He tino teitei ngā whakaritenga mō ngā rauemi karāhe i roto i te umanga haurua-whakahaere, ā, he nui te tika o te rahi o te matūriki pai o te karāhe, he ātete pāmahana teitei, he kaha teitei, he iti te mate, me ētahi atu painga, pērā i te: pokepokea ai ngā hua karāhe kua whakatōngia.Nā te mea me tu atu ngā taputapu karāpeti e whakamahia ana i roto i te umanga haurua-ira (tae atu ki ngā whakamahana me ā rātou mate whakakā) i ngā tukanga whakamahana me te whakamatao auau, kia roa ake ai te ora o ngā taputapu karāpeti, me whai mahi pumau ngā rauemi karāpeti e whakamahia ana, ā, he ātete ki te wera hoki.
01 Ngā taputapu graphite mō te tipu tioata semiconductor
Ko ngā tukanga katoa e whakamahia ana hei whakatipu tioata haurua-waenga ka whakahaerehia i raro i te pāmahana teitei me te taiao waikura. Ko te rohe wera o te oumu whakatipu tioata he mea whakarite ki ngā wāhanga karāti parakore teitei ātete wera me te ātete waikura, pērā i te whakamahana, te oko whakarewa, te rango whakamarumaru, te rango ārahi, te irahiko, te pupuri oko whakarewa, te nati irahiko, me ētahi atu.
Ka taea e mātou te hanga i ngā wāhanga karāhe katoa o ngā taputapu hanga karaihe, ka taea te tuku takitahi, i roto rānei i ngā huinga, i ngā wāhanga karāhe ritenga rānei o ngā rahi rerekē e ai ki ngā hiahia o te kiritaki. Ka taea te ine i te rahi o ngā hua i te papaanga, ā, ka taea te whakaiti i te nui o te pungarehu o ngā hua kua oti.neke atu i te 5ppm
02 Ngā taputapu graphite mō te epitaxy semiconductor
Ko te tukanga epitaxial e pā ana ki te tipu o tētahi paparanga o te rauemi tioata kotahi me te whakaritenga whatunga rite tonu ki te papa i runga i te papa tioata kotahi. I roto i te tukanga epitaxial, ka utaina te wafer ki runga i te kōpae karāhe. He mea nui te mahi me te kounga o te kōpae karāhe ki te kounga o te paparanga epitaxial o te wafer. I roto i te mara o te hanga epitaxial, he nui te karāhe tino parakore me te turanga karāhe tino parakore me te paninga SIC e hiahiatia ana.
He whānuitia ngā whakamahinga o te turanga karāpeti a tā mātou kamupene mō te epitaxy haurua-ira, ka taea te whakarite ki te nuinga o ngā taputapu e whakamahia whānuitia ana i roto i te umanga, ā, he tino parakore, he ōrite te paninga, he roa te ora ratonga, ā, he ātete matū me te pumau wera teitei.
03 Ngā taputapu graphite mō te whakaurunga katote
Ko te whakaurunga katote e pā ana ki te tukanga o te whakatere i te hihi plasma o te boron, te phosphorus me te arsenic ki tētahi pūngao, kātahi ka werohia ki roto i te paparanga mata o te rauemi wafer hei whakarerekē i ngā āhuatanga o te paparanga mata. Me hanga ngā wāhanga o te taputapu whakaurunga katote ki ngā rauemi parakore teitei, he ātete wera pai, he kawe wera, he iti ake te waikura e puta mai ana i te hihi katote me te iti o te poke. Ka tutuki i te karapiti parakore teitei ngā whakaritenga tono, ā, ka taea te whakamahi mō te ngongo rere, ngā momo āputa, ngā irahiko, ngā taupoki irahiko, ngā paipa, ngā whakamutu hihi, me ētahi atu o ngā taputapu whakaurunga katote.
Ehara i te mea ka taea e mātou te whakarato i te hipoki ārai karāpeti mō ngā mīhini whakauru katote, engari ka taea hoki e mātou te whakarato i ngā irahiko karāpeti parakore teitei me ngā pūtake katote he ātete teitei ki te waikura o ngā whakaritenga rerekē. Ngā tauira e tika ana: Eaton, Azcelis, Quatum, Varian, Nissin, AMAT, LAM me ētahi atu taputapu. Hei tāpiri, ka taea hoki e mātou te whakarato i ngā hua uku, tungsten, molybdenum, konumohe me ngā wāhanga paninga e ōrite ana.
04 Ngā rauemi whakamahana graphite me ētahi atu
Ko ngā rauemi whakamahana wera e whakamahia ana i roto i ngā taputapu hanga haurua-waenga ko te huruhuru mārō karāpeti, te huruhuru ngohengohe, te pepa konumohe karāpeti, te pepa karāpeti, me te taura karāpeti.
He karāwhata kawemai ā mātou rauemi mata katoa, ka taea te tapahi kia rite ki te rahi o ngā whakaritenga a te kiritaki, ka taea rānei te hoko katoa.
Ko te paepae waro-waro te mea e whakamahia ana hei kawe mō te paninga kiriata i roto i te tukanga whakaputa o ngā pūtau silicon monocrystalline me ngā pūtau silicon polycrystalline. Ko te mātāpono mahi: whakauruhia te maramara silicon ki roto i te paepae CFC ka tukuna ki roto i te ngongo oumu hei tukatuka i te paninga kiriata.
