Jirgin Ruwa Mai Wafer na QuartzKayan aiki ne mai mahimmanci a cikin kera semiconductor, samar da ƙwayoyin photovoltaic da kuma bincike da haɓaka kayan aiki, wanda aka tsara don canja wurin wafer mai ƙarfi da matsayi a cikin hanyoyin zafi mai yawa. An yi wannan samfurin da silica mai tsarki mai matuƙar ƙarfi (SiO2), tare da juriya mai kyau ga zafin jiki, kwanciyar hankali na sinadarai da halayen gurɓatar ƙarfe mai ƙarancin ƙarfi, wanda ya dace da tanderun watsawa, tanderun oxidation, PECVD/LPCVD da sauran kayan aiki, wanda ake amfani da shi sosai a cikin rufin wafer, dasa ion, annealing mai zafi da sauran hanyoyin aiwatarwa.
Babban Amfanin Jirgin Ruwa na Quartz na VET Energy:
- Kayan tsarki mai matuƙar girma
Tsafta ≥99.99%: Yawan najasa (Na, K, Fe, da sauransu) <5ppm, yana guje wa gurɓatar wafer da kuma tabbatar da yawan guntu.
Ƙarancin ruwan sama da shaƙa: saman an goge shi sosai (Ra≤0.4μm) don rage mannewar barbashi da ragowar iskar gas. - Kwanciyar hankali mai yawa
Iyakar zafin jiki: Zafin aiki na dogon lokaci na 1100℃, kololuwar ɗan gajeren lokaci na 1300℃, babu nakasa, babu ruwan lu'ulu'u.
Ƙarancin ma'aunin faɗaɗa zafi (5.5x10-7/℃), kyakkyawan juriya ga girgizar zafi, wanda za'a iya daidaitawa da saurin tashi da faɗuwar zafin jiki (misali RTP mai sauri). - Tsarin tsari daidai
Daidaiton ramin ± 0.1mm: daidaita wafers 2” zuwa 12”, kuskuren daidaiton tazara <0.05mm, tabbatar da cewa wafers ba su da wani bambanci.
Babban ƙarfin kaya: Matsakaicin nauyin wafers 50 (idan aka kwatanta da wafers 12") a cikin kwale-kwale ɗaya, wanda ke tallafawa canja wurin wafers masu siriri (≥100um). - Rashin daidaiton sinadarai
Juriyar Tsatsa: Yana jure wa acid (banda HF), tsatsa mai narkewar alkali da na halitta, wanda ya dace da tsarin tsaftacewa na CMP.
Kyakkyawan matsewar iskar gas: Yawan zubar ruwa <5x10-10 Pa.m3/s, ya dace da yanayin iskar gas mai tsafta da kariya. - Tsawon rai da kuma dorewa
Tsawon rai ≥ zagayowar 5000 (yanayin aiki na yau da kullun), ana iya tsaftace saman akai-akai kuma a yi amfani da shi, wanda ke rage farashin gabaɗaya.
Tsarin zamani: yana tallafawa maye gurbin wani ɓangare (misali haƙorin jirgin ruwa ɗaya), rage lokacin aiki.
Muna bayar da saman da ke da haske da kuma mai sanyi bisa ga buƙatun abokin ciniki:
Ningbo VET Energy Technology Co., Ltd kamfani ne mai fasaha mai zurfi wanda ke mai da hankali kan samarwa da sayar da kayayyaki masu inganci, kayan aiki da fasaha gami da graphite, silicon carbide, yumbu, maganin saman kamar murfin SiC, murfin TaC, murfin carbon mai gilashi, murfin carbon pyrolytic, da sauransu, waɗannan samfuran ana amfani da su sosai a cikin photovoltaic, semiconductor, sabon makamashi, ƙarfe, da sauransu.
Ƙungiyarmu ta fasaha ta fito ne daga manyan cibiyoyin bincike na cikin gida, kuma sun ƙirƙiro fasahohi da yawa masu lasisi don tabbatar da ingancin samfura da kuma ingancinsu, kuma za su iya samar wa abokan ciniki mafita na kayan aiki na ƙwararru.
