GaN Epitaxy mai tushen silicon

Bayanin Samfurin

Kamfaninmu yana ba da ayyukan aiwatar da shafi na SiC ta hanyar hanyar CVD akan saman graphite, yumbu da sauran kayan aiki, don haka iskar gas ta musamman da ke ɗauke da carbon da silicon suna amsawa a zafin jiki mai yawa don samun ƙwayoyin SiC masu tsarki, ƙwayoyin da aka ajiye a saman kayan da aka shafa, suna samar da layin kariya na SIC.

Babban fasali:

1. Juriyar iskar shaka mai zafi:

Juriyar iskar shaka har yanzu tana da kyau sosai idan zafin jiki ya kai 1600 Celsius.

2. Tsarkakakken abu: an yi shi ne ta hanyar sanya tururin sinadarai a ƙarƙashin yanayin chlorine mai zafi.

3. Juriyar lalata ƙasa: babban tauri, ƙaramin fili, ƙananan barbashi.

4. Juriyar tsatsa: sinadarai masu guba, alkali, gishiri da kuma sinadarai masu guba.

Babban Bayani game da Rufin CVD-SIC