Ngā Wāhanga Kua Pania ki te CVD SiC mō te Silicon Epitaxy (Si Epi)
He mea hanga tika mō ngā pūnaha whakatakoto Silicon Epitaxial kotahi-wafer me te puranga, ka tukuna e ā mātou whakapūmau kua pania ki te CVD SiC, ngā kōpae amiorangi, me ngā wāhanga papa wera he ōritetanga wera tino pai, ā, kāore he hau e puta. Ka kapi katoa te paparanga paninga β-SiC pūtoru matotoru-teitei i te papa graphite parakore-teitei, ka ārai i te keri hau tauhohe (SiH₄, SiH₂Cl₂, HCl) me te whakarite i ngā taumata poke whakarewa tino iti (< 5 ppm) i te wā tukatuka Si Epi pāmahana-tiketike (1000°C - 1200°C).
Mā te kaha whakaputa e whakahaeretia ana ka whakarite kia tino rite te matotoru o te kiriata wafer mai i te taha ki te pokapū.
He tino kaha te tiaki i ngā matū horoi rūma o roto me ngā ru wera.
He mīhini CNC tino tika i hangaia kia uru ki ngā taputapu Epi angiangi kotahi 200mm/300mm matua (Applied Materials, ASM).
| Tawhā Hangarau | Uara Whakatakotoranga | Tikanga Paerewa / Whakamātautau |
|---|---|---|
| Rauemi Paninga | CVD β-SiC (Wāhanga Pūtoru) | Hanganga Tioata Matotoru-Teitei |
| Rauemi Papa | Karāwhite Isostatic Tino-Parakore | Kiato: 1.82 - 1.88 karamu/cm³ |
| Te Parakore o te Matū | Ngā poke katoa < 5 ppm | Kua Whakamātauria te GDMS |
| Matotoru o te paninga | 80 µm - 150 µm | Te ōritetanga ≤ ±5% |
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