Doon Wafer Quartz ahwaa qalab muhiim ah oo lagu qaado wax soo saarka semiconductor-ka, soo saarista unugyada sawir-qaadista iyo cilmi-baarista iyo horumarinta agabka ee horumarsan, oo loogu talagalay wareejinta wafer deggan iyo meelaynta hababka heerkulka sare. Badeecadani waxay ka samaysan tahay silica isku-dhafan oo saafi ah oo aad u sarreeya (SiO2), oo leh iska caabin heerkul oo aad u fiican, xasillooni kiimiko iyo astaamo wasakhayn bir ah oo aad u hooseeya, oo ku habboon foornada faafinta, foornada oksaydhka, PECVD/LPCVD iyo qalab kale, oo si weyn loogu isticmaalo dahaarka wafer-ka, ku-tallaalidda ion-ka, annealing heerkulka sare iyo hababka kale ee asaasiga ah.
Faa'iidooyinka Muhiimka ah ee doonida quartz ee VET Energy:
- Wax nadiifnimo aad u sareysa
Nadiif ≥99.99%: Waxyaabaha wasakhaysan (Na, K, Fe, iwm.) <5ppm, ka fogaanshaha wasakhda wafer-ka iyo dammaanad qaadka wax soo saarka jajabka.
Roob yar iyo nuugid: dusha sare waa mid aad loo safeeyey (Ra≤0.4μm) si loo yareeyo isku-dhejinta walxaha iyo haraaga gaaska. - Xasiloonida heerkulka sare
Xadka heerkulka: Heerkulka shaqada muddada dheer waa 1100℃, ugu sarreeya muddada gaaban waa 1300℃, isbeddel ma jiro, roobab ma jiraan.
Isku-darka ballaarinta kulaylka oo hooseeya (5.5x10-7/℃), iska caabin shoogga kulaylka oo aad u fiican, oo la qabsan kara kor u kaca heerkulka degdega ah iyo habka dayrta (tusaale ahaan RTP oo si degdeg ah loo damiyo). - Naqshad dhismeed oo sax ah
Saxnaanta godka ± 0.1mm: isku-darka 2” ilaa 12” wafers, khaladka kala-fogaanshaha isku-midnimada <0.05mm, hubinta in wafers-ku aysan lahayn wax ka-beddel ah.
Awood rarid sare leh: Culayska ugu badan ee 50 wafer (marka loo eego 12" wafer) oo ku jira doon keliya, taasoo taageerta wareejinta xasilloon ee waferada khafiifka ah (≥100um). - Firfircooni la'aanta kiimikada
Iska caabbinta daxalka: U adkaysta aashitada (marka laga reebo HF), daxalka alkali iyo dareeraha dabiiciga ah, oo la jaan qaadaya habka nadiifinta CMP.
Gas adag oo aad u fiican: Heerka daadashada <5x10-10 Pa.m3/s, oo ku habboon bay'adaha faakiyuumka iyo gaaska ilaalinta leh. - Cimri dheer iyo dayactir
Cimriga cimriga ≥ 5000 wareeg (xaaladaha shaqada ee caadiga ah), dusha sare si isdaba joog ah ayaa loo nadiifin karaa loona isticmaali karaa, taasoo yaraynaysa kharashka guud.
Naqshad qaabaysan: waxay taageertaa beddelka qayb ahaan (tusaale ahaan ilig doon keliya), yareynta waqtiga shaqada oo yaraada.
Waxaan bixinaa dusha sare ee hufan iyo kuwa barafaysan iyadoo loo eegayo shuruudaha macaamiisha:
Ningbo VET Energy Technology Co., Ltd waa shirkad tiknoolajiyad sare leh oo diiradda saareysa soo saarista iyo iibinta agabyada horumarsan ee heerka sare ah, agabka iyo tignoolajiyada oo ay ku jiraan graphite, silicon carbide, dhoobada, daaweynta dusha sare sida dahaarka SiC, dahaarka TaC, dahaarka kaarboonka galaaska ah, dahaarka kaarboonka pyrolytic, iwm., alaabadan waxaa si weyn loogu isticmaalaa sawir-qaadista, semiconductor-ka, tamarta cusub, birta, iwm.
Kooxdayada farsamo waxay ka yimaadaan hay'adaha cilmi-baarista ee ugu sarreeya gudaha, waxayna soo saareen teknoolojiyado badan oo shati haysta si loo hubiyo waxqabadka iyo tayada badeecada, waxayna sidoo kale macaamiisha siin karaan xalal agab xirfadeed.
