I roto i te hanga haurua-haurua, he mea nui te tukatuka wera pāmahana teitei mō ngā mahi hanga wafer pēnei i te waikura, te horapa, te whakamahana, me te whakatakotoranga LPCVD. Ko ēnei tukanga ka mahia i roto i ngā pūnaha oumu haurua-haurua e mahi ana i waenga i te 800°C me te 1200°C, ka pā tika te pumau o te pāmahana, te whakahaere poke, me te ōritetanga hau ki te hua wafer me te mahi a te taputapu.
I roto i ngā wāhanga nui o te oumu, ko teNgongo horapa SiC— e mōhiotia ana ko te ngongo tohatoha silicon carbide, ko te ngongo oumu SiC rānei — he mahi nui tāna ki te pupuri i te taiao tukanga pumau. Ki te whakatauritea ki ngā ngongo oumu quartz tuku iho, ka whakaratohia e ngā ngongo tohatoha SiC he kawe wera teitei ake, he kaha miihini pai ake, me te ātete pai ki ngā matū semiconductor kaha, ka nui haere te hiranga o ēnei i roto i te hanga semiconductor matatau.
He aha te Ngongo Whakawhiti SiC?
He rūma uku pāmahana-teitei porotaka te ngongo tohatoha SiC e whakamahia ana i roto i ngā pūnaha tohatoha haurua-haurua me ngā pūnaha oumu LPCVD. Ko tana mahi matua he waihanga i tētahi taiao ma, pumau hoki mō te tukatuka wafer.
I te wā e whakahaerehia ana, ka whakanohoia ngā poti wafer kua utaina ki ngā wafer silicon ki roto i te ngongo, i te wā e rere ana ngā hau tukatuka i roto i te rūma i raro i ngā tikanga pāmahana e āta whakahaerehia ana. Ka āwhina te ngongo horapa ki te pupuri i:
●Te tohatoha wera pumau
●Te rere ōrite o te hau
●He iti te poke o ngā matūriki
●Ngā tauhohenga matū whakahaeretia
E whakamahia whānuitia ana ngā ngongo horapa SiC i roto i:
●Ngā oumu horapa hiko-haurua
●Ngā pūnaha oumu LPCVD
●Ngā taputapu whakahāora wera
●Ngā pūnaha whakamahana
Ko ngā tono noa ko:
●Te whakapūngao o te silicon
●Te horapa o te whākawa
●Te horapa o te boron
●Te whakatakotoranga o te polysilicon
●Te whakatakotoranga hauota silicon
I roto i ngā whare hanga hou, he tino pakari ngā whakaritenga mō te ōritetanga o te tukanga oumu. Hei tauira, ko ngā tukanga LPCVD matatau ka hiahia pea kia ōrite te pāmahana o te papa whakarewa i waenga i te ±1°C ki te ±3°C puta noa i te rohe oumu. Ka pā tika te mahi wera o te ngongo horapa ki tēnei āheinga.
He aha i whakamahia ai te Silicon Carbide (SiC) mō ngā Ngongo Horoho
Ko te whakamahinga nui haere o ngā ngongo tohatoha silicon carbide i ahu mai i ngā āhuatanga rauemi tino pai o te SiC i raro i ngā tikanga tukanga semiconductor pāmahana teitei.
Ko tētahi o ngā painga nui ko te pumau o te wera. Ka taea e te SiC te mahi tonu i ngā pāmahana neke atu i te 1200°C, me te pupuri tonu i te hanganga pakari i te wā e huri haere ana te wera.
Ko tētahi atu painga matua ko te kawe wera. Ko te kawe wera o te SiC he tata ki:
●120–200 W/m·K mō te SiC tino parakore
●Ki te whakataurite ki te quartz i te ~1.4 W/m·K anake
Mā tēnei rerekētanga nui ka tere ake, ka ōrite ake hoki te whakawhiti wera i roto i te oumu, ā, ka pai ake te ōritetanga o te tukanga wafer-ki-wafer.
Ka whakaratohia hoki e SiC:
●He ātete tino pai ki ngā hau tukatuka e ahu mai ana i te chlorine me te fluorine
●He kaha ake te kaha ā-ringa i te kuata
●He ātete pai ake ki te ru wera
●He iti ake te mōrearea o te whakarerekētanga i ngā huringa whakaputa roa
Nā ēnei āhuatanga ka tino pai ngā ngongo oumu SiC mō ngā taiao tukatuka wera haurua matatau, he mea nui te roa o te wā mahi me te pumau o te tukanga.
Ngā Āhuatanga Hanganga me te Hoahoa o ngā Ngongo Horopaki SiC
Ko te nuinga o ngā ngongo tohatoha SiC semiconductor he hoahoa porotaka tino tika kua arotauhia mō ngā pūnaha oumu poutū, whakapae rānei.
He rerekē ki ngā ngongo uku ahumahi noa, he tino kikī ngā tikanga hanga mō ngā ngongo SiC kounga-haurua nā te mea ka pāngia pea rātou e ngā panoni iti o te āhua:
●Te wā noho hau
●Te tohatoha wera
●Te mokowā o te angaanga
●Te ōritetanga o te whakatakotoranga
He mea tino nui anō hoki te kounga o te mata o roto. Mā ngā mata maeneene me te parakore teitei ka āwhina ki te whakaiti i:
●Te whakaputa matūriki
●Te kohikohinga o ngā toenga tukanga
●Te poke o te konganuku
Ko ētahi ngongo oumu matatau e whakamahi ana i ngā paninga CVD SiC hei whakapai ake i te ātete ki te waikura me te parakore o te mata.
Me whakataurite hoki te matotoru o te pakitara me te hoahoa hanganga i te pai o te wera me te roa o te mahi miihini. I te wā e tukatuka ana i ngā haurua-haurua, ka pāngia pea ngā ngongo oumu e ngā rau, tae atu ki ngā mano tini o ngā huringa whakamahana me te whakamatao puta noa i tō rātou oranga mahi.
Te Tūranga o ngā Ngongo Horapa SiC i roto i ngā Tukanga Ārahi-Haumaru
I roto i te hanga haurua-haurua, ehara i te mea he rūma tūturu noa iho te mahi a te ngongo horapa SiC. Ka pā tika ki te pumau o te tukanga me te kounga o te wafer.
I roto i ngā tukanga waikura wera, ka āwhina te ngongo ki te pupuri i te rere ōrite o te hāora me te pumau o te pāmahana, he mea nui ēnei mō te whakaputa i ngā kiriata waikura kounga teitei.
I roto i ngā tukanga tohatoha, ka tautoko te rere o te hau pumau i roto i te ngongo SiC i te tohatoha i te ira tāpiri tika mō te tohatoha o te phosphorus, te boron rānei.
Mō ngā tono LPCVD, pērā i te polysilicon me te whakatakotoranga silicon nitride, ka āwhina te kawe wera o te SiC ki te whakapai ake i te matotoru o te kiriata puta noa i te puranga wafer.
Ngā Raru Noa o ngā Ngongo Horapa SiC
Ahakoa he tino pakari te SiC, ka roa tonu te mau o ngā ngongo horapa i raro i ngā tikanga tukatuka haurua-ira.
Ko tētahi take noa ko te poke o ngā matūriki i puta mai i te koroheketanga o te mata, i te kohikohinga rānei o ngā toenga tukanga. I roto i te wā, ka taea e te pānga tonu ki ngā matū pāmahana teitei te whakararu i te mata o roto, ka piki ake te mōrearea o te poke.
Ko tētahi atu wero ko te pakaru wera. Ka taea e te pikinga tere o te pāmahana, te utaina koretake rānei o te paparanga te whakaputa i te ahotea wera ka mutu ka puta he pakaru moroiti, he pakaru hanganga rānei.
Tērā pea ka pāngia te mata o te ngongo e te pirau matū i raro i ngā taiao horoi kaha e hangai ana ki te halogen. Mā te roa o te wā e pāngia ana e ngā hau kei roto te fluorine ka taea te whakapōturi i te mata o te ngongo, ā, ka pā ki te pumau o te tukanga.
I roto i ngā taiao whakaputa, ka arahi pea ēnei raruraru ki:
●Te rerekētanga o te pāmahana
●Te kore ōrite o te kiriata
●Te pikinga ake o te maha o ngā matūriki
●Te whakaiti i te auautanga o te tukanga
Nā konei, ka aroturukihia e ngā kamupene haurua-ira te mahi a ngā ngongo oumu mā roto i ngā kaupapa tohu mātauranga me ngā kaupapa tiaki ārai auau.
Te Tiaki me te Whakahaere Mō Te Wā Katoa
He mea nui te tiaki tika kia roa ake ai te ora o te mahiNgā ngongo oumu SiCme te pupuri i te pumau o te mahi tukanga haurua-waenga.
Ko te nuinga o ngā kamupene hanga ka whakatinana i ngā huringa tirotiro kua whakaritea, tae atu ki:
●Te tirotiro i te mata tirohanga
●Te aroturuki i te au o te matūriki
●Whakamātautau tohu mō te oumu
●Manatoko ōritetanga wera
Ko ētahi o ngā tikanga horoi ko te horoi matū mākū, ko ngā maimoatanga tunutunu pāmahana teitei rānei hei tango i ngā toenga tukanga.
I roto i te hanga haurua-rahi nui, ko te whakakapinga o ngā ngongo horapa e hangai ana ki:
●Ngā hāora tukatuka
●Tau o te huringa wera
●Te mahi a te matūriki
●Ngā herenga tohu
Engari i te tatari kia kitea ngā pakaru, ka whakakapia ngā ngongo oumu e ngā kaihanga hangarau i mua i te pānga o te nekenekehanga tukanga ki te hua o te wafer.
I te whanaketanga o te hangarau semiconductor ki ngā pūnga tukanga iti ake me ngā tono wera nui ake, ka nui ake te hiranga o te ponongā ngongo tohatoha karawiti siliconka tipu tonu. Nā tō rātou kaha ki te tautoko i te tukatuka wera pumau, te iti o te poke, me te pono o te oumu mo te wa roa, ka waiho hei wāhanga nui o ngā taputapu hanga haurua-ā-ira hou.
Wā tuku: Mei-08-2026