Wafer epitaxial growth is achieved through the metal organic chemical vapor deposition (MOCVD) technology, in which ultra-pure gases are injected into the reactor and finely metered, so that they c...
Application status of traditional energy:
1. The contradiction between supply and demand is becoming increasingly acute
2. Serious environmental pollution
3. Security issues
Proton Exchange ...
1. Acknowledgement before cleaning
1) When the PECVD graphite boat/carrier is used more than 100 to 150 times, the operator needs to check the coating condition in time. If there is an abnormal coa...
Seven European countries, led by Germany, submitted a written request to the European Commission to reject the EU’s green transport transition goals, reigniting a debate with France over nucl...
Method for making graphite bearing seal
Technical areas
[0001] our campany relates to a graphite bearing seal, in particular to a graphite bearing seal making method.
Background technology
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SiC coated graphite bases are commonly used to support and heat single crystal substrates in metal-organic chemical vapor deposition (MOCVD) equipment. The thermal stability, thermal uniformity and...