GaN Epitaxy oo ku salaysan silikoon

Sharaxaadda Badeecada

Shirkaddayadu waxay bixisaa adeegyada habka dahaarka SiC iyadoo la adeegsanayo habka CVD ee dusha sare ee garaafitka, dhoobada iyo agabyada kale, si gaasaska gaarka ah ee ka kooban kaarboon iyo silikoon ay uga falceliyaan heerkulka sare si ay u helaan molecules-ka SiC ee saafiga ah, molecules-ka lagu shubo dusha sare ee agabka dahaarka leh, iyagoo sameeya lakab ilaalin SIC ah.

Astaamaha ugu muhiimsan:

1. Iska caabinta oksaydhka heerkulka sare:

Iska caabbinta oksaydhku wali aad bay u fiican tahay marka heerkulku uu gaaro 1600 C.

2. Nadiifnimo sare: waxaa lagu sameeyaa kaydka uumiga kiimikada iyadoo lagu jiro xaalad koloriin heerkul sare leh.

3. Iska caabbinta nabaad-guurka: adkaansho sare, dusha sare oo is haysta, walxo yaryar.

4. Iska caabbinta daxalka: aashitada, alkali, milixda iyo walxaha dabiiciga ah.

Tilmaamaha ugu Muhiimsan ee Dahaarka CVD-SIC