Manufacturer ofMOCVD Wafer Carriers - MOCVD Graphite Boat – VET Energy

SiC coating of Graphite substrate for Semiconductor applications produces a part with superior purity and resistance to oxidizing atmosphere.

         CVD SiC or CVI SiC is applied to Graphite of simple or complex design parts. Coating can be applied in varying thicknesses and to very large parts.

Features: 

·  Excellent Thermal Shock Resistance

·  Excellent Physical Shock Resistance

·  Excellent Chemical Resistance

·  Super High Purity

·  Availability in Complex Shape

·  Usable under Oxidizing Atmosphere

Typical Properties of Base Graphite Material: