Kuleyliyaha Substrate-ka MOCVD, Walxaha Kuleylinta ee MOCVD

Kuleyliyaha Substrate-ka MOCVD, Walxaha Kuleylka ee MOCVD Sawirka La Soo Bandhigay

Sharaxaad Gaaban:

Garaafit Kiimiko ah

Faa'iidada: iska caabin heerkulka sare

Codsiga: MOCVD/Foono vacuum ah/Aagga Kulul

Cufnaanta Badan: 1.68-1.91g/cm3

Xoogga dabacsanaanta: 30-46Mpa

Iska caabin: 7-12μΩm

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Calaamadaha Alaabta

Kuleyliyaha Substrate-ka MOCVD, Walxaha Kuleylinta ee MOCVD

Kuleyliyaha garaafka:
Qaybaha kululeeyaha garaafka waxaa loo isticmaalaa foornada heerkulka sare leh iyadoo heerkulku gaaray 2200 digrii jawiga faakuumka iyo 3000 digrii jawiga gaaska ee la qalajiyey oo la geliyay.
Astaamaha ugu muhiimsan ee kululeeyaha graphite:
1. isku mid ahaanshaha qaab-dhismeedka kuleylinta.
2. Korantada oo si fiican loo isticmaalo iyo culays koronto oo sarreeya.
3. iska caabbinta daxalka.
4. oksaydh la'aan.
5. daahirnimo kiimiko oo sareysa.
6. xoog farsamo oo sare leh.
Faa'iidada waa tamar hufan, qiimo sare iyo dayactir hooseeya.
Waxaan soo saari karnaa ka-hortagga oksaydheynta iyo cimri dheer oo graphite crucible ah, caaryada graphite iyo dhammaan qaybaha kuleyliyaha graphite.
Qiyaasaha ugu muhiimsan ee kululeeyaha graphite:

Qeexitaanka Farsamada	VET-M3
Cufnaanta Badan (g/cm3)	≥1.85
Waxyaabaha Dambaska ah (PPM)	≤500
Adkaanta Xeebta	≥45
Iska caabinta Gaarka ah (μ.Ω.m)	≤12
Xoogga Laab-jeexa (Mpa)	≥40
Xoog Cadaadis ah (Mpa)	≥70
Cabbirka ugu Badan ee Badarka (μm)	≤43
Isugeynta Ballaarinta Kulaylka M/°C	≤4.4*10-6

Kuleyliyaha garaafka ee foornada korontada ku shaqeeya wuxuu leeyahay sifooyin iska caabbinta kulaylka, iska caabbinta oksaydhka, gudbinta korontada oo wanaagsan iyo xoojinta farsamada oo wanaagsan. Waxaan mashiinno ku samayn karnaa noocyo kala duwan oo kuleyliyaha garaafka ah iyadoo loo eegayo naqshadaha macaamiisha.