Ekukhiqizweni kwe-semiconductor, ukucubungula ukushisa okuphezulu kubalulekile ezinyathelweni zokwenziwa kwe-wafer njengokufaka i-oxidation, ukusabalala, ukufakelwa kwe-annealing, kanye nokufakwa kwe-LPCVD. Lezi zinqubo zivame ukwenziwa ngaphakathi kwezinhlelo ze-semiconductor furnace ezisebenza phakathi kuka-800°C no-1200°C, lapho ukuzinza kokushisa, ukulawulwa kokungcola, kanye nokufana kwegesi kuthinta ngqo ukukhiqizwa kwe-wafer kanye nokusebenza kwedivayisi.
Phakathi kwezingxenye ezibalulekile zesithando somlilo,Ishubhu lokusabalalisa le-SiC— eyaziwa nangokuthi i-silicon carbide diffusion tube noma i-SiC furnace tube — idlala indima ebalulekile ekugcineni indawo yenqubo ezinzile. Uma kuqhathaniswa nama-quartz furnace tubes endabuko, ama-SiC diffusion tubes ahlinzeka ngokushisa okuphezulu, amandla angcono okusebenza, kanye nokumelana okuphezulu namakhemikhali e-semiconductor aqinile, okwenza abe abaluleke kakhulu ekukhiqizweni kwe-semiconductor okuthuthukile.
Iyini i-SiC Diffusion Tube?
Ishubhu lokusabalalisa le-SiC liyigumbi le-ceramic eliyindilinga elinokushisa okuphezulu elisetshenziswa ngaphakathi kwezinhlelo zokusabalalisa ze-semiconductor kanye ne-LPCVD furnace. Umsebenzi walo oyinhloko ukudala indawo ehlanzekile nezinzile ngokushisa ukuze kucutshungulwe i-wafer.
Ngesikhathi sokusebenza, izikebhe ze-wafer ezigcwele ama-wafer e-silicon zifakwa ngaphakathi kwepayipi ngenkathi amagesi okucubungula egeleza egumbini ngaphansi kwezimo zokushisa ezilawulwa ngokucophelela. Ipayipi lokusabalalisa lisiza ekugcineni:
●Ukusatshalaliswa kokushisa okuzinzile
●Ukugeleza kwegesi okufanayo
●Ukungcola okuphansi kwezinhlayiya
●Ukusabela kwamakhemikhali okulawulwayo
Amashubhu okusabalalisa i-SiC asetshenziswa kabanzi ku:
●Izithando zokusabalalisa ze-semiconductor
●Izinhlelo zesithando somlilo se-LPCVD
●Imishini yokushisa
●Izinhlelo zokufaka amanzi
Izinhlelo zokusebenza ezijwayelekile zifaka:
●Ukushiswa kwe-silicon
●Ukusabalala kwe-phosphorus
●Ukusabalala kwe-boron
●Ukufakwa kwe-Polysilicon
●Ukufakwa kwe-silicon nitride
Ezindaweni zanamuhla zokuhlobisa, izidingo zokufana kwenqubo yesithando somlilo ziqinile kakhulu. Isibonelo, izinqubo ze-LPCVD ezithuthukisiwe zingadinga ukufana kwezinga lokushisa le-wafer ngaphakathi kuka-±1°C kuya ku-±3°C kulo lonke indawo yesithando somlilo. Ukusebenza kokushisa kwepayipi lokusabalalisa kuthinta ngqo leli khono.
Kungani I-Silicon Carbide (SiC) Isetshenziselwa Amapayipi Okusabalalisa
Ukusetshenziswa okwandayo kwamashubhu okusabalalisa e-silicon carbide kuvela ezicini ezibonakalayo ze-SiC ngaphansi kwezimo zenqubo ye-semiconductor yokushisa okuphezulu.
Enye yezinzuzo ezibaluleke kakhulu ukuzinza kokushisa. I-SiC ingasebenza njalo emazingeni okushisa angaphezu kuka-1200°C, ngenkathi igcina ubuqotho obuqinile besakhiwo ngesikhathi sokujikeleza kokushisa okuphindaphindiwe.
Enye inzuzo ebalulekile ukuqhutshwa kokushisa. Ukuqhutshwa kokushisa kwe-SiC ngokuvamile kuzungeze:
●120–200 W/m·K ye-SiC ehlanzekile kakhulu
●Uma kuqhathaniswa ne-quartz ku-~1.4 W/m·K kuphela
Lo mehluko obalulekile uvumela ukudluliselwa kokushisa okusheshayo nokufana kakhulu ngaphakathi kwesithando, okusiza ekuthuthukiseni ukuhambisana kwenqubo ye-wafer-to-wafer.
I-SiC iphinde inikeze:
● Ukumelana okuhle kakhulu namagesi enqubo asekelwe ku-chlorine kanye ne-fluorine
● Amandla aphezulu omshini kune-quartz
●Ukumelana okungcono nokushaqeka kokushisa
●Ingozi ephansi yokuguquguquka phakathi nemijikelezo emide yokukhiqiza
Lezi zici zenza amashubhu esithando se-SiC afaneleke kakhulu ezindaweni zokucubungula ukushisa ze-semiconductor ezithuthukisiwe lapho ukusebenza isikhathi eside kanye nokuphindaphinda kwenqubo okuzinzile kubalulekile.
Izici Zesakhiwo Nokuklama Zamashubhu Okusabalalisa e-SiC
Amashubhu amaningi okusabalalisa e-semiconductor SiC aqukethe umklamo oqondile we-cylindrical olungiselelwe izinhlelo zesithando esiqondile noma esivundlile.
Ngokungafani namashubhu e-ceramic avamile ezimboni, amashubhu e-SiC ebanga le-semiconductor adinga ukubekezelelana kokukhiqiza okuqinile kakhulu ngoba izinguquko ezincane zobukhulu zingathinta:
●Isikhathi sokuhlala ngephethiloli
●Ukusatshalaliswa kokushisa
●Isikhala se-wafer
●Ukufana kokubekwa kwesikhundla
Ikhwalithi yobuso bangaphakathi nayo ibaluleke kakhulu. Izindawo ezibushelelezi nezihlanzekile kakhulu zisiza ekunciphiseni:
●Ukukhiqiza izinhlayiya
●Cubungula ukwakheka kwezinsalela
●Ukungcola kwensimbi
Amanye amashubhu esithando asezingeni eliphezulu asebenzisa izembozo ze-CVD SiC ukuze athuthukise ukumelana nokugqwala kanye nobumsulwa bomphezulu.
Ubukhulu bodonga kanye nomklamo wesakhiwo kumele futhi kulinganise ukusebenza kahle kokushisa nokuqina komshini. Ngesikhathi sokucubungula ama-semiconductor, amashubhu esithando angase abhekane namakhulu noma ngisho nezinkulungwane zemijikelezo yokushisa nokupholisa phakathi nesikhathi sawo sokusebenza.
Indima Yamashubhu Okusabalalisa e-SiC Ezinqubweni Ze-Semiconductor
Ekukhiqizweni kwe-semiconductor, ithubhu lokusabalalisa i-SiC lisebenza njengokungaphezu nje kwegumbi elibonakalayo. Lithinta ngqo ukuzinza kwenqubo kanye nekhwalithi ye-wafer.
Ezinqubweni zokushiswa kokushisa, ithubhu lisiza ukugcina ukugeleza komoya-mpilo okufanayo kanye nokuqina kokushisa, okubalulekile ekukhiqizeni amafilimu e-oxide asezingeni eliphezulu.
Ezinqubweni zokusabalalisa, ukugeleza kwegesi okuzinzile ngaphakathi kwe-SiC tube kusekela ukusatshalaliswa okunembile kwe-dopant kokusabalalisa kwe-phosphorus noma i-boron.
Ngezinhlelo zokusebenza ze-LPCVD, njenge-polysilicon kanye ne-silicon nitride deposition, i-thermal conductivity ye-SiC isiza ukuthuthukisa ukufana kobukhulu befilimu kulo lonke i-wafer batch.
Izinkinga Ezivamile Zamapayipi Okusabalalisa I-SiC
Nakuba i-SiC inikeza ukuqina okuhle kakhulu, amashubhu okusabalalisa asabhekana nokuguguleka kwesikhathi eside ngaphansi kwezimo zenqubo ye-semiconductor.
Inkinga eyodwa evamile ukungcoliswa kwezinhlayiya okubangelwa ukuguga kwendawo noma ukuqongelela kwezinsalela zenqubo. Ngokuhamba kwesikhathi, ukuchayeka ngokuphindaphindiwe kumakhemikhali okushisa okuphezulu kungawohloza kancane kancane indawo yangaphakathi, okwandisa ingozi yokungcoliswa.
Ukuqhekeka kokushisa kungenye inselele. Ukusheshisa okusheshayo noma ukulayisha okungalingani kwe-wafer kungabangela ukucindezeleka kokushisa okungase kubangele ukuqhekeka okuncane noma ukwehluleka kwesakhiwo.
Ukuguguleka kwamakhemikhali nakho kungenzeka ngaphansi kwezimo zokuhlanza ezisebenzisa i-halogen. Ukuchayeka isikhathi eside kumagesi aqukethe i-fluorine kungawohloza kancane kancane ubuso bepayipi futhi kuthinte ukuzinza kwenqubo.
Ezindaweni zokukhiqiza, lezi zinkinga zingaholela ku:
●Ukushisa okuguquguqukayo
● Ukungalingani kwefilimu
●Ukwanda kokubalwa kwezinhlayiya
●Ukuphindaphinda kwenqubo okuncishisiwe
Ngenxa yalesi sizathu, ama-semiconductor fabs ngokuvamile aqapha ukusebenza kweshubhu lesithando ngezinhlelo zokufaneleka ezijwayelekile kanye nokugcinwa kokuvimbela.
Ukugcinwa Nokuphathwa Kwempilo Yonke
Ukugcinwa okufanele kubalulekile ukuze kwandiswe isikhathi sokusebenza kweAmashubhu esithando se-SiCkanye nokugcina ukusebenza kwenqubo ye-semiconductor okuzinzile.
Iningi lezinto zokuhlobisa lisebenzisa imijikelezo yokuhlola ehleliwe ehlanganisa:
●Ukuhlolwa kobuso obubonakalayo
●Ukuqapha izitayela zezinhlayiya
●Ukuhlolwa kweziqu zesithando somlilo
●Ukuqinisekiswa kokufana kokushisa
Izindlela zokuhlanza zingafaka phakathi ukuhlanza ngamakhemikhali okumanzi noma ukwelashwa ngokubhaka okushisa okuphezulu ukuze kususwe izinsalela zenqubo.
Ekukhiqizweni kwe-semiconductor ephezulu, ukushintshwa kweshubhu lokusabalalisa kuvame ukusekelwe ku:
●Amahora enqubo
●Ukubalwa kwemijikelezo yokushisa
● Ukusebenza kwezinhlayiya
●Imikhawulo yokufaneleka
Esikhundleni sokulinda umonakalo obonakalayo, ama-fab avame ukufaka esikhundleni samashubhu esithando ngaphambi kokuba inqubo yokukhukhuleka ithinte isivuno se-wafer.
Njengoba ubuchwepheshe be-semiconductor buqhubekela phambili bubheke kuma-node amancane enqubo kanye nokusetshenziswa kokushisa okudinga kakhulu, ukubaluleka kokuthembekaamashubhu okusabalalisa i-silicon carbidezizoqhubeka zikhula. Amandla azo okusekela ukucutshungulwa kokushisa okuzinzile, ukungcola okuphansi, kanye nokuthembeka kwesithando somlilo isikhathi eside kuzenza zibe yizingxenye ezibalulekile emishinini yokukhiqiza yesimanje ye-semiconductor.
Isikhathi sokuthunyelwe: Meyi-08-2026