Kodi ma epitaxial layers amathandiza bwanji zida za semiconductor?

Chiyambi cha dzina la epitaxial wafer

Choyamba, tiyeni tifalitse lingaliro laling'ono: kukonzekera kwawafa kumaphatikizapo maulalo akuluakulu awiri: kukonzekera kwa gawo lapansi ndi njira ya epitaxial. Gawo lapansi ndi chowotcha chopangidwa ndi semiconductor single crystal material. Gawo laling'ono limatha kulowa mwachindunji munjira yopanga zowotcha kuti zipange zida za semiconductor, kapena zitha kukonzedwa ndi njira za epitaxial kuti apange ma epitaxial wafers. Epitaxy imatanthawuza ndondomeko ya kukula kwa kristalo watsopano pa gawo limodzi la kristalo lomwe lakonzedwa mosamala ndi kudula, kugaya, kupukuta, ndi zina zotero. kristalo watsopano umodzi ukhoza kukhala wofanana ndi gawo lapansi, kapena ukhoza kukhala chinthu chosiyana (homogeneous) epitaxy kapena heteroepitaxy). Chifukwa mtundu watsopano wa kristalo umakulirakulira ndikukula molingana ndi gawo la kristalo, umatchedwa epitaxial wosanjikiza ( makulidwe ake nthawi zambiri amakhala ma microns ochepa, kutenga silicon monga chitsanzo: tanthauzo la kukula kwa silicon epitaxial lili pagawo la silicon limodzi la kristalo lomwe lili ndi mawonekedwe ena a kristalo. gawo lapansi lokhala ndi gawo la epitaxial limatchedwa epitaxial wafer (epitaxial wafer = epitaxial layer + substrate). Pamene chipangizocho chimapangidwa pa epitaxial layer, imatchedwa positive epitaxy. Ngati chipangizocho chapangidwa pa gawo lapansi, chimatchedwa reverse epitaxy. Panthawiyi, epitaxial layer imangogwira ntchito yothandizira.

Mphika wopukutidwa

Njira za kukula kwa Epitaxial

Molecular beam epitaxy (MBE): Ndi teknoloji ya kukula kwa semiconductor epitaxial yomwe imachitidwa pansi pa ultra-high vacuum mikhalidwe. Mwanjira iyi, zinthu zoyambira zimasinthidwa kukhala ngati mtengo wa ma atomu kapena mamolekyu kenako ndikuyikidwa pagawo la crystalline. MBE ndi ukadaulo wolondola kwambiri komanso wosinthika wa semiconductor woonda wa kukula kwa filimu yomwe imatha kuwongolera ndendende makulidwe azinthu zoyikidwa pamlingo wa atomiki.
Metal organic CVD (MOCVD): Mu ndondomeko ya MOCVD, organic metal ndi hydride gas N gasi yomwe ili ndi zinthu zofunikira amaperekedwa ku gawo lapansi pa kutentha koyenera, amakumana ndi mankhwala kuti apange zofunikira za semiconductor, ndipo zimayikidwa pa gawo lapansi, pamene mankhwala otsala ndi zinthu zomwe zimapangidwira zimatulutsidwa.
Vapor phase epitaxy (VPE): Vapor phase epitaxy ndi ukadaulo wofunikira womwe umagwiritsidwa ntchito popanga zida za semiconductor. Mfundo yayikulu ndikunyamula mpweya wa zinthu zoyambira kapena zophatikizika mu gasi wonyamula, ndikuyika makhiristo pagawo laling'ono kudzera pamachitidwe amankhwala.

Ndi mavuto otani omwe ndondomeko ya epitaxy imathetsa?

Zida zambiri za kristalo zokha sizingakwaniritse zosowa zomwe zikukula popanga zida zosiyanasiyana za semiconductor. Chifukwa chake, kukula kwa epitaxial, ukadaulo wocheperako wosanjikiza umodzi wa kristalo, udapangidwa kumapeto kwa 1959. Ndiye ndi chithandizo chotani chomwe ukadaulo wa epitaxy uli nawo pakupititsa patsogolo zinthu?

Kwa silicon, pamene teknoloji ya kukula kwa silicon epitaxial inayamba, inali nthawi yovuta kwambiri kupanga ma transistors a silicon high-frequency ndi high-power. Kuchokera pamalingaliro a mfundo za transistor, kuti mupeze ma frequency apamwamba komanso mphamvu yayikulu, voteji yakuwonongeka kwa malo otolera iyenera kukhala yayikulu ndipo kukana kwa mndandanda kuyenera kukhala kochepa, ndiko kuti, kutsika kwamagetsi kuyenera kukhala kochepa. Zakale zimafuna kuti resistivity ya zinthu mu malo osonkhanitsira ikhale yokwera, pamene yotsirizirayi imafuna kuti resistivity ya zinthu mu malo osonkhanitsira ikhale yotsika. Zigawo ziwirizi zimatsutsana. Ngati makulidwe azinthu m'dera la osonkhanitsa achepetsedwa kuti achepetse kukana kwa mndandanda, chowotcha cha silicon chidzakhala choonda kwambiri komanso chosalimba kuti chisinthidwe. Ngati resistivity ya zinthu yachepetsedwa, izo zikutsutsana ndi chofunika choyamba. Komabe, chitukuko cha luso la epitaxial chakhala chikuyenda bwino. anathetsa vutoli.

Yankho: Kulitsani epitaxial wosanjikiza kwambiri pagawo lotsika kwambiri, ndipo pangani chipangizocho pa epitaxial layer. Epitaxial wosanjikiza wapamwamba kwambiriyu amatsimikizira kuti chubu imakhala ndi mphamvu yowonongeka kwambiri, pamene gawo lapansi lopanda mphamvu limachepetsanso kukana kwa gawo lapansi, potero kuchepetsa kutsika kwa magetsi, potero kuthetsa kutsutsana pakati pa ziwirizi.

Komanso, epitaxy matekinoloje monga nthunzi gawo epitaxy ndi madzi gawo epitaxy wa GaAs ndi III-V, II-VI ndi ena maselo pawiri semiconductor zipangizo akhalanso kwambiri anayamba ndipo akhala maziko a zipangizo ambiri mayikirowevu, optoelectronic zipangizo, mphamvu Ndi wofunika kwambiri ndondomeko luso kupanga zipangizo, makamaka ntchito bwino woonda zitsulo gawo ndi nthunzi wosanjikiza zitsulo makina epita umisiri nthunzi. superlattices, zitsime za quantum, superlattice zosefukira, ndi epitaxy yocheperako ya atomiki, yomwe ndi sitepe yatsopano mu kafukufuku wa semiconductor. Kukula kwa "magetsi lamba lamagetsi" m'munda kwakhazikitsa maziko olimba.

M'magwiritsidwe ntchito, zida zazikulu za bandgap semiconductor pafupifupi nthawi zonse zimapangidwa pamtundu wa epitaxial, ndipo chowotcha cha silicon carbide chokha chimangogwira ntchito ngati gawo lapansi. Chifukwa chake, kuwongolera kwa epitaxial wosanjikiza ndi gawo lofunikira pamakampani opanga ma semiconductor a bandgap.

Maluso 7 akuluakulu muukadaulo wa epitaxy

1. Magawo apamwamba (otsika) otsutsa epitaxial akhoza kukula epitaxially pazigawo zochepa (zapamwamba) zotsutsa.
2. Mtundu wa N (P) wa epitaxial wosanjikiza ukhoza kukula epitaxially pa gawo la P (N) la mtundu wa P (N) kuti apange mgwirizano wa PN mwachindunji. Palibe vuto la chipukuta misozi mukamagwiritsa ntchito njira yophatikizira kupanga gulu la PN pagawo limodzi la kristalo.
3. Kuphatikizana ndi teknoloji ya chigoba, kukula kwa epitaxial kosankha kumachitidwa m'madera osankhidwa, kupanga zinthu zopangira maulendo ophatikizika ndi zipangizo zomwe zimakhala ndi mapangidwe apadera.
4. Mtundu ndi ndondomeko ya doping ikhoza kusinthidwa malinga ndi zosowa panthawi ya kukula kwa epitaxial. Kusintha kwa ndende kungakhale kusintha kwadzidzidzi kapena kusintha pang'onopang'ono.
5. Ikhoza kukula mosiyanasiyana, mitundu yambiri, yamagulu ambiri ndi zigawo zowonda kwambiri zomwe zimakhala ndi zigawo zosiyana.
6. Kukula kwa Epitaxial kungathe kuchitidwa pa kutentha kochepa kusiyana ndi kusungunuka kwa zinthuzo, kukula kwake kumayendetsedwa, ndipo kukula kwa epitaxial kwa makulidwe a atomiki kungatheke.
7. Ikhoza kukula zipangizo za kristalo zomwe sizingakokedwe, monga GaN, zigawo za kristalo imodzi ya mankhwala apamwamba ndi a quaternary, etc.