonui wela (CTE): ma kahi o 4.0–4.5×10⁻⁶/K.
● Kū'ē maikaʻi loa i ka HCl, NH₃, O₂, a me ke kemika hana chlorinated.
Ke Kūlana o ka SiC Cantilever Paddle i ka Hana ʻana o LPCVD
Ma waena o nā noi āpau, ʻo nā ʻōnaehana LPCVD kekahi o nā hihia hoʻohana koʻikoʻi no nā hoe SiC Cantilever.
Nā kaʻina hana e like me:
● waiho ʻana o ka polysilicon.
● nitride silika (Si₃N₄).
● ka waiho ʻana o ka oxide haʻahaʻa.
ʻO ka maʻamau, hana ma waena o 500°C a me 900°C, pinepine ma lalo o nā pōʻaiapuni kaʻina hana lōʻihi a me nā wahi kemika pane wikiwiki.
I loko o kēia mau ʻōnaehana, hana ka hoe cantilever i kekahi mau hana nui i ka manawa like.
ʻO ka mea mua, hāʻawi ia i ka halihali mīkini paʻa no nā waʻa wafer e komo ana a puka ana i waho o ka ʻōmole umu. No ka mea hiki i nā umu kū pololei o kēia wā ke lawe i nā haneli o nā wafers i kēlā me kēia pūʻulu, ʻoiai ka hoʻololi iki ʻana o ka hoe hiki ke alakaʻi i ka hewa o ka wafer, ka mamao paʻa ʻole, a i ʻole ka hōʻiliʻili ʻana o ke kaumaha mechanical.
ʻO ka lua, he kuleana koʻikoʻi ka hoe i ka like ʻana o ka wela. ʻO ka conductivity wela kiʻekiʻe o SiC e ʻae i ka wela e hoʻolaha like ma ke ʻano o ke kākoʻo, e hoʻemi ana i nā gradients thermal kūloko e hiki ke hoʻopilikia i ka like ʻana o ka waiho ʻana.
ʻO ke kolu, he mea koʻikoʻi ka hana ʻana o nā ʻāpana haʻahaʻa. ʻO nā ʻāpana semiconductor he mau mea pepehi hua pololei, ʻoi aku hoʻi i ka hana logic holomua a me ka semiconductor mana. Ma muli o kona ʻano keramika paʻa a me ke kūpaʻa ikaika i ka pala, hoʻemi nui ka SiC maʻemaʻe kiʻekiʻe i ka pilikia o ka hoʻokahe ʻana o nā ʻāpana i hoʻohālikelike ʻia me nā mea kuʻuna.
Ma nā laina hana LPCVD holomua, pili pololei ka paʻa lōʻihi o ka hoe i ka:
● kūlike o ka mānoanoa o ka ʻili.
● ka hana hou ʻana o ka wafer-a-wafer.
● ka manawa e hana ai ka umu.
He loea ʻo Ningbo VET Energy i ka graphite holomua, nā keramika silicon carbide, a me nā ʻāpana semiconductor i uhi ʻia e CVD i hoʻolālā ʻia no nā wahi hana semiconductor koi.
ʻO nā huahana semiconductor Core e komo pū ana me:
● Hoe Cantilever SiC
● ʻO SiC Coated Graphite Susceptor
● Ka mea lawe wafer i uhi ʻia me SiC
● Nā ʻāpana hapalua mahina i uhi ʻia me SiC
● Nā ipu hoʻoheheʻe hui kalapona-kalapona
● ʻUpena Graphite Palupalu a me ka ʻUpena Graphite Paʻa
Hoʻohana nui ʻia kēia mau huahana i nā mea he nui:
● Nā ʻōnaehana epitaxy
● Nā mea hana LPCVD
● Nā umu hoʻolaha
● Nā ʻōnaehana ulu kristal SiC
● Nā lako hana wela wela kiʻekiʻe.
Me ka ulu wikiwiki ʻana o SiC a me ka hana ʻana o ka semiconductor mana holomua, e hoʻomau ka piʻi ʻana o ke koi no nā ʻāpana umu maʻemaʻe kiʻekiʻe a paʻa hoʻi. Ma kēia ʻano, e noho mau ana ka ʻenehana SiC Cantilever Paddle kekahi o nā mea kumu e kākoʻo ana i ka hana ʻana o ka semiconductor hanauna e hiki mai ana.
Ka manawa hoʻouna: Mei-14-2026