Qhov tsis zoo ntawm daim duab peb ceg
Cov teeb meem peb ceg yog cov teeb meem morphological uas ua rau tuag taus tshaj plaws hauv SiC epitaxial txheej. Muaj ntau cov ntawv qhia txog kev sau ntawv tau qhia tias kev tsim cov teeb meem peb ceg yog cuam tshuam nrog daim ntawv siv lead ua 3C. Txawm li cas los xij, vim muaj ntau txoj hauv kev loj hlob, cov qauv ntawm ntau cov teeb meem peb ceg ntawm qhov chaw ntawm txheej epitaxial txawv heev. Nws tuaj yeem faib ua cov hom hauv qab no:
(1) Muaj cov qhov tsis zoo ntawm daim duab peb ceg nrog cov khoom loj loj rau saum toj
Hom kab peb ceg no muaj ib lub pob zeb loj loj nyob rau sab saum toj, uas tej zaum yuav yog los ntawm cov khoom poob thaum lub sijhawm loj hlob. Ib cheeb tsam peb ceg me me nrog qhov chaw ntxhib tuaj yeem pom hauv qab no. Qhov no yog vim qhov tseeb tias thaum lub sijhawm epitaxial, ob txheej 3C-SiC sib txawv tau tsim ua ke hauv thaj chaw peb ceg, uas thawj txheej yog nucleated ntawm qhov sib txuas thiab loj hlob los ntawm cov kauj ruam 4H-SiC. Raws li qhov tuab ntawm txheej epitaxial nce, txheej thib ob ntawm 3C polytype nucleates thiab loj hlob hauv cov qhov me me peb ceg, tab sis kauj ruam loj hlob 4H tsis npog tag nrho thaj chaw 3C polytype, ua rau thaj chaw V-puab ntawm 3C-SiC tseem pom tseeb.
(2) Muaj cov khoom me me nyob rau sab saum toj thiab cov qhov tsis zoo ntawm daim duab peb ceg nrog qhov chaw ntxhib
Cov khoom me me ntawm cov vertices ntawm hom triangular defect no me dua, raws li pom hauv Daim Duab 4.2. Thiab feem ntau ntawm thaj chaw triangular yog them los ntawm cov kauj ruam ntws ntawm 4H-SiC, uas yog, tag nrho 3C-SiC txheej yog embedded tag nrho nyob rau hauv 4H-SiC txheej. Tsuas yog cov kauj ruam loj hlob ntawm 4H-SiC tuaj yeem pom ntawm qhov chaw triangular defect, tab sis cov kauj ruam no loj dua li cov kauj ruam loj hlob ntawm 4H siv lead ua ib txwm muaj.
(3) Cov qhov tsis zoo ntawm daim duab peb ceg nrog qhov chaw du
Hom kev puas tsuaj peb sab no muaj qhov morphology ntawm qhov chaw du, raws li pom hauv Daim Duab 4.3. Rau cov kev puas tsuaj peb sab no, txheej 3C-SiC raug npog los ntawm cov kauj ruam ntawm 4H-SiC, thiab daim ntawv siv lead ua 4H ntawm qhov chaw loj hlob zoo dua thiab du dua.
Cov teeb meem ntawm qhov Epitaxial
Cov qhov Epitaxial (Qhov) yog ib qho ntawm cov teeb meem morphology nto feem ntau, thiab lawv cov morphology nto thiab cov qauv qhia tau qhia hauv Daim Duab 4.4. Qhov chaw ntawm cov qhov xeb threading dislocation (TD) pom tom qab KOH etching ntawm sab nraub qaum ntawm lub cuab yeej muaj kev sib raug zoo meej nrog qhov chaw ntawm cov qhov epitaxial ua ntej npaj lub cuab yeej, qhia tias kev tsim cov teeb meem epitaxial pit yog cuam tshuam nrog threading dislocations.
qhov tsis zoo ntawm cov carrots
Cov teeb meem ntawm cov qos yaj ywm yog ib qho teeb meem ntawm qhov chaw uas pom ntau hauv cov txheej 4H-SiC epitaxial, thiab lawv cov morphology feem ntau yog qhia hauv Daim Duab 4.5. Cov teeb meem ntawm cov qos yaj ywm tau tshaj tawm tias yog tsim los ntawm kev sib tshuam ntawm Franconian thiab prismatic stacking faults nyob rau ntawm lub dav hlau basal txuas nrog los ntawm cov kauj ruam zoo li dislocations. Nws kuj tau tshaj tawm tias kev tsim cov teeb meem ntawm cov qos yaj ywm muaj feem cuam tshuam nrog TSD hauv lub substrate. Tsuchida H. et al. pom tias qhov ceev ntawm cov teeb meem ntawm cov qos yaj ywm hauv txheej epitaxial yog proportional rau qhov ceev ntawm TSD hauv lub substrate. Thiab los ntawm kev sib piv cov duab morphology ntawm qhov chaw ua ntej thiab tom qab kev loj hlob ntawm epitaxial, txhua qhov teeb meem ntawm cov qos yaj ywm uas pom tau tuaj yeem pom tias sib xws nrog TSD hauv lub substrate. Wu H. et al. siv Raman scattering test characterization los pom tias cov teeb meem ntawm cov qos yaj ywm tsis muaj daim ntawv siv lead ua 3C, tab sis tsuas yog 4H-SiC polytype xwb.
Cov nyhuv ntawm cov duab peb ceg tsis zoo ntawm cov yam ntxwv ntawm MOSFET
Daim Duab 4.7 yog daim duab histogram ntawm kev faib tawm ntawm tsib yam ntxwv ntawm lub cuab yeej uas muaj cov qhov tsis zoo peb ceg. Kab xiav yog kab faib rau qhov tsis zoo ntawm lub cuab yeej, thiab kab liab yog kab faib rau qhov tsis ua haujlwm ntawm lub cuab yeej. Rau qhov tsis ua haujlwm ntawm lub cuab yeej, cov qhov tsis zoo peb ceg muaj qhov cuam tshuam loj heev, thiab qhov tsis ua haujlwm ntau dua 93%. Qhov no feem ntau yog vim muaj kev cuam tshuam ntawm cov qhov tsis zoo peb ceg rau cov yam ntxwv ntawm cov khoom siv rov qab. Txog li 93% ntawm cov khoom siv uas muaj cov qhov tsis zoo peb ceg tau ua rau muaj kev xau rov qab ntau dua. Tsis tas li ntawd, cov qhov tsis zoo peb ceg kuj muaj kev cuam tshuam loj rau cov yam ntxwv ntawm cov qhov xau ntawm lub qhov rooj, nrog rau qhov tsis zoo ntawm 60%. Raws li tau pom hauv Rooj 4.2, rau qhov tsis zoo ntawm qhov hluav taws xob thiab qhov tsis zoo ntawm lub cev diode, qhov cuam tshuam ntawm cov qhov tsis zoo peb ceg yog me me, thiab qhov sib piv ntawm kev puas tsuaj yog 26% thiab 33% feem. Hauv kev ua rau muaj kev nce ntxiv ntawm kev tiv thaiv, qhov cuam tshuam ntawm cov qhov tsis zoo peb ceg tsis muaj zog, thiab qhov sib piv ntawm kev puas tsuaj yog li 33%.
Cov nyhuv ntawm cov qhov tsis zoo ntawm epitaxial pit rau cov yam ntxwv ntawm MOSFET
Daim Duab 4.8 yog daim duab histogram ntawm kev faib tawm ntawm tsib yam ntxwv ntawm lub cuab yeej uas muaj qhov tsis zoo ntawm qhov epitaxial. Kab xiav yog kab faib rau qhov tsis zoo ntawm lub cuab yeej, thiab kab liab yog kab faib rau qhov tsis ua haujlwm ntawm lub cuab yeej. Nws tuaj yeem pom los ntawm qhov no tias tus lej ntawm cov cuab yeej uas muaj qhov tsis zoo ntawm qhov epitaxial hauv cov qauv SiC MOSFET yog sib npaug rau tus lej ntawm cov cuab yeej uas muaj qhov tsis zoo ntawm daim duab peb ceg. Qhov cuam tshuam ntawm qhov tsis zoo ntawm qhov epitaxial rau cov yam ntxwv ntawm lub cuab yeej txawv ntawm qhov tsis zoo ntawm daim duab peb ceg. Hauv kev ua tsis tiav ntawm lub cuab yeej, qhov tsis ua haujlwm ntawm cov cuab yeej uas muaj qhov tsis zoo ntawm qhov epitaxial tsuas yog 47%. Piv nrog cov tsis zoo ntawm daim duab peb ceg, qhov cuam tshuam ntawm qhov tsis zoo ntawm qhov epitaxial rau cov yam ntxwv ntawm qhov xau rov qab thiab cov yam ntxwv ntawm qhov xau ntawm lub cuab yeej tsis muaj zog heev, nrog rau qhov sib piv ntawm 53% thiab 38%, raws li qhia hauv Rooj 4.3. Ntawm qhov tod tes, qhov cuam tshuam ntawm qhov tsis zoo ntawm qhov epitaxial rau cov yam ntxwv ntawm qhov voltage, cov yam ntxwv ntawm lub cev diode conduction thiab on-resistance yog ntau dua li ntawm qhov tsis zoo ntawm daim duab peb ceg, nrog rau qhov sib piv ntawm qhov degradation ncav cuag 38%.
Feem ntau, ob qho teeb meem morphological, uas yog cov duab peb ceg thiab cov qhov epitaxial, muaj qhov cuam tshuam loj rau qhov tsis ua haujlwm thiab kev puas tsuaj ntawm SiC MOSFET cov khoom siv. Qhov muaj cov teeb meem peb ceg yog qhov ua rau tuag taus tshaj plaws, nrog rau tus nqi tsis ua haujlwm siab txog 93%, feem ntau yog qhia tias yog qhov nce ntxiv ntawm qhov xau rov qab ntawm lub cuab yeej. Cov khoom siv uas muaj cov teeb meem epitaxial pit muaj tus nqi tsis ua haujlwm qis dua ntawm 47%. Txawm li cas los xij, cov teeb meem epitaxial pit muaj qhov cuam tshuam loj dua rau lub zog hluav taws xob ntawm lub cuab yeej, cov yam ntxwv ntawm lub cev diode conduction thiab kev tiv thaiv dua li cov teeb meem peb ceg.
Lub sijhawm tshaj tawm: Plaub Hlis-16-2024