During the vapor phase epitaxy (VPE) process, the role of the pedestal is to support the substrate and ensure uniform heating during the growth process. Different types of pedestals are suitable fo...
I. Process parameter exploration
1. TaCl5-C3H6-H2-Ar system
2. Deposition temperature:
According to the thermodynamic formula, it is calculated that when the temperature is greater than 1273K...
The thermal conductivity and electrical conductivity of graphite rods are quite high, and their electrical conductivity is 4 times higher than that of stainless steel, 2 times higher than that of c...
1.Graphite Crystal Boat with CVD-SiC Coating
Graphite is easy to process and can be made into a single-piece crystal boat through multiple procedures from a single block material. As graphite is a ...
Reaction-sintered silicon carbide is a new type of high-tech ceramics, which has high strength, high hardness, good wear resistance and corrosion resistance, and is widely used in metallurgy, petro...