Mukugadzira ma semiconductor, kugadzirisa kupisa kwakanyanya kwakakosha pamatanho ekugadzira ma wafer akadai se oxidation, diffusion, annealing, uye LPCVD deposition. Maitiro aya anowanzoitwa mukati mema semiconductor furnace systems anoshanda pakati pe800°C ne1200°C, uko kugadzikana kwetembiricha, kudzora kusvibiswa, uye kufanana kwegasi zvinokanganisa zvakananga goho re wafer uye mashandiro emudziyo.
Pakati pezvinhu zvakakosha zvechoto,Chubhu yekupararira kweSiC— inozivikanwawo sechubhu yesilicon carbide diffusion kana kuti SiC furnace tube — inoita basa guru mukuchengetedza mamiriro ekushanda akagadzikana. Kana tichienzanisa nemachubhu echinyakare equartz furnace, machubhu eSiC diffusion anopa kupisa kwakanyanya, simba riri nani remakanika, uye kuramba zvakanyanya kumakemikari e semiconductor akaomarara, zvichiita kuti ave akakosha mukugadzira semiconductor yepamusoro.
Chii chinonzi SiC Diffusion Tube?
Chubhu yeSiC diffusion ikamuri receramic rakaita sedenderedzwa rinopisa zvakanyanya rinoshandiswa mukati me semiconductor diffusion uye LPCVD furnace systems. Basa rayo guru nderekugadzira nzvimbo yakachena uye yakagadzikana pakupisa kuti igadziriswe wafer.
Panguva yekushanda, mawafer boats ane silicon wafers anoiswa mukati mechubhu ukuwo magasi ekugadzira achiyerera nemukamuri pasi pemamiriro ekupisa akanyatsodzorwa. Chubhu yekupararira inobatsira kuchengetedza:
●Kupararira kwekupisa kwakasimba
●Kuyerera kwegasi kwakafanana
●Kusvibiswa kushoma kwezvimedu
●Kuita kwemakemikari kunodzorwa
Machubhu eSiC anoshandiswa zvakanyanya mu:
●Mafuta ekupararira kweSemiconductor
●Sisitimu dzechoto cheLPCVD
●Midziyo yekupisa mafuta
●Maitiro ekunyungudutsa
Maitiro akajairika anosanganisira:
●Kuoresa silicon
●Kupararira kwephosphorus
●Kupararira kweBoron
●Kuisa polysilicon
●Kuisa silicon nitride
Muzvinhu zvemazuva ano zvekugadzira zvinhu zvakafanana, zvinodiwa pakufanana kwezvishandiso zvechoto zvakanyanya kuomarara. Semuenzaniso, maitiro epamusoro eLPCVD anogona kuda kufanana kwekushisa kwewafer mukati me ±1°C kusvika ±3°C munzvimbo yese yechoto. Kushanda kwekupisa kwechubhu yekupararira kunokanganisa zvakananga kugona uku.
Nei Silicon Carbide (SiC) Inoshandiswa paMachubhu eDiffusion
Kushandiswa kuri kuwedzera kwemachubhu esilicon carbide diffusion kunobva muhunhu hwakanaka hweSiC pasi pemamiriro ekushanda kwe semiconductor anodziya zvakanyanya.
Chimwe chezvakanakira zvakakosha kugadzikana kwekupisa. SiC inogona kushanda nguva dzose patembiricha iri pamusoro pe1200°C, uku ichichengetedza chimiro chakasimba panguva yekupisa kunodzokororwa.
Imwe mukana mukuru ndeyekufambiswa kwemhepo nekupisa. Kufambiswa kwemhepo nekupisa kweSiC kunowanzoita seizvi:
●120–200 W/m·K yeSiC yakachena kwazvo
●Zvichienzaniswa nequartz pa ~1.4 W/m·K chete
Musiyano uyu wakakosha unobvumira kutamiswa kwekupisa nekukurumidza uye kwakafanana mukati mechoto, zvichibatsira kuvandudza kuenderana kwemaitiro ewafer-to-wafer.
SiC inopawo:
●Inodzivirira zvakanyanya magasi anokonzerwa ne chlorine ne fluorine
●Simba remuchina rakakwirira kupfuura quartz
●Kurapwa kuri nani nekupisa kwakanyanya
●Njodzi shoma yekukanganisika kweganda panguva yekugadzirwa kwenguva refu
Hunhu uhwu hunoita kuti machubhu eSiC furnace anyatsokodzera nzvimbo dzepamusoro dzekugadzirisa kupisa kwe semiconductor uko kushanda kwenguva refu uye kudzokorora kwakasimba kwemaitiro kwakakosha.
Maumbirwo uye Hunhu hweSiC Diffusion Tubes
Machubhu mazhinji eSiC diffusion ane dhizaini chaiyo yakagadzirwa kuti ishandiswe mumidziyo yemoto yakatwasuka kana kuti yakatwasuka.
Kusiyana nemachubhu eceramic emuindasitiri, machubhu eSiC emhando ye semiconductor anoda kushivirira kwakasimba kwekugadzirwa nekuti shanduko diki dzinogona kukanganisa:
●Nguva yekugara nepeturu
●Kugoverwa kwekupisa
●Kupatsanurana kwewafer
●Kufanana kwekuisa zvinhu panzvimbo imwe chete
Hunhu hwemukati meimba hwakakoshawo zvikuru. Nzvimbo dzakapfava uye dzakachena zvakanyanya dzinobatsira kuderedza:
●Kugadzirwa kwezvikamu
●Kugadzira zvisaririra zvemvura
●Kusvibiswa nesimbi
Mamwe machubhu emhando yepamusoro anoshandisa machira eCVD SiC kuti awedzere kuvandudza kuramba ngura uye kuchena kwenzvimbo.
Ukobvu hwemadziro uye dhizaini yechivako zvinofanirawo kuenzana nekushanda zvakanaka kwekupisa nekugara kwenguva refu kwemuchina. Munguva yekugadzirisa semiconductor, machubhu echoto anogona kusangana nemazana kana kunyange zviuru zvekuchinja kwekupisa nekutonhodza mukati mehupenyu hwawo hwekushanda.
Basa reSiC Diffusion Tubes muSemiconductor Processes
Mukugadzira zvinhu zvakaita se semiconductor, chubhu yeSiC diffusion inoshanda kupfuura kungoshanda senzvimbo chaiyo. Inokanganisa zvakananga kugadzikana kwemaitiro uye kunaka kwewafer.
Mumaitiro ekupisa, chubhu inobatsira kuchengetedza kuyerera kweokisijeni kwakafanana uye kugadzikana kwetembiricha, izvo zvakakosha pakugadzira mafirimu eokisijeni emhando yepamusoro.
Munzira dzekupararira, kuyerera kwegasi kwakasimba mukati meSiC tube kunotsigira kugoverwa kwakarurama kwedopant yekupararira kwephosphorus kana boron.
Pakushandisa LPCVD, senge polysilicon nesilicon nitride deposition, thermal conductivity yeSiC inobatsira kuvandudza kufanana kweukobvu hwefirimu muwafer batch yese.
Matambudziko Akajairika eSiC Diffusion Tubes
Kunyange zvazvo SiC ichigara kwenguva refu, machubhu ekuparadzira mvura achiri kushanda kwenguva refu pasi pemamiriro ezvinhu e semiconductor process.
Dambudziko rinowanzoitika nderekusvibiswa kwezvimedu zvinokonzerwa nekuchembera kwenzvimbo kana kuunganidzwa kwezvimedu zvema process. Nekufamba kwenguva, kugara uchisangana nemakemikari anodziya zvakanyanya kunogona kukuvadza nzvimbo yemukati zvishoma nezvishoma, zvichiwedzera njodzi yekusvibiswa.
Kutsemuka kwekupisa ndeimwe dambudziko. Kukurumidza kukwira kwekupisa kana kuzara kwewafer zvisina kuenzana kunogona kukonzera kushushikana kwekupisa uko kunogona kukonzera kutsemuka kwemicroscope kana kutadza kwechimiro.
Kukukurwa kwemakemikari kunogonawo kuitika munzvimbo dzinocheneswa dzine halogen. Kugara kwenguva refu uchisangana nemagasi ane fluorine kunogona kukanganisa zvishoma nezvishoma nzvimbo yechubhu uye kukanganisa kugadzikana kwemaitiro.
Munzvimbo dzekugadzira, matambudziko aya anogona kukonzera:
●Kutonhora kunofamba
● Kusafanana kwemafirimu
●Kuwanda kwehuwandu hwezvimedu
●Kudzokororwa kwemaitiro kwakaderera
Nechikonzero ichi, ma semiconductor fabs anowanzo tarisa mashandiro echubhu yefurnace kuburikidza nehurongwa hwenguva dzose hwekugadzirisa uye zvirongwa zvekudzivirira.
Kugadzirisa uye Kutarisira Hupenyu Hwese
Kugadziriswa kwakakodzera kwakakosha kuti hupenyu hwekushanda huwedzereMachubhu eSiC furnaceuye kuchengetedza mashandiro akagadzikana e semiconductor process.
Mazhinji mafekitori anoshandisa maitiro ekuongorora akarongwa anosanganisira:
●Kuongorora pamusoro pechinhu chinoonekwa
●Kutarisa mafambiro ezvikamu
●Kuongororwa kwezvitupa zvemoto
●Kuongorora kufanana kwekupisa
Nzira dzekuchenesa dzingasanganisira kuchenesa nemakemikari akanyorova kana kurapa nekupisa kwakanyanya kuti ubvise zvasara zvemuchina.
Mukugadzirwa kwe semiconductor ine huwandu hwakawanda, kutsiva machubhu ekupararira kunowanzo enderana ne:
● Maawa ekushanda
●Kuverengwa kwemafambiro ekupisa
●Kushanda kwezvikamu
●Miganhu yekukodzera
Pane kumirira kukuvara kunooneka, machira anowanzo tsiva machubhu emoto usati wakanganisa goho rewafer.
Sezvo tekinoroji yesemiconductor ichifambira mberi kuenda kuma "process nodes" madiki uye mashandisirwo ekupisa anoda simba, kukosha kwe "trustee"machubhu ekupararira kwesilicon carbideicharamba ichikura. Kugona kwavo kutsigira kugadziriswa kwekupisa kwakasimba, kusvibiswa kushoma, uye kuvimbika kwechoto kwenguva refu kunoita kuti zvive zvinhu zvakakosha mumichina yemazuva ano yekugadzira semiconductor.
Nguva yekutumira: Chivabvu-08-2026