N'ime mmepụta semiconductor, nhazi okpomọkụ dị elu dị mkpa maka usoro mmepụta wafer dịka oxidation, mgbasa, annealing, na itinye LPCVD. A na-emekarị usoro ndị a n'ime sistemụ ọkụ semiconductor na-arụ ọrụ n'etiti 800°C na 1200°C, ebe nkwụsi ike okpomọkụ, njikwa mmetọ, na nha nha gas na-emetụta mmepụta wafer na arụmọrụ ngwaọrụ ozugbo.
N'ime ihe ndị dị mkpa dị n'ime ọkụ ọkụ,Tube mgbasa ozi SiC— nke a makwaara dị ka ọkpọkọ mgbasa silicon carbide ma ọ bụ ọkpọkọ ọkụ SiC — na-arụ ọrụ dị mkpa n'ịnọgide na-enwe gburugburu usoro kwụsiri ike. Ma e jiri ya tụnyere ọkpọkọ ọkụ quartz ọdịnala, ọkpọkọ mgbasa SiC na-enye ike okpomọkụ dị elu, ike igwe ka mma, na iguzogide kemịkalụ semiconductor siri ike, na-eme ka ha dịkwuo mkpa na mmepụta semiconductor dị elu.
Kedu ihe bụ SiC Diffusion Tube?
Tubọọ mgbasa SiC bụ ụlọ seramiiki dị ka silinda nke nwere okpomọkụ dị elu nke ejiri mee ihe n'ime usoro mgbasa semiconductor na sistemu ọkụ LPCVD. Ọrụ ya bụ imepụta gburugburu ebe dị ọcha ma kwụsie ike maka nhazi wafer.
N'oge a na-arụ ọrụ, a na-etinye ụgbọ mmiri wafer ndị nwere wafer silicon n'ime tube ahụ ebe a na-ahazi gas na-agafe n'ime ụlọ ahụ n'okpuru ọnọdụ okpomọkụ a na-achịkwa nke ọma. Tube mgbasa ozi na-enyere aka ịnọgide na-enwe:
●Nkesa okpomọkụ kwụsiri ike
●Ụsọ gas dị n'otu
●Mmetụta dị ala nke ihe ndị na-adịghị mma
●Mmeghachi omume kemịkalụ a na-achịkwa
A na-ejikarị SiC diffusion tubes eme ihe n'ọtụtụ ebe:
●Ikpo ọkụ mgbasa semiconductor
●Sistemụ ọkụ LPCVD
●Ngwaọrụ oxidation okpomọkụ
●Sistemụ ịgba mmiri
Ngwa ndị a na-ejikarị eme ihe gụnyere:
●Ọgwụ kemịkalụ silicon
●Mgbasa phosphorus
●Mgbasa Boron
●Ntinye Polysilicon
●Ntinye silicon nitride
N'ime ihe ndị e ji eme ihe n'oge a, ihe achọrọ maka otu esi eme ihe n'ime ọkụ na-esi ike nke ukwuu. Dịka ọmụmaatụ, usoro LPCVD dị elu nwere ike ịchọ otu okpomọkụ wafer n'ime ±1°C ruo ±3°C n'ofe mpaghara ọkụ ahụ. Arụmọrụ okpomọkụ nke tube mgbasa ozi na-emetụta ikike a ozugbo.
Ihe Mere E Ji Eji Silicon Carbide (SiC) Eme Ihe Maka Tubes Mgbasa Ozi
Ojiji na-abawanye nke ọkpọkọ mgbasa ozi silicon carbide sitere na ihe pụrụ iche nke SiC n'okpuru ọnọdụ usoro semiconductor dị elu.
Otu n'ime uru kachasị mkpa bụ nkwụsi ike okpomọkụ. SiC nwere ike ịrụ ọrụ mgbe niile na okpomọkụ karịrị 1200°C, ebe ọ na-ejide iguzosi ike n'ezi ihe owuwu n'oge mmegharị okpomọkụ ugboro ugboro.
Uru ọzọ dị mkpa bụ ikesa okpomọkụ. Ikesa okpomọkụ nke SiC na-abụkarị gburugburu:
●120–200 W/m·K maka ịdị ọcha dị elu nke SiC
●Ma e jiri ya tụnyere quartz naanị ~1.4 W/m·K
Ọdịiche dị mkpa a na-enye ohere ka e bufee okpomọkụ ngwa ngwa ma dịkwa otu n'ime ọkụ ahụ, na-enyere aka melite nguzozi usoro wafer-na-wafer.
SiC na-enyekwa ihe ndị a:
●Ọ dị mma iguzogide gas usoro dabere na chlorine na fluorine
● Ike igwe dị elu karịa quartz
●Ọ na-eguzogide oke okpomọkụ nke ọma
●Enweghị ihe ize ndụ nke mgbanwe n'oge usoro mmepụta ogologo oge
Njirimara ndị a na-eme ka ọkpọkọ ọkụ SiC dabara adaba maka gburugburu nhazi okpomọkụ semiconductor dị elu ebe oge ọrụ ogologo oge na imeghachi usoro kwụsiri ike dị oke mkpa.
Ọdịdị na Nhazi nke Tubes Mgbasa Ozi SiC
Ọtụtụ tube mgbasa ozi semiconductor SiC nwere nhazi cylindrical ziri ezi nke emebere maka sistemụ ọkụ kwụ ọtọ ma ọ bụ kwụ ọtọ.
N'adịghị ka ọkpọkọ seramiiki nkịtị nke ụlọ ọrụ mmepụta ihe, ọkpọkọ SiC nke semiconductor chọrọ oke nguzogide nrụpụta n'ihi na mgbanwe obere akụkụ nwere ike imetụta:
●Oge obibi gas
●Nkesa okpomọkụ
●Ọdịiche dị n'etiti Wafer
●Ịhazi nha nhata nke ihe e tinyere
Ọdịdị elu dị n'ime dịkwa oke mkpa. Elu dị nro ma dị ọcha nke ukwuu na-enyere aka belata:
●Ịmepụta ihe ndị na-eme ka ihe ghara ịdị irè
●Ịchịkọta ihe fọdụrụ n'usoro
●Mmetọ ígwè
Ụfọdụ ọkpọkọ ọkụ dị elu na-eji mkpuchi CVD SiC iji melite iguzogide nchara na ịdị ọcha elu.
Ọkpụrụkpụ mgbidi na nhazi ihe owuwu ga-emekwa ka arụmọrụ okpomọkụ na ịdịte aka nke igwe kwụsiri ike. N'oge nhazi semiconductor, ọkpọkọ ọkụ nwere ike ịnweta ọtụtụ narị ma ọ bụ ọbụna puku usoro okpomọkụ na oyi n'oge ọrụ ha.
Ọrụ nke Tubes Mgbasa Ozi SiC na Usoro Semiconductor
N'ime mmepụta semiconductor, tube mgbasa ozi SiC na-arụ ọrụ karịa naanị ụlọ anụ ahụ. Ọ na-emetụta kpọmkwem nkwụsi ike usoro na ịdị mma wafer.
N'ime usoro oxidation okpomọkụ, ọkpọkọ ahụ na-enyere aka ịnọgide na-enwe otu ikuku oxygen na nkwụsi ike okpomọkụ, nke dị mkpa maka imepụta ihe nkiri oxide dị elu.
N'ime usoro mgbasa ozi, ikuku gas kwụsiri ike n'ime tube SiC na-akwado nkesa dopant ziri ezi maka mgbasa phosphorus ma ọ bụ boron.
Maka ngwa LPCVD, dịka polysilicon na silicon nitride deposition, ike okpomọkụ nke SiC na-enyere aka melite nha nha nke ihe nkiri n'ofe wafer batch.
Nsogbu Ndị A Na-ahụkarị nke Tubes Mgbasa Ozi SiC
Ọ bụ ezie na SiC na-enye ezigbo ike, tubes mgbasa ozi ka na-enwe mmekpa ahụ ogologo oge n'okpuru ọnọdụ usoro semiconductor.
Otu nsogbu a na-enwekarị bụ mmetọ nke ihe ndị dị n'ime ya na-akpata site na ịka nká ma ọ bụ mkpokọta ihe fọdụrụ n'usoro. Ka oge na-aga, ikpughe ya ugboro ugboro na kemịkalụ okpomọkụ dị elu nwere ike ime ka elu dị n'ime ya dị nro, na-amụba ohere nke mmetọ.
Mgbawa okpomọkụ bụ ihe ịma aka ọzọ. Mgbawa okpomọkụ ngwa ngwa ma ọ bụ ibufe wafer na-adịghị mma nwere ike ibute nrụgide okpomọkụ nke nwere ike imecha kpatara obere mgbawa ma ọ bụ mmebi nhazi.
Mbibi kemịkalụ nwekwara ike ime n'okpuru ebe nhicha dị egwu nke dabere na halogen. Ikpughe gas nwere fluorine ogologo oge nwere ike imebi elu tube ahụ nwayọ nwayọ ma metụta nkwụsi ike usoro.
N'ebe mmepụta ihe, nsogbu ndị a nwere ike ibute:
●Mgbanwe okpomọkụ
●Ihe nkiri anaghị adị ka otu
●Mmụba ọnụọgụ nke ihe ndị dị n'ime ya
●Mbelata ikike imeghachi usoro
N'ihi nke a, ihe ndị na-emepụta semiconductor na-enyocha arụmọrụ nke ọkpọkọ ọkụ site na mmemme nhazi oge niile na mmezi mgbochi.
Nlekọta na Njikwa Ndụ
Nlekọta kwesịrị ekwesị dị mkpa iji mee ka ndụ ọrụ nke sistemu ahụ dịkwuo ogologoỌkụ ọkụ SiCna ịnọgide na-enwe arụmọrụ usoro semiconductor kwụsiri ike.
Ọtụtụ ákwà na-eme usoro nlele nhazi oge nke gụnyere:
●Nnyocha elu anya
●Nlekota usoro ihe nketa
●Nnwale asambodo ọkụ
●Nkwenye nha anya okpomọkụ
Ụzọ nhicha nwere ike ịgụnye nhicha kemịkalụ mmiri mmiri ma ọ bụ ọgwụgwọ ime achịcha na-ekpo ọkụ iji wepụ ihe fọdụrụ n'usoro.
Na mmepụta semiconductor dị elu, mgbanwe tube mgbasa ozi na-adaberekarị na:
●Awa ọrụ
●Ọnụ ọgụgụ nke okirikiri okpomọkụ
●Arụmọrụ ihe ndị dị ndụ
●Oke ntozu oke
Kama ichere maka mmebi a na-ahụ anya, ákwà ndị e ji ákwà rụọ na-anọchikarị ọkpọkọ ọkụ tupu usoro ntụgharị ahụ emetụta mmepụta wafer.
Ka teknụzụ semiconductor na-aga n'ihu na obere usoro nhazi na ngwa okpomọkụ siri ike karị, mkpa nke ntụkwasị obiọkpọkọ mgbasa ozi silicon carbidega-anọgide na-eto. Ikike ha nwere ịkwado nhazi okpomọkụ kwụsiri ike, obere mmetọ, na ntụkwasị obi ọkụ ogologo oge na-eme ka ha bụrụ ihe dị mkpa na ngwa mmepụta semiconductor nke oge a.
Oge ozi: Mee-08-2026