I-MOCVD Substrate Heater, Izinto Zokushisa ze-MOCVD

I-MOCVD Substrate Heater, Izinto Zokushisa Zesithombe Esifakiwe se-MOCVD

Incazelo emfushane:

I-Chemical Graphite

Inzuzo:Ukumelana nezinga lokushisa eliphezulu

Isicelo:MOCVD/Vacuum furnace/Hot Zone

Ukuminyana ngobuningi:1.68-1.91g/cm3

Amandla e-Flexural: 30-46Mpa

Ukumelana: 7-12μΩm

Thumela i-imeyili kithi Landa njenge-PDF

Imininingwane Yomkhiqizo

Omaka bomkhiqizo

I-MOCVD Substrate Heater, Izinto Zokushisa ze-MOCVD

I-heater ye-graphite:
Izingxenye ze-graphite heater zisetshenziswa esithandweni sokushisa esiphezulu esinezinga lokushisa elifinyelela ku-2200 degree endaweni ye-vacuum kanye ne-3000 degree endaweni yegesi ekhishwe futhi ifakwe.
Izici eziyinhloko ze-heater graphite:
1. ukufana kwesakhiwo sokushisa.
2. conductivity enhle kagesi kanye nomthwalo omkhulu kagesi.
3. ukumelana nokugqwala.
4. i-inoxidizability.
5. ukuhlanzeka kwamakhemikhali aphezulu.
6. amandla aphezulu emishini.
Inzuzo iyonga amandla, inani eliphakeme kanye nokugcinwa okuphansi.
Singakhiqiza i-anti-oxidation nempilo ende ye-graphite crucible, isikhunta se-graphite nazo zonke izingxenye ze-graphite heater.
Imingcele eyinhloko ye-heater graphite:

Ukucaciswa Kwezobuchwepheshe	I-VET-M3
Ukuminyana kwenqwaba (g/cm3)	≥1.85
Okuqukethwe komlotha (PPM)	≤500
Ukuqina Kwasogwini	≥45
Ukumelana Okuqondile (μ.Ω.m)	≤12
Amandla e-Flexural (Mpa)	≥40
Amandla Acindezelayo (Mpa)	≥70
Ubukhulu.Usayizi Wokusanhlamvu (μm)	≤43
I-Coefficient of Thermal Expansion Mm/°C	≤4.4*10-6

I-graphite heater yesithando somlilo kagesi inezindawo zokumelana nokushisa, ukumelana ne-oxidation, ukuqhutshwa kahle kukagesi kanye namandla angcono okusebenza.Singakwazi umshini izinhlobo ezihlukahlukene ze-graphite heater ngokwemiklamo yamakhasimende.