Te pūtake o te ingoa o te wafer epitaxial
Tuatahi, me whakatairanga tātou i tētahi ariā iti: ko te whakarite i te paparanga he hononga nui e rua: te whakarite i te papa me te tukanga epitaxial. Ko te papa he papa i hangaia mai i te rauemi tioata kotahi haurua-haurua. Ka taea e te papa te uru tika ki te tukanga hanga papa hei hanga i ngā taputapu haurua-haurua, ka taea rānei te tukatuka mā ngā tukanga epitaxial hei hanga i ngā papa epitaxial. Ko te epitaxy e pā ana ki te tukanga whakatipu i tētahi paparanga hou o te tioata kotahi ki runga i tētahi papa tioata kotahi kua tukatukahia ma te tapahi, te huri, te whakakanapa, me ētahi atu. Ka taea e te tioata kotahi hou te rite ki te rauemi o te papa, ka taea rānei te waiho hei rauemi rerekē (homogeneous) epitaxy heteroepitaxy rānei. Nā te mea ka toro atu, ka tipu haere te paparanga tioata kotahi hou i runga i te āhua tioata o te papa, ka kiia he paparanga epitaxial (ko te matotoru he torutoru maikorona te nuinga, me te whakamahi i te silicon hei tauira: ko te tikanga o te tipu epitaxial silicon kei runga i te papa tioata kotahi silicon me tētahi aronga tioata. He paparanga tioata he pai te hanganga whatunga me te rerekētanga o te ātete me te matotoru me te aronga tioata rite tonu ki te papa e tipuhia ana), ā, ko te papa me te paparanga epitaxial ka kiia he papa epitaxial (papa epitaxial = papa epitaxial + papa). Ina hangaia te taputapu ki runga i te papa epitaxial, ka kiia he epitaxy pai. Mena ka hangaia te taputapu ki runga i te papa, ka kiia he epitaxy whakamuri. I tēnei wā, he mahi tautoko noa iho tā te papa epitaxial.
Wafer kua orohia
Ngā tikanga tipu epitaxial
Te epitaxy hihi ngota (MBE): He hangarau tipu epitaxial semiconductor e mahia ana i raro i ngā āhuatanga korehau tino-tiketike. I roto i tēnei tikanga, ka mimitihia te rauemi pūtake hei hihi o ngā ngota ngota, kātahi ka whakatakotoria ki runga i tētahi papa tioata. He hangarau tipu kiriata angiangi semiconductor tino tika, ka taea te whakahaere, ka taea te whakahaere tika i te matotoru o te rauemi kua whakatakotoria i te taumata ngota.
CVD waro konganuku (MOCVD): I roto i te tukanga MOCVD, ka tukuna te konganuku waro me te hau hydride N kei roto ngā huānga e hiahiatia ana ki te papa i te pāmahana e tika ana, ka pāngia e te tauhohenga matū hei whakaputa i te rauemi haurua-ira e hiahiatia ana, ā, ka whakatakotoria ki runga i te papa, i te wā e tukuna atu ai ngā matū me ngā hua tauhohenga e toe ana.
Te epitaxy wāhanga kohu (VPE): He hangarau nui te epitaxy wāhanga kohu e whakamahia whānuitia ana i roto i te hanga taputapu haurua-ira. Ko te kaupapa matua ko te kawe i te kohu o ngā matū taketake, ngā matū rānei i roto i te hau kawe, me te whakatakoto tioata ki runga i te papa mā roto i ngā tauhohenga matū.
He aha ngā raruraru ka whakatauhia e te tukanga epitaxy?
Kāore e taea e ngā rauemi tioata kotahi papatipu anake te whakatutuki i ngā hiahia tipu haere o te hanga i ngā momo taputapu haurua-ira. Nō reira, i whakawhanakehia te tipu epitaxial, he hangarau tipu rauemi tioata kotahi paparanga-angiangi, i te mutunga o te tau 1959. Nō reira, he aha te takoha motuhake a te hangarau epitaxy ki te whakatairanga i ngā rauemi?
Mō te silicon, i te tīmatanga o te hangarau tipu epitaxial silicon, he wā tino uaua tēnei mō te hanga i ngā transistors auau-teitei me te mana-teitei o te silicon. Mai i te tirohanga a ngā mātāpono transistors, kia whiwhi ai i te auau-teitei me te mana-teitei, me teitei te ngaohiko pakaru o te rohe kohikohi me te iti o te ātete raupapa, arā, me iti te hekenga ngaohiko kukū. Ko te tuatahi me teitei te ātete o te rauemi i te rohe kohikohi, ko te tuarua me iti te ātete o te rauemi i te rohe kohikohi. He rerekē ngā wāhanga e rua tetahi ki tetahi. Mena ka whakaitihia te matotoru o te rauemi i te rohe kohikohi hei whakaiti i te ātete raupapa, ka tino angiangi, ka pakarukaru hoki te anga silicon kia kore e taea te tukatuka. Mena ka whakaitihia te ātete o te rauemi, ka whakahē i te whakaritenga tuatahi. Heoi, kua angitu te whanaketanga o te hangarau epitaxial. Kua whakatauhia tēnei uauatanga.
Otinga: Whakatipuhia he paparanga epitaxial ātete-teitei ki runga i tētahi paparanga ātete-iti rawa, ā, hangaia te taputapu ki runga i te paparanga epitaxial. Mā tēnei paparanga epitaxial ātete-teitei ka whakarite kia teitei te ngaohiko pakaru o te ngongo, ā, mā te paparanga ātete-iti ka whakaitihia hoki te ātete o te paparanga, ka whakaitihia te hekenga ngaohiko kukū, ka whakatau i te taupatupatu i waenganui i ngā mea e rua.
Hei tāpiritanga, kua tino whanakehia hoki ngā hangarau epitaxy pēnei i te epitaxy āhua kohu me te epitaxy āhua wai o GaAs me ētahi atu rauemi semiconductor III-V, II-VI me ētahi atu rauemi irahiko matū ngota, ā, kua waiho hei pūtake mō te nuinga o ngā taputapu ngaruiti, ngā taputapu optoelectronic, te hiko. He hangarau tukanga tino nui tēnei mō te hanga taputapu, inā koa te tono angitu o te hangarau epitaxy āhua kohu waro me te konganuku i roto i ngā paparanga angiangi, ngā superlattices, ngā puna irahiko, ngā superlattices kua taurite, me te epitaxy paparanga angiangi taumata-atomika, he taahiraa hou tēnei i roto i te rangahau semiconductor. Ko te whanaketanga o te "hangarau whitiki pūngao" i roto i te mara kua whakatakoto i tētahi turanga pakari.
I roto i ngā mahi whaihua, ko ngā taputapu haurua-āputa whānui te nuinga o te wā e hangaia ana i runga i te paparanga epitaxial, ā, ko te papa silicon carbide tonu te mea hei paparanga. Nō reira, ko te whakahaere i te paparanga epitaxial he wāhanga nui o te umanga haurua-āputa whānui.
7 ngā pūkenga matua i roto i te hangarau epitaxy
1. Ka taea te whakatipu epitaxial i ngā paparanga epitaxial ātete teitei (iti) ki runga i ngā paparanga ātete iti (teitei).
2. Ka taea te whakatipu epitaxial momo N (P) ki runga i te paparanga momo P (N) kia tika ai te hanga hononga PN. Kāore he raruraru utu ina whakamahia te tikanga horapa hei hanga hononga PN ki runga i te paparanga tioata kotahi.
3. Mā te whakamahi tahi me te hangarau kopare, ka mahia te tipu epitaxial whiriwhiri i ngā wāhi kua tohua, ka hangaia he tikanga mō te hanga i ngā ara iahiko whakauru me ngā taputapu me ngā hanganga motuhake.
4. Ka taea te whakarerekē i te momo me te kukū o te tāpiringa i runga i ngā hiahia i te wā o te tukanga tipu epitaxial. Ka taea e te huringa o te kukū te huri ohorere, te huri puhoi rānei.
5. Ka taea e ia te whakatipu i ngā matū kanorau, maha-paparanga, maha-wāhanga me ngā paparanga tino angiangi me ngā wāhanga rerekē.
6. Ka taea te mahi tipu epitaxial i te pāmahana i raro iho i te ira rewa o te rauemi, ka taea te whakahaere i te tere tipu, ā, ka taea te whakatutuki i te tipu epitaxial o te matotoru taumata-atomika.
7. Ka taea e ia te whakatipu i ngā rauemi tioata kotahi e kore e taea te kume, pērā i te GaN, ngā paparanga tioata kotahi o ngā matū tuatoru me ngā matū whā, me ētahi atu.
Wā tuku: Mei-13-2024