ʻEha ʻekolu ʻaoʻao
ʻO nā kīnā triangular nā kīnā morphological make loa i nā papa epitaxial SiC. Ua hōʻike ʻia kahi helu nui o nā hōʻike palapala e pili ana ka hoʻokumu ʻia ʻana o nā kīnā triangular i ke ʻano kristal 3C. Eia nō naʻe, ma muli o nā ʻano ulu like ʻole, ʻokoʻa loa ke ʻano o nā kīnā triangular he nui ma ka ʻili o ka papa epitaxial. Hiki ke hoʻokaʻawale ʻia i nā ʻano penei:
(1) Aia nā hemahema triangular me nā ʻāpana nui ma luna
He ʻāpana poepoe nui ko kēia ʻano kīnā triangular ma luna, hiki ke hana ʻia e nā mea hāʻule i ka wā o ke kaʻina ulu ʻana. Hiki ke ʻike ʻia kahi ʻāpana triangular liʻiliʻi me kahi ʻili ʻino i lalo mai kēia vertex. ʻO kēia ma muli o ka ʻoiaʻiʻo i ka wā o ke kaʻina epitaxial, ʻelua mau papa 3C-SiC like ʻole i hoʻokumu ʻia ma ka ʻāpana triangular, kahi i hoʻokumu ʻia ai ka papa mua ma ka interface a ulu ma o ke kahe ʻanuʻu 4H-SiC. I ka piʻi ʻana o ka mānoanoa o ka papa epitaxial, ʻo ka papa ʻelua o ka 3C polytype nucleates a ulu i loko o nā lua triangular liʻiliʻi, akā ʻaʻole uhi piha ka ʻanuʻu ulu 4H i ka ʻāpana polytype 3C, e ʻike maopopo ana i ka ʻāpana groove V-shaped o 3C-SiC.
(2) Aia nā ʻāpana liʻiliʻi ma ka piko a me nā kīnā triangular me ka ʻili ʻinoʻino
ʻOi aku ka liʻiliʻi o nā ʻāpana ma nā piko o kēia ʻano kīnā triangular, e like me ka mea i hōʻike ʻia ma ke Kiʻi 4.2. A ʻo ka hapa nui o ka ʻāpana triangular ua uhi ʻia e ke kahe ʻanuʻu o 4H-SiC, ʻo ia hoʻi, ua hoʻokomo piha ʻia ka papa 3C-SiC holoʻokoʻa ma lalo o ka papa 4H-SiC. ʻO nā ʻanuʻu ulu wale nō o 4H-SiC ke ʻike ʻia ma ka ʻili kīnā triangular, akā ʻoi aku ka nui o kēia mau ʻanuʻu ma mua o nā ʻanuʻu ulu kristal 4H maʻamau.
(3) Nā kīnā ʻekolu me ka ʻili laumania
He ʻano laumania ka ʻili o kēia ʻano kīnā triangular, e like me ka mea i hōʻike ʻia ma ke Kiʻi 4.3. No ia mau kīnā triangular, ua uhi ʻia ka papa 3C-SiC e ke kahe ʻanuʻu o 4H-SiC, a ʻoi aku ka maikaʻi a me ka laumania o ke ʻano kristal 4H ma luna o ka ʻili.
Nā hemahema o ka lua epitaxial
ʻO nā lua Epitaxial (Pits) kekahi o nā kīnā morphology ʻili maʻamau, a ua hōʻike ʻia ko lākou morphology ʻili maʻamau a me ka hoʻolālā kūkulu ma ke Kiʻi 4.4. ʻO kahi o nā lua corrosion dislocation threading (TD) i ʻike ʻia ma hope o ke kahakaha ʻana o KOH ma ke kua o ka hāmeʻa he pilina maopopo me kahi o nā lua epitaxial ma mua o ka hoʻomākaukau ʻana o ka hāmeʻa, e hōʻike ana i ka hoʻokumu ʻia ʻana o nā hemahema lua epitaxial e pili ana i nā dislocations threading.
nā hemahema kāloti
ʻO nā hemahema kāloti kahi hemahema maʻamau o ka ʻili ma nā papa epitaxial 4H-SiC, a ua hōʻike ʻia ko lākou ʻano maʻamau ma ke Kiʻi 4.5. Ua hōʻike ʻia ua hoʻokumu ʻia ka hemahema kāloti e ka hui ʻana o nā hewa stacking Franconian a me prismatic i loaʻa ma ka mokulele basal i hoʻopili ʻia e nā dislocations step-like. Ua hōʻike pū ʻia ua pili ka hoʻokumu ʻia ʻana o nā hemahema kāloti i ka TSD i loko o ka substrate. Ua ʻike ʻo Tsuchida H. et al. ua like ka nui o nā hemahema kāloti i loko o ka papa epitaxial me ka nui o TSD i loko o ka substrate. A ma ka hoʻohālikelike ʻana i nā kiʻi morphology o ka ʻili ma mua a ma hope o ka ulu ʻana o ka epitaxial, hiki ke loaʻa nā hemahema kāloti i ʻike ʻia e kūlike me ka TSD i loko o ka substrate. Ua hoʻohana ʻo Wu H. et al. i ka wehewehe ʻana o ka hoʻāʻo hoʻopuehu Raman e ʻike ai ʻaʻole i loaʻa i nā hemahema kāloti ke ʻano kristal 3C, akā ʻo ka polytype 4H-SiC wale nō.
Ka hopena o nā kīnā triangular ma nā ʻano o ka hāmeʻa MOSFET
ʻO ke Kiʻi 4.7 kahi histogram o ka hoʻolaha helu o nā ʻano ʻelima o kahi mea hana e loaʻa ana nā kīnā triangular. ʻO ka laina kiko polū ka laina hoʻokaʻawale no ka hōʻino ʻana o ke ʻano o ka mea hana, a ʻo ka laina kiko ʻulaʻula ka laina hoʻokaʻawale no ka hāʻule ʻana o ka mea hana. No ka hāʻule ʻana o ka mea hana, he hopena nui ko nā hemahema triangular, a ʻoi aku ka nui o ka hāʻule ʻana ma mua o 93%. Hoʻopili nui ʻia kēia i ka mana o nā hemahema triangular ma nā ʻano leakage hope o nā mea hana. A hiki i ka 93% o nā mea hana e loaʻa ana nā kīnā triangular i hoʻonui nui i ka leakage hope. Eia kekahi, he hopena koʻikoʻi ko nā hemahema triangular i nā ʻano leakage puka, me ka helu hōʻino o 60%. E like me ka mea i hōʻike ʻia ma ka Papa 4.2, no ka hōʻino ʻana o ka voltage paepae a me ka hōʻino ʻana o ke ʻano diode kino, he liʻiliʻi ka hopena o nā hemahema triangular, a ʻo nā ʻāpana hōʻino he 26% a me 33%. Ma ke ʻano o ka hoʻonui ʻana i ka pale ʻana, nāwaliwali ka hopena o nā hemahema triangular, a ʻo ka lakio hōʻino ma kahi o 33%.
Ka hopena o nā hemahema lua epitaxial ma nā ʻano o ka hāmeʻa MOSFET
ʻO ke Kiʻi 4.8 kahi histogram o ka hoʻolaha helu o nā ʻano ʻelima o kahi mea hana e loaʻa ana nā hemahema lua epitaxial. ʻO ka laina kiko polū ka laina hoʻokaʻawale no ka hōʻino ʻana o ke ʻano o ka mea hana, a ʻo ka laina kiko ʻulaʻula ka laina hoʻokaʻawale no ka hāʻule ʻana o ka mea hana. Hiki ke ʻike ʻia mai kēia mea ua like ka nui o nā mea hana e loaʻa ana nā hemahema lua epitaxial i loko o ka laʻana SiC MOSFET me ka nui o nā mea hana e loaʻa ana nā hemahema triangular. ʻOkoʻa ka hopena o nā hemahema lua epitaxial i nā ʻano o ka mea hana mai nā hemahema triangular. Ma ke ʻano o ka hāʻule ʻana o ka mea hana, ʻo ka helu hāʻule ʻana o nā mea hana e loaʻa ana nā hemahema lua epitaxial he 47% wale nō. Ke hoʻohālikelike ʻia me nā hemahema triangular, ua nāwaliwali nui ka hopena o nā hemahema lua epitaxial i nā ʻano leakage hope a me nā ʻano leakage puka o ka mea hana, me nā lakio hōʻino o 53% a me 38%, e like me ka mea i hōʻike ʻia ma ka Papa 4.3. Ma ka ʻaoʻao ʻē aʻe, ʻoi aku ka nui o ka hopena o nā hemahema lua epitaxial i nā ʻano voltage paepae, nā ʻano alakaʻi diode kino a me ke kūʻē ʻana ma mua o nā hemahema triangular, me ka lakio hōʻino e hiki ana i 38%.
Ma keʻano laulā, ʻelua mau kīnā morphological, ʻo ia hoʻi nā triangles a me nā lua epitaxial, he hopena koʻikoʻi i ka hāʻule ʻana a me ka hōʻino ʻana o nā mea SiC MOSFET. ʻO ka loaʻa ʻana o nā kīnā triangular ka mea make loa, me ka nui o ka hāʻule ʻana e like me 93%, i hōʻike nui ʻia ma ke ʻano he piʻi nui ʻana o ka leakage hoʻohuli o ka mea hana. ʻO nā mea hana i loaʻa nā kīnā lua epitaxial he haʻahaʻa ka nui o ka hāʻule ʻana o 47%. Eia nō naʻe, ʻoi aku ka hopena o nā hemahema lua epitaxial i ka voltage paepae o ka mea hana, nā ʻano alakaʻi diode kino a me ke kū'ē ʻana ma mua o nā hemahema triangular.
Ka manawa hoʻouna: ʻApelila-16-2024