Ka mmepụta semiconductor na-agbanwe gaa na obere geometrị ngwaọrụ, mmụba nke wafer, na ụkpụrụ njikwa mmetọ siri ike, akụrụngwa nhazi okpomọkụ na-eche ihe ịma aka injinia ihu na-enweghị atụ. Usoro dịka LPCVD, oxidation okpomọkụ, mgbasa dopant, na annealing okpomọkụ dị elu ugbu a chọrọ ọ bụghị naanị ịdị n'otu okpomọkụ siri ike, kamakwa oge ọrụ ngwa ngwa ogologo oge, mmepụta obere ihe, na mmezi usoro ka mma.
Ọ bụ ezie na a na-eleghara ya anya ma e jiri ya tụnyere gas usoro, ọkpọkọ ọkụ, ma ọ bụ kemịkalụ nchekwa, paddle cantilever na-ekpebi otu wafers si akpa àgwà n'ime gburugburu ebe okpomọkụ dị elu. N'ọtụtụ ihe ndị dị elu, a naghịzi ewere ya dị ka ihe dị mfe a na-eri, kama ọ bụ ihe dị mkpa maka nhazi semiconductor kwụsiri ike ma na-emegharị ugboro ugboro.
Kedu ihe bụ SiC Cantilever Paddle?
SiC Cantilever Paddle bụ ihe owuwu silicon carbide dị ọcha nke ejiri mee ihe karịsịa na ọkụ mgbasa semiconductor na sistemụ LPCVD. A na-emepụta ya dị ka ihe owuwu ogologo cantilever nke nwere ike ịkwado ụgbọ mmiri quartz ma ọ bụ SiC wafer n'oge nhazi okpomọkụ dị elu.
A na-ejikarị ihe mejupụtara ya eme ihe:
● silikọn carbide e megharịrị emegharị (RSiC)
● anwụrụ kemịkalụ e tinyere na silicon carbide (CVD SiC)
● ihe SiC jikọtara ya na mmeghachi omume dị elu
Dịka data ihe CoorsTek na Saint-Gobain Performance Ceramics si kwuo, ihe SiC dị ọcha nke ukwuu na-egosipụtakarị:
● Ọkwa okpomọkụ: ihe dị ka 120–200 W/m·K n'ọnọdụ okpomọkụ ụlọ
● Oke okpomọkụ kachasị elu n'ime ikuku na-adịghị arụ ọrụ: karịa 1600°C.
● Ọnụọgụ nke mgbasawanye okpomọkụ (CTE): ihe dị ka 4.0–4.5×10⁻⁶/K.
● Ọ na-eguzogide ọgwụ HCl, NH₃, O₂, na kemịkalụ usoro chlorine dị mma.
Ọrụ nke SiC Cantilever Paddle na nhazi LPCVD
N'ime ngwa niile, sistemụ LPCVD na-anọchite anya otu n'ime ihe kachasị mkpa eji eme ihe maka SiC Cantilever Paddles.
Usoro dịka:
● ihe e ji etinye polysilicon.
● silicon nitride (Si₃N₄).
● Ndobe oxide dị ala.
Ọ na-arụkarị ọrụ n'etiti 500°C na 900°C, ọtụtụ mgbe n'okpuru usoro nhazi ogologo oge na gburugburu kemịkalụ na-arụ ọrụ nke ọma.
N'ime sistemụ ndị a, paịlị cantilever na-arụ ọtụtụ ọrụ dị mkpa n'otu oge.
Nke mbụ, ọ na-enye ụgbọ mmiri wafer na-abanye ma na-apụ na ọkpọkọ ọkụ. Ebe ọ bụ na ọkụ eletrik nke oge a nwere ike ibu ọtụtụ narị wafers kwa otu, ọbụna obere mgbanwe paddle nwere ike ibute nhazi wafer na-adịghị mma, oghere na-adịghị akwụsi ike, ma ọ bụ mkpokọta nrụgide mechanical.
Nke abụọ, paddle na-arụ ọrụ dị mkpa n'ịdị n'otu okpomọkụ. Oke ike okpomọkụ nke SiC na-enye ohere ka okpomọkụ kesaa nke ọma n'akụkụ ihe nkwado ahụ, na-ebelata oke okpomọkụ mpaghara nke nwere ike imetụta ịdị n'otu nke ihe ndị a na-etinye.
Nke atọ, mmepụta obere ihe dị oke mkpa. Mkpụrụ semiconductor bụ ihe na-egbu ihe ọkụkụ kpọmkwem, ọkachasị na mmepụta usoro ihe ọmụma dị elu na ike semiconductor. N'ihi nhazi seramiiki ya dị oke njọ na iguzogide nchara siri ike, SiC dị ọcha nke ukwuu na-ebelata ihe egwu nke ịwụfu ihe ọkụkụ ma e jiri ya tụnyere ihe ọdịnala.
N'ime usoro mmepụta LPCVD dị elu, nkwụsi ike ogologo oge nke paddle na-emetụta ozugbo:
● nha nhata nke ihe nkiri ahụ.
● ike imeghachi omume nke wafer-site-wafer.
● oge ọrụ ọkụ.
Ningbo VET Energy bụ ọkachamara na graphite dị elu, seramiiki silicon carbide, na ihe ndị e ji ekpuchi semiconductor nke e mere maka gburugburu ebe mmepụta semiconductor siri ike.
Ngwaahịa Core semiconductor gụnyere:
● SiC Cantilever Paddle
● Ihe mkpuchi eserese eserese SiC
● Onye na-ebu Wafer a kpụchara akpụ nke SiC
● Ihe mejupụtara ọkara ọnwa a kpuchiri SiC
● Igwe eji akpọ carbon-carbon
● E ji ajị anụ mee ihe na eserese graphite siri ike
A na-ejikarị ngwaahịa ndị a eme ihe n'ọtụtụ ebe:
● Sistemụ Epitaxy
● Ndị na-arụ ọrụ LPCVD
● Ọkụ mgbasa ozi
● Sistemụ uto kristal SiC
● Ngwa nhazi okpomọkụ dị elu.
Site na mmụba ngwa ngwa nke SiC na mmepụta semiconductor ike dị elu, ọchịchọ maka ihe ndị dị n'ime ọkụ dị ọcha ma kwụsie ike ga-anọgide na-abawanye. N'ọnọdụ a, teknụzụ SiC Cantilever Paddle ga-anọgide na-abụ otu n'ime ihe ndị bụ isi na-akwado nhazi semiconductor ọgbọ na-abịa.
Oge ozi: Mee-14-2026