1. What is a PECVD boat?
1.1 Definition and core functions
PECVD boat (Plasma Enhanced Chemical Vapor Deposition) is a core tool used to carry wafers or substrates in the PECVD process. It...
Recrystallized silicon carbide is an innovative material with superior properties. It has superior mechanical properties and high corrosion resistance, and has a wide range of applications in aeros...
Graphite Bearing is made by Electro-Graphite, Carbon Graphite, Metal Graphite, and Resin-Bonded Graphit, Two types are incluided that are Radial Bearing and Axial Bearing.
The global Graphite Beari...
Product Description: graphite
Graphite powder is soft, black gray, greasy and can pollute paper. The hardness is 1-2, and increases to 3-5 with the increase of impurities along the vertical directi...
1. Main processes of plasma enhanced chemical vapor deposition
Plasma enhanced chemical vapor deposition (PECVD) is a new technology for the growth of thin films by chemical reaction of gase...
2 Experimental results and discussion
2.1 Epitaxial layer thickness and uniformity
Epitaxial layer thickness, doping concentration and uniformity are one of the core indicators for judging the...