Manufacturer ofMOCVD Wafer Carriers - MOCVD Graphite Boat – VET Energy Detail:
SiC coating of Graphite substrate for Semiconductor applications produces a part with superior purity and resistance to oxidizing atmosphere.
CVD SiC or CVI SiC is applied to Graphite of simple or complex design parts. Coating can be applied in varying thicknesses and to very large parts.
Features:
· Excellent Thermal Shock Resistance
· Excellent Physical Shock Resistance
· Excellent Chemical Resistance
· Super High Purity
· Availability in Complex Shape
· Usable under Oxidizing Atmosphere
Typical Properties of Base Graphite Material:
| Apparent Density: | 1.85 g/cm3 |
| Electrical Resistivity: | 11 μΩm |
| Flexural Strenth: | 49 MPa (500kgf/cm2) |
| Shore Hardness: | 58 |
| Ash: | <5ppm |
| Thermal Conductivity: | 116 W/mK (100 kcal/mhr-℃) |
Product detail pictures:
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Manufacturer ofMOCVD Wafer Carriers - MOCVD Graphite Boat – VET Energy, The product will supply to all over the world, such as: , , ,
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