Txawm tias koj tsis tau kawm txog physics lossis lej los xij, koj yeej nkag siab tau, tab sis nws yooj yim dhau thiab haum rau cov neeg pib tshiab. Yog tias koj xav paub ntxiv txog CMOS, koj yuav tsum nyeem cov ntsiab lus ntawm qhov teeb meem no, vim tias tsuas yog tom qab nkag siab txog cov txheej txheem (uas yog, cov txheej txheem tsim khoom ntawm diode) koj thiaj li nkag siab cov ntsiab lus hauv qab no. Tom qab ntawd cia peb kawm txog CMOS no tsim tawm li cas hauv lub tuam txhab tsim khoom hauv qhov teeb meem no (piv txwv li cov txheej txheem tsis yog qib siab, CMOS ntawm cov txheej txheem siab dua yog txawv hauv cov qauv thiab cov ntsiab cai tsim khoom).
Ua ntej tshaj plaws, koj yuav tsum paub tias cov wafers uas lub chaw tsim khoom tau txais los ntawm tus neeg muag khoom (silicon wafertus neeg muag khoom) yog ib qho los ntawm ib qho, nrog lub vojvoog ntawm 200 hli (8-ntiHoobkas) lossis 300 hli (12-ntiHoobkas). Raws li pom hauv daim duab hauv qab no, nws zoo ib yam li lub ncuav mog qab zib loj, uas peb hu ua lub substrate.
Txawm li cas los xij, nws tsis yooj yim rau peb saib nws li no. Peb saib los ntawm hauv qab mus rau saum toj thiab saib ntawm qhov pom ntawm sab nraud, uas dhau los ua daim duab hauv qab no.
Tom ntej no, cia peb saib seb tus qauv CMOS zoo li cas. Vim tias cov txheej txheem tiag tiag xav tau ntau txhiab kauj ruam, kuv yuav tham txog cov kauj ruam tseem ceeb ntawm 8-nti wafer yooj yim tshaj plaws ntawm no.
Ua Qhov Dej thiab Txheej Inversion:
Ntawd yog, lub qhov dej raug cog rau hauv lub substrate los ntawm kev cog ion (Ion Implantation, tom qab no hu ua imp). Yog tias koj xav ua NMOS, koj yuav tsum cog P-hom qhov dej. Yog tias koj xav ua PMOS, koj yuav tsum cog N-hom qhov dej. Rau koj qhov yooj yim, cia peb coj NMOS ua piv txwv. Lub tshuab cog ion cog cov ntsiab lus P-hom uas yuav tsum cog rau hauv lub substrate mus rau qhov tob tshwj xeeb, thiab tom qab ntawd ua kom sov lawv ntawm qhov kub siab hauv lub raj cua sov kom ua kom cov ions no ua haujlwm thiab nthuav lawv ib puag ncig. Qhov no ua tiav qhov tsim tawm ntawm lub qhov dej. Qhov no yog qhov nws zoo li tom qab kev tsim khoom tiav.
Tom qab ua lub qhov dej, muaj lwm cov kauj ruam cog ion, lub hom phiaj ntawm qhov no yog los tswj qhov loj ntawm cov channel tam sim no thiab qhov hluav taws xob threshold. Txhua tus tuaj yeem hu nws ua txheej inversion. Yog tias koj xav ua NMOS, txheej inversion yog cog nrog P-hom ions, thiab yog tias koj xav ua PMOS, txheej inversion yog cog nrog N-hom ions. Tom qab cog, nws yog cov qauv hauv qab no.
Muaj ntau yam ntsiab lus ntawm no, xws li lub zog, lub kaum sab xis, qhov concentration ntawm ion thaum lub sijhawm ion implantation, thiab lwm yam, uas tsis suav nrog hauv qhov teeb meem no, thiab kuv ntseeg tias yog tias koj paub cov no, koj yuav tsum yog tus neeg sab hauv, thiab koj yuav tsum muaj txoj hauv kev los kawm lawv.
Kev tsim SiO2:
Silicon dioxide (SiO2, tom qab no hu ua oxide) yuav raug ua tom qab. Hauv cov txheej txheem tsim khoom CMOS, muaj ntau txoj hauv kev los ua oxide. Ntawm no, SiO2 siv nyob rau hauv qab lub rooj vag, thiab nws cov tuab ncaj qha cuam tshuam rau qhov loj ntawm qhov hluav taws xob thiab qhov loj ntawm cov channel tam sim no. Yog li ntawd, feem ntau cov chaw tsim khoom xaiv txoj kev oxidation raj cua sov nrog qhov zoo tshaj plaws, kev tswj hwm tuab tshaj plaws, thiab qhov sib xws zoo tshaj plaws ntawm cov kauj ruam no. Qhov tseeb, nws yooj yim heev, uas yog, hauv lub raj cua sov nrog oxygen, qhov kub siab yog siv los tso cai rau oxygen thiab silicon kom ua rau tshuaj lom neeg los tsim SiO2. Ua li no, ib txheej nyias ntawm SiO2 yog tsim rau ntawm qhov chaw ntawm Si, raws li pom hauv daim duab hauv qab no.
Tau kawg, kuj muaj ntau cov ntaub ntawv tshwj xeeb ntawm no, xws li xav tau pes tsawg degrees, xav tau oxygen ntau npaum li cas, xav tau qhov kub siab ntev npaum li cas, thiab lwm yam. Cov no tsis yog qhov peb tab tom xav txog tam sim no, cov no yog cov tshwj xeeb dhau lawm.
Kev tsim ntawm lub rooj vag kawg Poly:
Tab sis nws tseem tsis tau xaus. SiO2 tsuas yog sib npaug rau ib txoj xov, thiab lub rooj vag tiag tiag (Poly) tseem tsis tau pib. Yog li peb kauj ruam tom ntej yog tso ib txheej ntawm polysilicon rau ntawm SiO2 (polysilicon kuj tseem muaj ib qho silicon, tab sis qhov kev npaj lattice txawv. Tsis txhob nug kuv tias vim li cas lub substrate siv ib qho siv lead ua silicon thiab lub rooj vag siv polysilicon. Muaj ib phau ntawv hu ua Semiconductor Physics. Koj tuaj yeem kawm txog nws. Nws txaj muag ~). Poly kuj yog qhov txuas tseem ceeb heev hauv CMOS, tab sis cov khoom ntawm poly yog Si, thiab nws tsis tuaj yeem tsim los ntawm kev cuam tshuam ncaj qha nrog Si substrate zoo li kev loj hlob SiO2. Qhov no xav tau cov lus dab neeg CVD (Chemical Vapor Deposition), uas yog los cuam tshuam tshuaj lom neeg hauv lub tshuab nqus tsev thiab ua rau cov khoom tsim tawm ntawm wafer. Hauv qhov piv txwv no, cov khoom tsim tawm yog polysilicon, thiab tom qab ntawd ua rau ntawm wafer (ntawm no kuv yuav tsum hais tias poly yog tsim tawm hauv lub raj cua sov los ntawm CVD, yog li tiam ntawm poly tsis ua los ntawm lub tshuab CVD ntshiab).
Tab sis cov polysilicon tsim los ntawm txoj kev no yuav raug precipitated rau ntawm tag nrho cov wafer, thiab nws zoo li qhov no tom qab nag lossis daus.
Kev raug ntawm Poly thiab SiO2:
Ntawm kauj ruam no, cov qauv ntsug uas peb xav tau tau tsim tiag tiag, nrog poly rau sab saum toj, SiO2 rau hauv qab, thiab lub substrate rau hauv qab. Tab sis tam sim no tag nrho cov wafer zoo li no, thiab peb tsuas yog xav tau ib qho chaw tshwj xeeb los ua cov qauv "faucet". Yog li muaj cov kauj ruam tseem ceeb tshaj plaws hauv tag nrho cov txheej txheem - kev raug.
Peb xub nthuav ib txheej ntawm photoresist rau ntawm qhov chaw ntawm lub wafer, thiab nws ua zoo li no.
Tom qab ntawd muab lub npog ntsej muag uas tau txhais tseg (tus qauv hluav taws xob tau txhais tseg rau ntawm lub npog ntsej muag) rau nws, thiab thaum kawg irradiate nws nrog lub teeb ntawm qhov wavelength tshwj xeeb. Lub photoresist yuav ua haujlwm hauv thaj chaw irradiated. Vim tias thaj chaw thaiv los ntawm lub npog ntsej muag tsis ci ntsa iab los ntawm lub teeb ci, daim photoresist no tsis raug qhib.
Vim tias cov photoresist uas tau qhib lawm yooj yim heev rau ntxuav los ntawm cov kua tshuaj tshwj xeeb, thaum cov photoresist uas tsis tau qhib lawm tsis tuaj yeem ntxuav tau, tom qab irradiation, cov kua tshwj xeeb yog siv los ntxuav cov photoresist uas tau qhib lawm, thiab thaum kawg nws dhau los ua qhov no, tawm hauv cov photoresist qhov twg Poly thiab SiO2 yuav tsum khaws cia, thiab tshem tawm cov photoresist qhov twg nws tsis tas yuav khaws cia.
Lub sijhawm tshaj tawm: Lub Yim Hli-23-2024