SiC coated graphite bases are commonly used to support and heat single crystal substrates in metal-organic chemical vapor deposition (MOCVD) equipment. The thermal stability, thermal uniformity and...
The development of a quantum computer that can solve problems, which classical computers can only solve with great effort or not at all—this is the goal currently being pursued by an ever-growing n...
According to the report on Future Trends of Hydrogen Energy released by the International Hydrogen Energy Commission, global demand for hydrogen energy will increase tenfold by 2050 and reach 520 m...
The graphie rotor system its made of a kind of high-purity graphite. Its spraying method is used to disperse the bubbles, and it can also be used as the centrifugal force generated by the aluminum...
With the continuous advancement of science and technology, the semiconductor industry has an increasing demand for high-performance, high-efficiency materials. In this field, silicon carbide crysta...
1. What is a PECVD boat?
1.1 Definition and core functions
PECVD boat (Plasma Enhanced Chemical Vapor Deposition) is a core tool used to carry wafers or substrates in the PECVD process. It...