Koha tapatoru
Ko ngā hapa tapatoru ngā hapa āhua tino kino rawa atu i roto i ngā paparanga epitaxial SiC. He maha ngā pūrongo tuhinga kua whakaatu ko te hanganga o ngā hapa tapatoru e pā ana ki te āhua tioata 3C. Heoi, nā ngā tikanga tipu rerekē, he tino rerekē te āhua o ngā hapa tapatoru maha i runga i te mata o te paparanga epitaxial. Ka taea te wehewehe ki ēnei momo:
(1) He tapatoru ngā hapa me ngā matūriki nunui kei te tihi
He matūriki porowhita nui kei te tihi o tēnei momo hapa tapatoru, ā, tera pea ka puta mai i ngā mea e hinga ana i te wā e tipu ana. Ka kitea he wāhi tapatoru iti me te mata taratara ki raro mai i tēnei tihi. Nā te mea i te wā o te tukanga epitaxial, e rua ngā paparanga 3C-SiC rerekē ka hangaia i roto i te wāhi tapatoru, ko te paparanga tuatahi ka pūtahi i te atanga ka tipu mā te rerenga taahiraa 4H-SiC. I te piki haere o te matotoru o te paparanga epitaxial, ka pūtahi te paparanga tuarua o te momo-maha 3C ka tipu i roto i ngā rua tapatoru iti ake, engari kāore te taahiraa tipu 4H e kapi katoa i te wāhi momo-maha 3C, e kitea tonu ai te wāhi awaawa āhua-V o te 3C-SiC.
(2) He iti ngā matūriki kei te tihi, me ngā hapa tapatoru me te mata taratara
He iti ake ngā matūriki i ngā pito o tēnei momo hapa tapatoru, e whakaaturia ana i te Pikitia 4.2. Ā, ko te nuinga o te horahanga tapatoru kua kapihia e te rere o te hikoinga o te 4H-SiC, arā, ko te paparanga 3C-SiC katoa kua tino whakaurua ki raro i te paparanga 4H-SiC. Ko ngā hikoinga tipu anake o te 4H-SiC ka kitea i runga i te mata o te hapa tapatoru, engari he nui ake ēnei hikoinga i ngā hikoinga tipu tioata 4H tikanga.
(3) Ngā hapa tapatoru me te mata maeneene
He maeneene te āhua o te mata o tēnei momo hapa tapatoru, e whakaaturia ana i te Pikitia 4.3. Mō ēnei hapa tapatoru, ka hipokina te paparanga 3C-SiC e te rerenga hikoinga o te 4H-SiC, ā, ka angiangi ake, ka māeneene ake te āhua tioata 4H i runga i te mata.
Ngā hapa o te poka epitaxial
Ko ngā rua epitaxial (Ngā Rua) tētahi o ngā hapa āhua mata e tino kitea ana, ā, ko tōna āhua mata me te āhua hanganga e whakaaturia ana i te Pikitia 4.4. Ko te wāhi o ngā rua waikura whakakorikori miro (TD) i kitea i muri i te whakairo KOH i te tuara o te taputapu he rite tonu ki te wāhi o ngā rua epitaxial i mua i te whakarite i te taputapu, e tohu ana ko te hanganga o ngā hapa rua epitaxial e pā ana ki ngā whakakorikori miro.
ngā hapa o te kāreti
He hapa mata noa ngā hapa kāreti i roto i ngā paparanga epitaxial 4H-SiC, ā, ko tōna āhua noa e whakaaturia ana i te Pikitia 4.5. E ai ki ngā pūrongo, i hangaia te hapa kāreti mā te hononga o ngā hapa tāpae Franconian me te prismatic kei runga i te papa turanga e honoa ana e ngā nekehanga rite-taahiraa. Kua pūrongohia hoki ko te hanganga o ngā hapa kāreti e pā ana ki te TSD i roto i te papa. I kitea e Tsuchida H. et al. ko te kiato o ngā hapa kāreti i roto i te paparanga epitaxial he rite ki te kiato o te TSD i roto i te papa. Ā, mā te whakataurite i ngā whakaahua āhua mata i mua atu, i muri mai hoki i te tipu epitaxial, ka kitea ngā hapa kāreti katoa i kitea he rite ki te TSD i roto i te papa. I whakamahia e Wu H. et al. te tautuhi whakamātautau marara Raman ki te kimi kāore i roto i ngā hapa kāreti te āhua tioata 3C, engari ko te momo polytype 4H-SiC anake.
Te pānga o ngā hapa tapatoru ki ngā āhuatanga o te taputapu MOSFET
Ko te Pikitia 4.7 he tauira tātai o te tohatoha tatauranga o ngā āhuatanga e rima o tētahi taputapu kei roto ngā hapa tapatoru. Ko te rārangi iraira kikorangi te rārangi wehewehe mō te whakahekenga āhuatanga o te taputapu, ā, ko te rārangi iraira whero te rārangi wehewehe mō te rahunga o te taputapu. Mō te rahunga o te taputapu, he nui te pānga o ngā hapa tapatoru, ā, he nui ake te tere rahunga i te 93%. Ko te take nui o tēnei ko te awe o ngā hapa tapatoru ki ngā āhuatanga turuturu whakamuri o ngā taputapu. Tae atu ki te 93% o ngā taputapu kei roto ngā hapa tapatoru kua tino piki ake te turuturu whakamuri. Hei tāpiri, he nui hoki te pānga o ngā hapa tapatoru ki ngā āhuatanga turuturu o te kuaha, me te tere whakahekenga o te 60%. E ai ki te Ripanga 4.2, mō te whakahekenga ngaohiko paepae me te whakahekenga āhuatanga o te diode tinana, he iti te pānga o ngā hapa tapatoru, ā, ko ngā ōwehenga whakahekenga he 26% me te 33% ia. Mō te whakapiki i te ātete-ā-ringa, he ngoikore te pānga o ngā hapa tapatoru, ā, ko te ōwehenga whakahekenga he tata ki te 33%.
Te pānga o ngā hapa o te poka epitaxial ki ngā āhuatanga o te taputapu MOSFET
Ko te Pikitia 4.8 he histogram o te tohatoha tatauranga o ngā āhuatanga e rima o tētahi taputapu kei roto ngā hapa poka epitaxial. Ko te rārangi iraira kikorangi te rārangi wehewehe mō te whakahekenga āhuatanga o te taputapu, ā, ko te rārangi iraira whero te rārangi wehewehe mō te rahunga o te taputapu. Ka kitea mai i tēnei ko te maha o ngā taputapu kei roto ngā hapa poka epitaxial i roto i te tauira SiC MOSFET he rite ki te maha o ngā taputapu kei roto ngā hapa tapatoru. He rerekē te pānga o ngā hapa poka epitaxial ki ngā āhuatanga o te taputapu i tērā o ngā hapa tapatoru. Mō te rahunga o te taputapu, ko te tere rahunga o ngā taputapu kei roto ngā hapa poka epitaxial he 47% noa iho. Ki te whakatauritea ki ngā hapa tapatoru, he ngoikore rawa te pānga o ngā hapa poka epitaxial ki ngā āhuatanga turuturu whakamuri me ngā āhuatanga turuturu kuaha o te taputapu, me ngā ōwehenga whakahekenga o te 53% me te 38% ia, e whakaaturia ana i te Ripanga 4.3. I tētahi atu taha, ko te pānga o ngā hapa poka epitaxial ki ngā āhuatanga ngaohiko paepae, ngā āhuatanga kawe diode tinana me te ātete-on he nui ake i tērā o ngā hapa tapatoru, me te ōwehenga whakahekenga e eke ana ki te 38%.
I te nuinga o te wā, e rua ngā hapa āhua, arā, ko ngā tapatoru me ngā poka epitaxial, he pānga nui ki te rahunga me te hekenga āhuatanga o ngā taputapu SiC MOSFET. Ko te noho o ngā hapa tapatoru te mea tino mate, me te reiti rahunga tae atu ki te 93%, e whakaatuhia ana ko te pikinga nui o te turuturu whakamuri o te taputapu. Ko ngā taputapu kei roto ngā hapa poka epitaxial he iti ake te reiti rahunga o te 47%. Heoi, he nui ake te pānga o ngā hapa poka epitaxial ki te ngaohiko paepae o te taputapu, ngā āhuatanga kawe diode tinana me te ātete-ki-te-whakahaere i ngā hapa tapatoru.
Wā tuku: Paenga-whāwhā-16-2024