Raws li kev tsim khoom semiconductor hloov zuj zus mus rau cov khoom siv me me, cov wafer throughput siab dua, thiab cov qauv tswj kev ua qias tuaj ntau ntxiv, cov khoom siv ua thermal processing tab tom ntsib cov teeb meem engineering uas tsis tau muaj dua. Cov txheej txheem xws li LPCVD, thermal oxidation, dopant diffusion, thiab high-temperature annealing tam sim no tsis yog tsuas yog xav tau qhov kub thiab txias sib xws, tab sis kuj tseem siv sijhawm ntev dua rau cov khoom siv, txo qis kev tsim khoom me me, thiab txhim kho cov txheej txheem rov ua dua.
Txawm hais tias feem ntau tsis quav ntsej piv rau cov pa roj ua haujlwm, cov raj cua sov, lossis cov tshuaj lom neeg tso tawm, lub cantilever paddle tseem ceeb txiav txim siab seb cov wafers ua li cas hauv qhov chaw kub siab. Hauv ntau lub fabs siab heev, nws tsis suav tias yog ib qho khoom siv yooj yim, tab sis yog cov khoom siv tseem ceeb rau kev ua cov semiconductor ruaj khov thiab rov ua dua.
SiC Cantilever Paddle yog dab tsi?
Ib lub SiC Cantilever Paddle yog ib qho khoom siv silicon carbide uas muaj cov khoom siv siab heev uas siv feem ntau hauv cov cub tawg semiconductor diffusion furnaces thiab LPCVD systems. Nws feem ntau yog tsim los ua ib lub qauv cantilever beam ntev uas muaj peev xwm txhawb nqa quartz lossis SiC wafer boats thaum lub sijhawm ua haujlwm kub siab.
Feem ntau, cov khoom no yog tsim los ntawm kev siv:
● cov silicon carbide uas tau rov ua dua tshiab (RSiC)
● Cov tshuaj lom neeg uas tso cov silicon carbide (CVD SiC)
● Cov ntaub ntawv SiC uas muaj cov khoom sib txuas ua ke nrog cov tshuaj tiv thaiv siab
Raws li cov ntaub ntawv khoom siv uas CoorsTek thiab Saint-Gobain Performance Ceramics luam tawm, cov ntaub ntawv SiC uas muaj kev ntshiab siab feem ntau qhia txog:
● Kev ua kom sov: kwv yees li 120–200 W/m·K ntawm qhov kub thiab txias hauv chav tsev
● Qhov kub siab tshaj plaws ua haujlwm hauv huab cua inert: siab tshaj 1600°C.
● Tus nqi ntawm kev nthuav dav thermal (CTE): kwv yees li 4.0–4.5 × 10⁻⁶/K.
● Tiv taus HCl, NH₃, O₂, thiab cov tshuaj chlorine zoo heev.
Lub Luag Haujlwm ntawm SiC Cantilever Paddle hauv LPCVD Processing
Ntawm txhua daim ntawv thov, LPCVD systems sawv cev rau ib qho ntawm cov ntaub ntawv siv tseem ceeb tshaj plaws rau SiC Cantilever Paddles.
Cov txheej txheem xws li:
● kev tso tawm polysilicon.
● silicon nitride (Si₃N₄).
● qhov tso pa oxide qis.
Feem ntau ua haujlwm ntawm 500 ° C thiab 900 ° C, feem ntau nyob rau hauv cov txheej txheem ntev thiab cov chaw muaj tshuaj lom neeg heev.
Hauv cov kab ke no, lub cantilever paddle ua ntau yam haujlwm tseem ceeb tib lub sijhawm.
Ua ntej, nws muab kev thauj mus los ruaj khov rau cov nkoj wafer nkag thiab tawm hauv lub raj cua sov. Vim tias cov cua sov ntsug niaj hnub no tuaj yeem nqa ntau pua lub wafers ib pawg, txawm tias me ntsis deformation paddle tuaj yeem ua rau wafer tsis sib xws, qhov chaw tsis ruaj khov, lossis kev ntxhov siab ntawm lub tshuab.
Qhov thib ob, lub paddle ua lub luag haujlwm tseem ceeb hauv kev sib npaug ntawm thermal. SiC qhov kev ua tau zoo ntawm thermal ua rau cua sov faib tau sib npaug ntawm cov qauv txhawb nqa, txo cov kev hloov pauv thermal hauv zos uas yuav cuam tshuam rau kev sib npaug ntawm cov khoom tso tawm.
Qhov thib peb, kev tsim cov khoom me me yog qhov tseem ceeb. Cov khoom me me ntawm semiconductor yog cov neeg tua cov khoom ncaj qha, tshwj xeeb tshaj yog hauv kev tsim cov logic thiab lub zog semiconductor. Vim nws cov qauv ceramic ntom ntom thiab muaj zog tiv taus corrosion, SiC siab-purity txo qhov kev pheej hmoo ntawm cov khoom me me poob piv rau cov khoom siv ib txwm muaj.
Hauv cov kab ntau lawm LPCVD siab heev, qhov ruaj khov ntev ntawm lub paddle cuam tshuam ncaj qha rau:
● zaj duab xis tuab sib xws.
● wafer-rau-wafer repeatability.
● lub sijhawm ua haujlwm ntawm lub cub tawg.
Ningbo VET Zog tshwj xeeb hauv kev tsim cov graphite, silicon carbide ceramics, thiab CVD-coated semiconductor Cheebtsam tsim rau cov chaw tsim khoom semiconductor uas xav tau kev kub ntxhov.
Cov khoom lag luam semiconductor Core muaj xws li:
● SiC Cantilever Paddle
● SiC Coated Graphite Susceptor
● SiC Coated Wafer Carrier
● Cov Cheebtsam Ib Nrab Hli Uas Muaj SiC Txheej
● Cov Crucibles Uas Muaj Carbon-Carbon Composite
● Cov Khoom Siv Graphite Mos & Cov Khoom Siv Graphite Rigid
Cov khoom no siv dav hauv:
● Cov txheej txheem Epitax
● Cov reactors LPCVD
● Cov cub tawg sib kis
● Cov txheej txheem loj hlob ntawm SiC siv lead ua
● Cov khoom siv ua kom sov kub heev.
Nrog rau kev loj hlob sai ntawm SiC thiab kev tsim khoom siv hluav taws xob semiconductor siab heev, qhov kev thov rau cov khoom siv hluav taws xob uas muaj qhov huv siab, ruaj khov siab yuav txuas ntxiv mus ntxiv. Hauv cov ntsiab lus no, thev naus laus zis SiC Cantilever Paddle yuav tseem yog ib qho ntawm cov hauv paus tseem ceeb uas txhawb nqa kev ua cov txheej txheem semiconductor tiam tom ntej.
Lub sijhawm tshaj tawm: Tsib Hlis-14-2026