Susceptor-ka graphite-ka ee dahaaran ee SiC waa qayb muhiim ah oo loo isticmaalo hababka kala duwan ee wax soo saarka semiconductor-ka. Waxaan isticmaalnaa tignoolajiyadeena shatiga leh si aan u sameyno susceptor-ka oo leh nadiifnimo aad u sareysa, isku mid ahaanshaha dahaarka wanaagsan iyo cimri adeeg oo aad u wanaagsan, iyo sidoo kale iska caabin kiimiko oo sareysa iyo sifooyin xasillooni kuleyl.
Astaamaha alaabtayada:
1. Iska caabinta oksaydhka heerkulka sare ilaa 1700℃.
2. Nadiifnimo sare iyo isku midnimo kuleyl
3. Iska caabin aad u fiican oo daxalka ah: aashitada, alkali, milixda iyo walxaha dabiiciga ah.
4. Adkayn sare, dusha sare oo is haysta, iyo walxo yaryar.
5. Adeeg dheer iyo cimri dheer
| CVD SiC薄膜基本物理性能 Sifooyinka aasaasiga ah ee jireed ee CVD SiCdahaarka | |
| 性质 / Hantida | 典型数值 / Qiimaha Caadiga ah |
| 晶体结构 / Qaab-dhismeedka Crystal | Marxaladda FCC β多晶,主要为(111) 取向 |
| 密度 / Cufnaanta | 3.21 g/cm³ |
| 硬度 / Adkaanta | 2500 维氏硬度(500g oo culeys ah |
| 晶粒大小 / Xaddiga Badarka | 2 ~ 10μm |
| 纯度 / Nadiifinta Kiimikada | 99.99995% |
| 热容 / Awoodda Kulaylka | 640 J·kg-1·K-1 |
| 升华温度 / Heerkulka Sublimation | 2700℃ |
| 抗弯强度 / Xoogga Laablaabashada | 415 MPa RT 4-dhibcood |
| 杨氏模量 / Modulus-ka Young | 430 GPA 4pt laab, 1300℃ |
| 导热系数 / ThermalGudbinta | 300W·m-1·K-1 |
| 热膨胀系数 / Ballaarinta Kulaylka (CTE) | 4.5 × 10-6K-1 |
VET Energy waa soo saaraha dhabta ah ee alaabada graphite iyo silicon carbide ee loo habeeyay oo leh dahaadh kala duwan sida dahaarka SiC, dahaarka TaC, dahaarka kaarboonka galaaska ah, dahaarka kaarboonka pyrolytic, iwm., waxay bixin kartaa qaybo kala duwan oo loogu talagalay warshadaha semiconductor-ka iyo photovoltaic.
Kooxdayada farsamada waxay ka timaadaa hay'adaha cilmi-baarista ee ugu sarreeya gudaha, waxayna ku siin karaan xalal agab xirfadeed oo dheeraad ah.
Waxaan si joogto ah u horumarinnaa habab horumarsan si aan u bixinno agab horumarsan, waxaana ka shaqeynay tignoolajiyad gaar ah oo shati leh, taas oo ka dhigi karta isku xirka u dhexeeya dahaarka iyo substrate-ka mid adag oo aan u nuglaan kala go'a.
Si diirran ayaan kuugu soo dhaweyneynaa inaad booqato warshaddayada, aan yeelano dood dheeraad ah!
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