Ahakoa kāore anō kia ako i te ahupūngao, i te pāngarau rānei, ka taea e koe te mārama ki tēnei mea, engari he tino māmā rawa, ā, he pai mō te hunga tīmata. Ki te hiahia koe ki te mōhio atu mō te CMOS, me pānui e koe ngā kōrero o tēnei putanga, nā te mea i muri i te mārama ki te rere o te tukanga (arā, te tukanga whakaputa o te diode) ka taea e koe te mārama tonu ki ngā kōrero e whai ake nei. Kātahi ka ako tātou mō te hanga o tēnei CMOS i roto i te kamupene whakarewa i tēnei putanga (hei tauira, he rerekē te hanganga me te kaupapa whakaputa o te CMOS o te tukanga matatau).
Tuatahi, me mōhio koe ko ngā wafers e whiwhihia ana e te whare hanga whakarewa mai i te kaiwhakarato (anga siliconkaiwhakarato) he takitahi, me te radius o te 200mm (8-inihiwheketere) 300mm rānei (12-inihi(wheketere). E ai ki te pikitia i raro nei, he rite tonu ki tētahi keke nui, e kiia nei e tātou he papa.
Heoi, kāore e pai kia tirohia pēnei. Ka titiro tātou mai i raro ki runga, ka titiro ki te tirohanga whakawhiti-wāhanga, ka puta ko te ahua e whai ake nei.
Muri iho, me titiro tātou ki te āhua o te tauira CMOS. Nā te mea e hiahiatia ana he mano tini ngā hikoinga mō te tukanga tuturu, ka kōrero ahau mō ngā hikoinga matua o te wafer 8-inihi māmā rawa atu i konei.
Te Hanga Puna me te Papa Hurihuri:
Arā, ka whakatōkia te puna ki roto i te papa mā te whakatō katote (Whakatō Katote, e kiia nei i muri nei ko te imp). Ki te hiahia koe ki te hanga NMOS, me whakatō koe i ngā puna momo-P. Ki te hiahia koe ki te hanga PMOS, me whakatō koe i ngā puna momo-N. Hei whakangāwari i a koe, me tango te NMOS hei tauira. Ka whakatō te mīhini whakatō katote i ngā huānga momo-P hei whakatō ki roto i te papa ki tētahi hohonutanga motuhake, kātahi ka whakamahana i a rātou ki te pāmahana teitei i roto i te ngongo oumu hei whakahohe i ēnei katote me te horapa haere. Mā tēnei ka oti te hanga o te puna. Koinei te āhua i muri i te otinga o te hanga.
I muri i te hanganga o te puna, kei reira ētahi atu mahi whakato katote, ko te kaupapa he whakahaere i te rahi o te iahiko o te awa me te ngaohiko paepae. Ka taea e te katoa te kī ko te paparanga hurihanga. Ki te hiahia koe ki te hanga NMOS, ka whakatohia te paparanga hurihanga ki ngā katote momo-P, ā, ki te hiahia koe ki te hanga PMOS, ka whakatohia te paparanga hurihanga ki ngā katote momo-N. I muri i te whakato, ko te tauira e whai ake nei.
He maha ngā kōrero kei konei, pērā i te pūngao, te koki, te kukū o te katote i te wā e whakatōngia ana te katote, me ētahi atu, kāore i roto i tēnei putanga, ā, ki taku whakaaro, ki te mōhio koe ki aua mea, me noho koe hei tangata o roto, ā, me whai huarahi koe ki te ako i aua mea.
Te hanga SiO2:
Ka hangaia te hauhā silicon (SiO2, e kiia nei i muri nei ko te waikura) ā muri ake nei. I roto i te tukanga whakaputa CMOS, he maha ngā huarahi hei hanga waikura. I konei, ka whakamahia te SiO2 i raro i te kuaha, ā, ko tōna matotoru ka pā tika ki te rahi o te ngaohiko paepae me te rahi o te ia o te awa. Nō reira, ko te nuinga o ngā whare hanga whakarewa e whiriwhiri ana i te tikanga waikura ngongo oumu me te kounga teitei, te whakahaere matotoru tino tika, me te ōritetanga pai rawa atu i tēnei taahiraa. Inaa, he tino māmā noa iho, arā, i roto i te ngongo oumu me te hāora, ka whakamahia te pāmahana teitei hei tuku i te hāora me te silicon kia tauhohe matū ki te whakaputa SiO2. Mā tēnei ara, ka hangaia he paparanga angiangi o te SiO2 ki runga i te mata o te Si, e whakaaturia ana i te pikitia i raro nei.
He pono, he nui hoki ngā kōrero motuhake kei konei, pērā i te maha o ngā nekehanga e hiahiatia ana, te nui o te kukū o te hāora e hiahiatia ana, te roa o te pāmahana tiketike e hiahiatia ana, me ētahi atu. Ehara ēnei i te mea e whakaarohia ana e mātou ināianei, he tino motuhake rawa ēnā.
Te hanganga o te pito kuaha o te Poly:
Engari kāore anō kia mutu. He rite tonu te SiO2 ki te miro, ā, kāore anō kia tīmata te kuaha tūturu (Poly). Nō reira, ko tā tātou mahi e whai ake nei ko te whakatakoto i tētahi paparanga o te polysilicon ki runga i te SiO2 (he mea hanga hoki te polysilicon i tētahi huānga silicon kotahi, engari he rerekē te whakaritenga whatunga. Kaua e pātai mai he aha te take e whakamahia ai e te papa te silicon tioata kotahi, ā, e whakamahia ana e te kuaha te polysilicon. He pukapuka kei reira ko te Semiconductor Physics. Ka taea e koe te ako mōna. He whakama~). He hononga tino nui hoki te Poly i roto i te CMOS, engari ko te wāhanga o te poly ko Si, ā, kāore e taea te whakaputa mā te tauhohenga tika ki te papa Si pērā i te whakatipu SiO2. Me whai i te CVD rongonui (Chemical Vapor Deposition), arā, ko te tauhohenga matū i roto i te korehau me te whakapūtā i te mea i hangaia ki runga i te wafer. I roto i tēnei tauira, ko te matū i hangaia ko te polysilicon, kātahi ka whakapūtā ki runga i te wafer (i konei me kī atu ahau ka hangaia te poly i roto i te ngongo oumu e te CVD, nō reira kāore te whakaputanga o te poly e mahia e tētahi mīhini CVD parakore).
Engari ko te polysilicon i hangaia mā tēnei tikanga ka whakapūpūtia ki runga i te papa katoa, ā, koinei te āhua i muri i te whakapūpūtanga.
Te Whakapuakanga o te Poly me te SiO2:
I tēnei taahiraa, kua oti te hanganga poutū e hiahiatia ana e tātou, me te poly i runga, te SiO2 i raro, me te papa i raro. Engari inaianei kua rite te wafer katoa ki tēnei, ā, me whai tūranga motuhake noa iho tātou hei hanganga "pūwero". Nō reira, koinei te taahiraa tino nui o te tukanga katoa - te whakaaturanga.
Tuatahi ka horahia e mātou he paparanga o te ārai-ata ki runga i te mata o te papa angiangi, ā, ka pēnei te āhua.
Kātahi ka whakatakotoria te kopare kua tautuhia (kua tautuhia te tauira ara iahiko ki runga i te kopare), ā, hei whakamutunga, whakamāramahia ki te mārama o tētahi roangaru motuhake. Ka whakahohehia te ātete whakaahua i roto i te wāhi kua whakamāramahia. Nā te mea kāore te wāhi kua āraia e te kopare e whakamāramahia ana e te pūtake mārama, kāore tēnei wāhanga ātete whakaahua e whakahohehia.
I te mea he tino ngāwari te horoi atu i te ātete-whakahohe kua whakahohehia e tētahi wai matū motuhake, engari kāore e taea te horoi atu i te ātete-whakahohe kāore i whakahohehia, i muri i te whakamātaotanga, ka whakamahia he wai motuhake hei horoi atu i te ātete-whakahohe kua whakahohehia, ā, ka pēnei te āhua, ka waiho te ātete-whakahohe ki te wāhi e tika ana kia puritia te Poly me te SiO2, ā, ka tangohia te ātete-whakahohe ki te wāhi kāore e tika ana kia puritia.
Wā tuku: 23 o Ākuhata-2024