CVDPaninga SiCKei te huri anō i ngā rohe o ngā tukanga hanga haurua-waenga i te tere whakamiharo. Kua noho tēnei hangarau paninga ngāwari hei otinga matua ki ngā wero matua e toru o te poke matūriki, te waikura pāmahana teitei me te horo o te plasma i roto i te hanga maramara. Kua whakarārangihia e ngā kaihanga taputapu haurua-waenga matua o te ao hei hangarau paerewa mō ngā taputapu o te whakatupuranga e whai ake nei. Nā, he aha te mea e waiho ai tēnei paninga hei "pūeru huna" o te hanga maramara? Ka tātarihia hohonutia e tēnei tuhinga ōna mātāpono hangarau, āna tono matua me ngā putanga hou.
Ⅰ. Te whakamāramatanga o te paninga CVD SiC
Ko te paninga CVD SiC e pā ana ki tētahi paparanga tiaki o te silicon carbide (SiC) kua whakatakotoria ki runga i tētahi papa mā te tukanga whakatakoto kohu matū (CVD). Ko te silicon carbide he matū o te silicon me te waro, e mōhiotia ana mō tōna pakeketanga pai, tōna kawe wera nui, tōna koretake matū me tōna ātete pāmahana teitei. Ka taea e te hangarau CVD te hanga i tētahi paparanga SiC matotoru teitei, kiato me te ōrite, ā, ka taea te tino rite ki ngā āhuahanga uaua. Nā tēnei ka tino pai ngā paninga CVD SiC mō ngā tono uaua kāore e taea te whakatutuki e ngā rauemi papatipu tuku iho, e ētahi atu tikanga paninga rānei.
II. Te kaupapa o te tukanga CVD
He tikanga hanga maha ngā whakamahinga o te matū kohu (CVD) hei whakaputa rauemi totoka kounga teitei, whai hua hoki. Ko te kaupapa matua o te CVD ko te tauhohenga o ngā matū hau i runga i te mata o te papa wera hei hanga i tētahi paninga totoka.
Anei tētahi whakamāramatanga māmā o te tukanga SiC CVD:
Te hoahoa mātāpono o te tukanga CVD
1. Te whakaurunga o te muaKa whakaurua ki roto i te rūma tauhohenga ngā matū hau, arā, ko ngā hau kei roto te silicon (hei tauira, te methyltrichlorosilane – MTS, te silane rānei – SiH₄) me ngā hau kei roto te waro (hei tauira, te propane – C₃H₈).
2. Tukunga hauKa rere ēnei hau matūmua ki runga i te papa wera.
3. Te mimitiKa piri ngā ngota matū mua ki te mata o te papa wera.
4. Tauhohenga mataI ngā pāmahana tiketike, ka pāngia ngā ngota ngota e mimitihia ana e ngā tauhohenga matū, ka hua ake te pirau o te matū mua me te hanganga o tētahi kiriata SiC totoka. Ka tukuna ngā hua taha i te āhua o ngā hau.
5. Te mimiti me te putangaKa mimiti ngā hua hau mai i te mata, kātahi ka puta mai i te rūma. He mea nui te whakahaere tika i te pāmahana, te pēhanga, te tere rere o te hau me te kukū o mua ki te whakatutuki i ngā āhuatanga kiriata e hiahiatia ana, tae atu ki te matotoru, te parakore, te tioata me te piri.
Ⅲ. Ngā Whakamahinga o ngā Paninga CVD SiC i roto i ngā Tukanga Ārahi-Haumaru
He mea nui ngā paninga CVD SiC i roto i te hanga haurua-haurua nā te mea ko ō rātou āhuatanga ahurei ka tutuki tika i ngā āhuatanga tino kino me ngā whakaritenga parakore pakari o te taiao hanga. Ka whakarei ake i te ātete ki te waikura plasma, te whakaeke matū, me te whakaputa matūriki, he mea nui katoa ēnei hei whakanui ake i te hua o te wafer me te wā mahi o ngā taputapu.
Ko ngā mea e whai ake nei ko ētahi wāhanga kua pania ki te CVD SiC me ō rātou āhuatanga tono:
1. Rūma Whakairo Plasma me te Mowhiti Arotahi
Ngā HuaNgā arai, ngā pane kaukau, ngā ārai wai, me ngā mowhiti arotahi kua pania ki te CVD SiC.
TonoI roto i te whakairo plasma, ka whakamahia te plasma tino kaha hei tango i ngā rauemi mai i ngā papa. Ka tere te pirau o ngā rauemi kāore i pania, kāore rānei i te tino pakari, ka hua ake he poke matūriki me te wā kore mahi. He tino ātete ngā paninga CVD SiC ki ngā matū plasma kaha (hei tauira, te fluorine, te chlorine, te bromine plasma), ka roa ake te ora o ngā wāhanga matua o te rūma, ka whakaiti i te whakaputanga matūriki, ka piki ake te hua o te papa.
2. Ngā rūma PECVD me HDPCVD
Ngā Hua: Ngā rūma tauhohenga me ngā irahiko kua pania ki te CVD SiC.
Ngā tonoKo te whakatakotoranga matū whakamahana plasma (PECVD) me te CVD plasma kiato teitei (HDPCVD) e whakamahia ana hei whakatakotoranga i ngā kiriata angiangi (hei tauira, ngā paparanga dielectric, ngā paparanga passivation). Kei roto hoki i ēnei tukanga he taiao plasma kino. Ka tiakina e ngā paninga CVD SiC ngā pakitara rūma me ngā irahiko mai i te horo, ka whakarite i te kounga kiriata pumau me te whakaiti i ngā hapa.
3. Ngā taputapu whakatō katote
Ngā HuaNgā wāhanga raina hihi kua pania ki te CVD SiC (hei tauira, ngā pūaha, ngā kapu Faraday).
Ngā tonoMā te whakaurunga katote ka whakaurua ngā katote tāpiri ki roto i ngā papa haurua-ira. Ka taea e ngā hihi katote kaha-teitei te whakararuraru me te memeha o ngā wāhanga e kitea ana. Ka whakaitihia e te pakeketanga me te parakore teitei o te CVD SiC te whakaputa matūriki mai i ngā wāhanga raina hihi, ka ārai i te poke o ngā papa i tēnei taahiraa tāpiri nui.
4. Ngā wāhanga o te tauhohenga epitaxial
Ngā HuaNgā pūwero me ngā kaituku hau kua pania ki te CVD SiC.
Ngā tonoKo te tipu epitaxial (EPI) ko te whakatipu i ngā paparanga tioata tino raupapa i runga i te papa i ngā pāmahana teitei. Ka tukuna e ngā whakapūmau kua pania ki te CVD SiC te pumau wera me te koretake matū i ngā pāmahana teitei, e whakarite ana i te wera ōrite me te aukati i te poke o te whakapūmau tonu, he mea nui ki te whakatutuki i ngā paparanga epitaxial kounga teitei.
I te mea kei te whakaitihia ngā āhuahanga maramara, ā, kei te kaha haere te tono mō ngā tukanga, kei te tipu haere tonu te tono mō ngā kaiwhakarato paninga CVD SiC kounga teitei me ngā kaihanga paninga CVD.
IV. He aha ngā wero o te tukanga paninga CVD SiC?
Ahakoa ngā painga nui o te paninga CVD SiC, kei te raru tonu te hanga me te whakamahinga o ēnei mea. Ko te whakaoti i ēnei wero te mea nui ki te whakatutuki i te mahi pumau me te whai hua o te utu.
Ngā Wero:
1. Te piri ki te papa
He uaua pea te piri kaha me te ōrite o te SiC ki ngā rauemi papa rerekē (hei tauira, te karāpeti, te silicon, te uku) nā te rerekētanga o ngā tauwehenga whānui wera me te kaha o te mata. Mā te piri ngoikore ka taea te wehewehe i te wā o te huringa wera, te ahotea miihini rānei.
Ngā otinga:
Te whakarite mataTe horoi me te maimoatanga mata (hei tauira, te whakairo, te maimoatanga plasma) o te papa hei tango i ngā poke me te hanga i tētahi mata tino pai mō te piri.
Paparanga-ā-rotoWhakatakotoria he paparanga angiangi, he paparanga ārai rānei kua whakaritea (hei tauira, te waro pyrolytic, TaC – he rite ki te paninga CVD TaC i roto i ngā tono motuhake) hei whakaiti i te koretake o te horapa wera me te whakatairanga i te piri.
Arotauhia ngā tawhā whakatakotoĀta whakahaeretia te pāmahana, te pēhanga, me te ōwehenga hau hei whakapai ake i te hanganga me te tipu o ngā kiriata SiC me te whakatairanga i te hononga ā-kanohi kaha.
2. Te ahotea me te pakaru o te kiriata
I te wā whakatakotoranga, i te wā whakamatao rānei i muri mai, ka puta pea ngā ahotea toenga i roto i ngā kiriata SiC, ka puta ai te ngatata, te piko rānei, inā koa i ngā āhuahanga nui ake, uaua rānei.
Ngā otinga:
Whakahaere PāmahanaTe whakahaere tika i te tere o te whakamahana me te whakamatao hei whakaiti i te ru wera me te ahotea.
Paninga RōrahiWhakamahia ngā tikanga paninga maha-apa, paninga rōnaki rānei hei whakarerekē haere i te hanganga, i te hanganga rānei o ngā rauemi kia urutau ai te ahotea.
Te Whakamahana i Muri i te WhakatakotorangaWhakamahanahia ngā wāhanga kua pania hei whakakore i te ahotea toenga me te whakapai ake i te kounga o te kiriata.
3. Te Āhuatanga me te Whakaōrite i ngā Āhuatanga Matatini
He uaua pea te whakatakoto i ngā paninga matotoru, ōrite te āhua ki runga i ngā wāhanga he uaua ngā āhua, he teitei ngā ōwehenga āhua, he hongere ā-roto rānei nā te iti o te horapa o te matū mua me te tere o te tauhohenga.
Ngā otinga:
Arotautanga Hoahoa TauhohengaHoahoahia ngā tauhohenga CVD me ngā nekehanga rere hau kua arotauhia me te ōritetanga o te pāmahana hei whakarite i te tohatoha ōrite o ngā matūmua.
Te Whakarerekētanga Tawhā TukangaWhakarerekētia te pēhanga whakatakotoranga, te tere rere, me te kukū o te matū mua hei whakarei ake i te horapa o te hau ki roto i ngā āhuatanga matatini.
Te whakatakoto i ngā wāhanga mahaWhakamahia ngā kaupae whakatakotoranga tonu, ngā taputapu hurihuri rānei hei whakarite kia pania pai ngā mata katoa.
V. Ngā Pātai Auau
P1: He aha te rerekētanga matua i waenga i te CVD SiC me te PVD SiC i roto i ngā tono haurua-ira?
A: Ko ngā paninga CVD he hanganga karaihe poutū me te parakore o >99.99%, e tika ana mō ngā taiao plasma; ko ngā paninga PVD he amorphous/nanocrystalline te nuinga me te parakore o <99.9%, e whakamahia ana mō ngā paninga whakapaipai.
Q2: He aha te pāmahana mōrahi ka taea e te paninga te tu atu?
A: Ko te manawanui poto ki te 1650°C (pēnei i te tukanga whakamahana), ko te rohe whakamahinga roa ki te 1450°C, ka nui ake i tēnei pāmahana ka puta he whakawhiti wāhanga mai i te β-SiC ki te α-SiC.
Q3: Te whānuitanga matotoru o te paninga?
A: Ko te nuinga o ngā wāhanga hiko haurua he 80-150μm, ā, ka taea e ngā paninga EBC o te miihini rererangi te tae ki te 300-500μm.
P4: He aha ngā āhuatanga matua e pā ana ki te utu?
A: Te parakore o te matū whakatō (40%), te whakapaunga pūngao o ngā taputapu (30%), te ngaronga hua (20%). Ka eke te utu mō ia paninga kounga teitei ki te $5,000/kg.
Q5: Ko wai ngā kaiwhakarato matua o te ao?
A: Ūropi me te Hononga o Amerika: CoorsTek, Mersen, Ionbond; Āhia: Semixlab, Veteksemicon, Kallex (Taiwan), Scientech (Taiwan)
Wā tuku: Pipiri-09-2025