SiC coated graphite bases are commonly used to support and heat single crystal substrates in metal-organic chemical vapor deposition (MOCVD) equipment. The thermal stability, thermal uniformity and...
With the gradual mass production of conductive SiC substrates, higher requirements are put forward for the stability and repeatability of the process. In particular, the control of defects, the sma...
A leading market research firm Facts & Factors (FnF) added a research report on “Monocrystalline Silicon Furnace Market By Product Type (Czochralski(CZ) Method Furnace, and Floating Zone(FZ) Me...
Graphite susceptor cracking and corrosion primarily result from thermal stress, chemical reactions with process gases, and material impurities. Preventing these defects involves optimizing material...
What is BCD process?
BCD process is a single-chip integrated process technology first introduced by ST in 1986. This technology can make bipolar, CMOS and DMOS devices on the same chip. Its appea...
How can graphite molds be cleaned?
Generally, when the molding process is completed, dirt or residues (with certain chemical composition and physical properties) are often left on the graphite mold...