Pehea e kōkua ai nā papa epitaxial i nā polokalamu semiconductor?

Ke kumu o ka inoa ʻo ka wafer epitaxial

ʻO ka mea mua, e hoʻolaha kākou i kahi manaʻo liʻiliʻi: ʻo ka hoʻomākaukau ʻana o ka wafer e komo pū ana me ʻelua mau loulou nui: ka hoʻomākaukau ʻana o ka substrate a me ke kaʻina hana epitaxial. ʻO ka substrate kahi wafer i hana ʻia me ka mea semiconductor single crystal. Hiki i ka substrate ke komo pololei i ke kaʻina hana wafer e hana i nā mea semiconductor, a i ʻole hiki ke hana ʻia e nā kaʻina hana epitaxial e hana i nā wafers epitaxial. ʻO ka Epitaxy e pili ana i ke kaʻina hana o ka ulu ʻana i kahi papa hou o ka kristal hoʻokahi ma kahi substrate kristal hoʻokahi i hana pono ʻia e ka ʻoki ʻana, ka wili ʻana, ka poli ʻana, a me nā mea ʻē aʻe. Hiki i ka kristal hoʻokahi hou ke like me ka substrate, a i ʻole he mea ʻokoʻa (homogeneous) epitaxy a heteroepitaxy paha). Ma muli o ka hoʻonui ʻana a me ka ulu ʻana o ka papa kristal hoʻokahi hou e like me ke ʻano kristal o ka substrate, ua kapa ʻia ʻo ia he papa epitaxial (ʻo ka mānoanoa he mau microns, e lawe ana i ka silicon ma ke ʻano he laʻana: ʻo ke ʻano o ka ulu ʻana o ka silicon epitaxial ma luna o kahi substrate kristal hoʻokahi silicon me kahi kuhikuhi kristal. ʻO kahi papa kristal me ka pono o ka hoʻonohonoho lattice maikaʻi a me nā resistivity like ʻole a me ka mānoanoa me ke kuhikuhi kristal like me ka ulu ʻana o ka substrate), a ʻo ka substrate me ka papa epitaxial ua kapa ʻia ʻo ia he wafer epitaxial (epitaxial wafer = epitaxial layer + substrate). Ke hana ʻia ka mea hana ma ka papa epitaxial, ua kapa ʻia ʻo ia he epitaxy maikaʻi. Inā hana ʻia ka mea hana ma ka substrate, ua kapa ʻia ʻo ia he epitaxy hoʻohuli. I kēia manawa, hoʻokani wale ka papa epitaxial i kahi kuleana kākoʻo.

Wafer i hoʻowali ʻia

Nā ʻano ulu epitaxial

ʻO ka epitaxy beam molecular (MBE): He ʻenehana ulu epitaxial semiconductor i hana ʻia ma lalo o nā kūlana vacuum ultra-kiʻekiʻe. Ma kēia ʻenehana, ua hoʻoheheʻe ʻia ka mea kumu ma ke ʻano o kahi beam o nā ʻātoma a i ʻole nā ​​​​molekala a laila waiho ʻia ma luna o kahi substrate crystalline. ʻO MBE kahi ʻenehana ulu ʻili lahilahi semiconductor pololei loa a hiki ke hoʻokele ʻia e hiki ke hoʻokele pololei i ka mānoanoa o ka mea i waiho ʻia ma ka pae atomika.
ʻO ke kinoea metala organik CVD (MOCVD): I ke kaʻina hana MOCVD, ua hoʻolako ʻia ka metala organik a me ke kinoea hydride N e loaʻa ana nā mea e pono ai i ka substrate ma kahi mahana kūpono, e hana ana i kahi hopena kemika e hana i ka mea semiconductor e pono ai, a waiho ʻia ma luna o ka substrate, ʻoiai e hoʻokuʻu ʻia nā hui i koe a me nā huahana hopena.
ʻO ka epitaxy pae mahu (VPE): ʻO ka epitaxy pae mahu kahi ʻenehana koʻikoʻi i hoʻohana pinepine ʻia i ka hana ʻana o nā mea semiconductor. ʻO ke kumu nui ka lawe ʻana i ka mahu o nā mea elemental a i ʻole nā ​​​​hui i loko o kahi kinoea lawe, a waiho i nā kristal ma luna o ka substrate ma o nā hopena kemika.

He aha nā pilikia e hoʻoponopono ʻia e ke kaʻina hana epitaxy?

ʻO nā mea kristal hoʻokahi wale nō ka nui ʻaʻole hiki ke hoʻokō i nā pono e ulu nei o ka hana ʻana i nā mea semiconductor like ʻole. No laila, ua hoʻomohala ʻia ka ulu ʻana o ka epitaxial, kahi ʻenehana ulu mea kristal hoʻokahi papa lahilahi, i ka hopena o 1959. No laila he aha ka hāʻawi kikoʻī a ka ʻenehana epitaxy i ka holomua o nā mea?

No ka silicon, i ka wā i hoʻomaka ai ka ʻenehana ulu epitaxial silicon, he manawa paʻakikī maoli ia no ka hana ʻana o nā transistors silicon kiʻekiʻe-alapine a me ka mana kiʻekiʻe. Mai ka manaʻo o nā loina transistor, no ka loaʻa ʻana o ke alapine kiʻekiʻe a me ka mana kiʻekiʻe, pono ke kiʻekiʻe o ka volta breakdown o ka wahi hōʻiliʻili a pono e liʻiliʻi ke kūʻē moʻo, ʻo ia hoʻi, pono e liʻiliʻi ka hāʻule ʻana o ka volta saturation. Pono ka mea mua e kiʻekiʻe ke kūʻē o ka mea ma ka wahi hōʻiliʻili, ʻoiai ʻo ka mea hope e koi ana e haʻahaʻa ke kūʻē o ka mea ma ka wahi hōʻiliʻili. Kūʻē nā panalāʻau ʻelua kekahi i kekahi. Inā hoʻemi ʻia ka mānoanoa o ka mea ma ka wahi hōʻiliʻili e hoʻemi i ke kūʻē moʻo, e lahilahi loa ka wafer silicon a palupalu e hana ʻia. Inā hoʻemi ʻia ke kūʻē o ka mea, e kūʻē ia i ke koi mua. Eia naʻe, ua holomua ka hoʻomohala ʻana o ka ʻenehana epitaxial. ua hoʻoponopono ʻia kēia pilikia.

Hoʻonā: E hoʻoulu i kahi papa epitaxial kiʻekiʻe-resistivity ma kahi substrate haʻahaʻa loa, a hana i ka hāmeʻa ma ka papa epitaxial. ʻO kēia papa epitaxial kiʻekiʻe-resistivity e hōʻoia i ka loaʻa ʻana o ka paipu i kahi volta breakdown kiʻekiʻe, ʻoiai ʻo ka substrate haʻahaʻa-resistance e hōʻemi pū ia i ke kū'ē o ka substrate, no laila e hōʻemi ana i ka hāʻule ʻana o ka volta saturation, no laila e hoʻoponopono ai i ka kū'ē ma waena o nā mea ʻelua.

Eia kekahi, ua hoʻomohala nui ʻia nā ʻenehana epitaxy e like me ka vapor phase epitaxy a me ka liquid phase epitaxy o GaAs a me nā mea ʻē aʻe III-V, II-VI a me nā mea semiconductor hui molekala ʻē aʻe a ua lilo i kumu no ka hapa nui o nā mea microwave, nā mea optoelectronic, mana He ʻenehana hana pono ia no ka hana ʻana i nā mea hana, ʻoiai ka hoʻohana pono ʻana o ka ʻenehana molekala beam a me ka metala organic vapor phase epitaxy i nā papa lahilahi, superlattices, quantum wells, strained superlattices, a me ka atomic-level thin-layer epitaxy, he hana hou ia i ka noiʻi semiconductor. ʻO ka hoʻomohala ʻana o ka "energy belt engineering" ma ke kahua ua hoʻokumu i kahi kahua paʻa.

I nā hana kūpono, hana pinepine ʻia nā mea semiconductor bandgap ākea ma ka papa epitaxial, a ʻo ka wafer silicon carbide ponoʻī e lawelawe wale ma ke ʻano he substrate. No laila, ʻo ka kaohi ʻana o ka papa epitaxial he ʻāpana koʻikoʻi ia o ka ʻoihana semiconductor bandgap ākea.

7 mau mākau nui i ka ʻenehana epitaxy

1. Hiki ke ulu ʻia nā papa epitaxial kū'ē kiʻekiʻe (haʻahaʻa) ma nā substrates kū'ē haʻahaʻa (kiʻekiʻe).
2. Hiki ke ulu ʻia ka papa epitaxial ʻano N (P) ma ka substrate ʻano P (N) e hana pololei i kahi hui PN. ʻAʻohe pilikia uku i ka wā e hoʻohana ai i ke ʻano diffusion e hana i kahi hui PN ma kahi substrate kristal hoʻokahi.
3. I hui pū ʻia me ka ʻenehana mask, hana ʻia ka ulu ʻana o ka epitaxial koho ma nā wahi i koho ʻia, e hana ana i nā kūlana no ka hana ʻana o nā kaapuni i hoʻohui ʻia a me nā mea hana me nā ʻano kūikawā.
4. Hiki ke hoʻololi ʻia ke ʻano a me ka nui o ka doping e like me nā pono i ka wā o ke kaʻina ulu epitaxial. Hiki i ka loli o ka nui ke lilo i loli koke a i ʻole ka loli lohi.
5. Hiki iā ia ke ulu i nā hui heterogeneous, multi-layered, multi-component a me nā papa ultra-thin me nā ʻāpana loli.
6. Hiki ke hana ʻia ka ulu ʻana o ka epitaxial ma kahi mahana haʻahaʻa ma mua o ka wahi heheʻe o ka mea, hiki ke hoʻokele ʻia ka wikiwiki o ka ulu ʻana, a hiki ke hoʻokō ʻia ka ulu ʻana o ka epitaxial o ka mānoanoa o ka pae atomika.
7. Hiki iā ia ke ulu i nā mea kristal hoʻokahi i hiki ʻole ke huki ʻia, e like me GaN, nā papa kristal hoʻokahi o nā hui tertiary a me quaternary, a pēlā aku.