Paninga SiC

VET ENERGY, Kaihanga matua o te paninga CVD SIC i Haina

Ngā Rauemi e Huri Ana i te Ao o Muri Mai

He rauemi haurua-whakakotahi hou te Silicon carbide (SiC). He nui te āputa roopu o te Silicon carbide (tata ki te 3 ngā wā o te silicon), he kaha teitei o te mara arohaehae (tata ki te 10 ngā wā o te silicon), he nui te kawe wera (tata ki te 3 ngā wā o te silicon). He rauemi haurua-whakakotahi nui o te whakatipuranga e whai ake nei. He whānuitia te whakamahinga o ngā paninga SiC i roto i te umanga haurua-whakakotahi me te photovoltaics solar. Ina koa, ko ngā suceptors e whakamahia ana i roto i te tipu epitaxial o ngā LED me te epitaxy tioata kotahi Si me whakamahi i te paninga SiC. Nā te pikinga kaha o ngā LED i roto i te umanga rama me te whakaaturanga, me te whanaketanga kaha o te umanga haurua-whakakotahi,Hua paninga SiChe tino pai ngā tūmanakohanga.

MĀRA TONO

Te whakamahinga me te mahi a te hua Ngā tono me ngā whakamahinga o ngā hua

Ahumahi karaihe kotahi Si, GaN, AlN, hapaira me ētahi atu turanga MOCVD. -Panihanga turanga graphite mō te tipu epitaxial silicon karaihe kotahi

Mahi matua: te parakore teitei, te ātete ki te horo, te kawe wera teitei, - tukanga MOCVD, paninga turanga karāhe mō te tipu epitaxial GaN

ātete pāmahana teitei, tauwehenga whakawhānui wera iti.

Ngā pūwero MOCVD

Ngā mea whakapūmau epitaxial silicon monocrystalline

Kōpae whakairo plasma

Ngā hua photovoltaic o te rā

Ahumahi Ārahi-Haumaru

Pūhiko hiko-rā

Te Arahi Wera	250 W/m °K	Tikanga uira taiaho, RT
Te Whakawhanuitanga Wera (CTE)	4.5 x 10^-6°K	Te pāmahana rūma ki te 950 °C, te ine whakawhanui silica
Taonga	Uara	Tikanga
Kiato	3.21 karamu/cc	Totohu-mānu me te rahinga
Te wera motuhake	0.66 J/g °K	Te mura o te laser
Kaha piko	450 MPa560 MPa	Piko pūwāhi 4, piko pūwāhi RT4, 1300°
Te pakari o te whati	2.94 MPa m1/2	Te whakapiko iti
Te pakeketanga	2800	Vicker's, 500g te taumaha
Te Tauwehenga ĀteteTe Tauwehenga a Young	450 GPa430 GPa	Piko 4 pt, piko RT4 pt, 1300 °C
Rahi o te witi	2 - 10 µm	SEM

Te Parakore, te Hanganga SEM, te tātaritanga matotoru oPaninga SiC

Ko te parakore o ngā paninga SiC i runga i te karāpeti mā te whakamahi i te CVD e eke ana ki te 99.9995%. Ko tōna hanganga he fcc. Ko ngā kiriata SiC i pania ki te karāpeti he (111) te aronga e whakaaturia ana i roto i ngā raraunga XRD (Pikitia 1) e tohu ana i tōna kounga tioata teitei. He tino ōrite te matotoru o te kiriata SiC e whakaaturia ana i te Pikitia 2.

Ko ngā raraunga SEM o te kiriata angiangi CVD SiC, ko te rahi o te tioata he 2~1 Opm

Pikitia 2: te matotoru ōrite o ngā kiriata SiC

Ko te hanganga tioata o te kiriata CVD SiC he hanganga pūtoru e anga ana ki te mata, ā, e tata ana te ahunga tipu o te kiriata ki te 100%.

SEM me te XRD o te kiriata beta-SiC i runga i te karāhe

Pūtake Epitaxial Karaihe Kotahi

Te whai huatanga o te hua me ngā tūmanakohanga tono.

Kua pania ki te silicon carbide (SiC)Ko te turanga te turanga pai rawa atu mō te silicon tioata kotahi me te epitaxy GaN, koinei te wāhanga matua o te oumu epitaxy. Ko te turanga he taputapu whakaputa matua mō te silicon tioata kotahi mō ngā ara iahiko whakauru nui. He tino parakore, he ātete pāmahana teitei, he ātete waikura, he pai te piri ki te hau me ētahi atu āhuatanga rauemi tino pai.

Te tono me te whakamahinga o te hua

Paninga turanga graphite mō te tipu epitaxial silicon karaihe kotahiHe pai mō ngā mīhini Aixtron, me ētahi atuMatotoru paninga: 90~150umKo te whānui o te rua wafer he 55mm.

TE WHAKAPŪRANGA O TE RĀ

GAupidpelitcubaetiaonnd

paninga parai karāhemō te silicon karaihe kotahi mā te tikanga kukume-tika

te whakaputa ahumahi silicon karaihe kotahi mā te tikanga kukume-tika,te oko para e toru ngā rauhei wāhanga kawe wera pāmahana teitei me te kawe wera ōrite, ngongo rere hei wāhanga kawe wera hongere hau putanga, ngongo rere hei hongere rere hau putanga

WHAKAMAHANA, PEREITI KARAPITA, KARAPITA RANGI, PEPA KARAPITA MENGĀ WĀHI ĀHUA KĒ ATU

Ngā āhuatanga o te hua

Ka taea e te ātete pāmahana teitei, te ātete waikura, te roa o te ora mahi, te whakapai ake i te kounga me te putanga o te wafer. He iti rawa te tauwehenga o te whakawhānui wera, he ātete pāmahana teitei, he ātete kakahu teitei, he pai te whakamarumaru, he pai te pumau matū, tata ki te papura (whero) te urunga mārama kitea ki waho.

He aha mātou i whiriwhiri ai

Ngā taputapu ngaio me te tīma

Awheawhe kore-puehu Akomanga 1000

*neke atu i te 3000 mita pūrua o te awheawhe kore-puehu akomanga 1000

*Rōpū R&D mahi tahi o te Whare Wānanga Pūtaiao Hainamana

*Ngā taputapu whakaputa motuhake me te whakamātautau tika

*Te kaha whakaputa rawaka me te kounga teitei

Ratonga Tere

Mō te wā o mua i te ota, ka taea e tā mātou tīma hokohoko ngaio te whakautu i tāu patai i roto i te 50-100 meneti i ngā hāora mahi, ā, i roto i te 12 hāora i te wā kati. Mā te whakautu tere me te ngaio koe e āwhina ki te toa i tō kiritaki me te kōwhiringa tino pai me te tino whai hua.

Mō te wā e whakahaerehia ana te ota, ka tangohia e tā mātou tīma ratonga ngaio ngā whakaahua i ia 3 ki te 5 rā hei whakahou i ngā mōhiohio tuatahi mō te hanga, ā, ka tukuna atu hoki ngā tuhinga i roto i ngā haora 36 hei whakahou i te ahunga whakamua o te tuku. Ka aro nui mātou ki te ratonga muri-hoko.

Mō ngā mahi i muri i te hoko, ka noho tata tonu tā mātou tīma ratonga ki a koe, ā, ka tū tonu ki te mahi ki a koe. Kei roto hoki i tā mātou ratonga ngaio i muri i te hoko ko ā mātou miihini hei āwhina i a koe ki te whakaoti rapanga i te wāhi. Ko tā mātou pūtāhui he 12 marama i muri i te tukunga.

Ngā taipitopito mōkihi

He kaihanga ngaio a Ningbo VET Energy Technology Co., Ltd mō ngā wāhanga karāpeti, inā koa te whakawhanake i ngā rauemi haurua-ira hou, me te arotahi ki te rangahau me te whakawhanake i te paninga SiC. Ko ngā hua matua a te kamupene ko ngā ārai paninga SiC mō te ahumahi LED me te ahumahi silicon monocrystalline. Ko te kiriata SiC e whakamahia ana mō te ahumahi LED me te ahumahi silicon monocrystalline he wāhanga pūtoru, he rite te hanganga whatunga ki te taimana, ā, ko tōna pakeke he rite noa ki te taimana. Ko te silicon carbide te rauemi haurua-ira whānui kua tino pakari, ā, he whānui ngā tono i roto i te ahumahi haurua-ira. Hei tāpiri, he nui te kawe wera o te silicon carbide, he iti te tauwehenga whānui wera, he ātete pāmahana teitei (tata ki te 2700 nekehanga Celsius), ā, he tino ātete ki te waikura. E whakamahia whānuitia ana hoki ngā hua paninga silicon carbide a te kamupene i roto i te rererangi, te ahumahi photovoltaic, te pūngao karihi, te tereina tere-rahi, te motuka me ētahi atu ahumahi.

Ngā Pātai Auau

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Ae, he kounga teitei tonu tā mātou whakamahi i ngā takai kaweake. Ka whakamahia hoki e mātou ngā takai mōrearea motuhake mō ngā taonga mōrearea, me ngā kaipuke rokiroki makariri kua whakamanahia mō ngā taonga e pāngia ana e te pāmahana. Tērā pea ka puta he utu tāpiri mō ngā takai motuhake me ngā whakaritenga takai kore-paerewa.

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